公开(公告)号：US20080000505A1

公开(公告)日：2008-01-03

申请号：US11832968

申请日：2007-08-02

申请人： WAYNE MCDERMOTT ,  HOSHANG SUBAWALLA ,  ANDREW JOHNSON ,  ALEXANDER SCHWARZ ,  RICHARD OCKOVIC

发明人： WAYNE MCDERMOTT ,  HOSHANG SUBAWALLA ,  ANDREW JOHNSON ,  ALEXANDER SCHWARZ ,  RICHARD OCKOVIC

IPC分类号： B08B13/00

CPC分类号： H01L21/31133 ,  B08B3/12 ,  B08B7/0021 ,  C11D7/241 ,  C11D7/261 ,  C11D7/263 ,  C11D7/264 ,  C11D7/3209 ,  C11D7/3263 ,  C11D7/3281 ,  C11D7/5013 ,  C11D7/5022 ,  C11D11/007 ,  G03F1/82 ,  H01L21/02052 ,  H01L21/02101 ,  H01L21/6704 ,  H01L21/67057

摘要： Apparatus for processing an article with a single-phase supercritical dense processing fluid in a processing chamber while applying ultrasonic energy during processing. The single-phase supercritical dense fluid may be generated in a separate pressurization vessel and transferred to the processing chamber, or alternatively may be generated directly in the processing chamber. A processing agent may be added to the pressurization vessel, to the processing chamber, or to the single-phase supercritical dense fluid during transfer from the pressurization vessel to the processing chamber. The ultrasonic energy may be generated continuously at a constant frequency or at variable frequencies. Alternatively, the ultrasonic energy may be generated intermittently.

摘要翻译： 用于在处理室中处理具有单相超临界致密处理流体的制品的设备，同时在处理期间施加超声波能量。 单相超临界致密流体可以在单独的加压容器中产生并转移到处理室，或者可以直接在处理室中产生。 在从加压容器转移到处理室的过程中，可将加工剂加入到加压容器中，或加入到单相超临界稠密流体中。 超声能量可以以恒定频率或以可变频率连续生成。 或者，可以间歇地产生超声波能量。

公开(公告)号：US20060172428A1

公开(公告)日：2006-08-03

申请号：US11340641

申请日：2006-01-27

申请人： Wayne McDermott ,  Richard Ockovic ,  Dean Roth

发明人： Wayne McDermott ,  Richard Ockovic ,  Dean Roth

IPC分类号： G01N33/48

CPC分类号： G01N1/2205 ,  G01N1/34 ,  G01N15/00 ,  G01N15/0205 ,  G01N15/0606 ,  Y10T436/25 ,  Y10T436/25125 ,  Y10T436/25375 ,  Y10T436/255 ,  Y10T436/25875

摘要： A system and method comprising same for measuring and analyzing particles within a gas feed stream. In one aspect, the system comprises a particle counter and a particle capture filter that are arranged in parallel. In another aspect, the system comprises a purifying device to remove trace molecular impurities from a gas feed stream to reduce the presence of impurities.

摘要翻译： 一种用于测量和分析气体进料流中的颗粒的系统和方法。 一方面，该系统包括平行布置的颗粒计数器和颗粒捕获过滤器。 另一方面，该系统包括净化装置以从气体进料流中除去痕量分子杂质以减少杂质的存在。

公开(公告)号：US20080004194A1

公开(公告)日：2008-01-03

申请号：US11834800

申请日：2007-08-07

申请人： Wayne McDermott ,  Hoshang Subawalla ,  Andrew Johnson ,  Alexander Schwarz ,  Richard Ockovic

发明人： Wayne McDermott ,  Hoshang Subawalla ,  Andrew Johnson ,  Alexander Schwarz ,  Richard Ockovic

IPC分类号： C11D7/00

CPC分类号： H01L21/6704 ,  H01L21/02101 ,  H01L21/31133

摘要： Methods for generating a single-phase supercritical dense processing fluid have been disclosed. The single-phase supercritical dense processing fluid may be generated in a separate pressurization vessel and transferred to the processing chamber, or alternatively may be generated directly in the processing chamber. At least one processing agent is added to the pressurization vessel, or to the processing chamber, or to the single-phase supercritical dense fluid during transfer from the pressurization vessel to the processing chamber; to produce the single-phase supercritical dense processing fluid. Methods for processing an article with a single-phase supercritical dense processing fluid in a processing chamber are also disclosed.

摘要翻译： 已经公开了生产单相超临界致密加工流体的方法。 单相超临界致密加工流体可以在单独的加压容器中产生并转移到处理室，或者可以直接在处理室中产生。 在从加压容器到处理室的转移期间，至少一种加工剂被加入到加压容器或处理室中，或加到单相超临界稠密流体中; 生产单相超临界浓缩加工液。 还公开了在处理室中用单相超临界致密加工流体处理制品的方法。

公开(公告)号：US20050183739A1

公开(公告)日：2005-08-25

申请号：US10785298

申请日：2004-02-24

申请人： Wayne McDermott ,  Dean Roth ,  Richard Ockovic

发明人： Wayne McDermott ,  Dean Roth ,  Richard Ockovic

IPC分类号： B08B3/08 ,  B06B1/02 ,  B06B1/06 ,  B06B3/00 ,  B08B3/12 ,  H01L21/304

CPC分类号： B06B3/00 ,  B08B3/12

摘要： Ultrasonic probe comprising an elongate body having a first end and a second end, an ultrasonic transducer attached to the probe at or adjacent the first end, and an enlarged support section intermediate the ultrasonic transducer and the second end, wherein the enlarged support section has an equivalent diameter greater than an equivalent diameter of the body at any location between the enlarged support section and the ultrasonic transducer. The probe may be used to introduce ultrasonic energy into ultrasonic cleaning systems.

摘要翻译： 超声波探头包括具有第一端和第二端的细长主体，在第一端处或邻近第一端附接到探针的超声波换能器，以及位于超声波换能器和第二端之间的扩大的支撑部分，其中扩大的支撑部分具有 等效直径大于在扩大的支撑部分和超声波换能器之间的任何位置处的本体的等效直径。 探头可用于将超声波能量引入超声波清洗系统。