公开(公告)号：US20240217864A1

公开(公告)日：2024-07-04

申请号：US18600865

申请日：2024-03-11

Applicant: AGC Inc.

Inventor： Kazuki KANEHARA ,  Seiji INABA ,  Shuhei OGAWA

IPC: C03C3/097 ,  C03B5/235 ,  C03B19/02 ,  C03B25/02 ,  C03C3/06 ,  C03C3/078 ,  C03C3/087 ,  C03C3/089 ,  C03C3/091 ,  C03C3/095 ,  C03C3/11 ,  C03C3/12 ,  H01L21/683 ,  H01L21/687

CPC classification number: C03C3/097 ,  C03B5/235 ,  C03B19/02 ,  C03B25/02 ,  C03C3/06 ,  C03C3/078 ,  C03C3/087 ,  C03C3/089 ,  C03C3/091 ,  C03C3/095 ,  C03C3/111 ,  C03C3/125 ,  C03C2201/02 ,  H01L21/6833 ,  H01L21/68757

Abstract: The present invention relates to a glass block including: Si; and at least one of Mg and Ca, and satisfying, in terms of mol %, 49.0% or less of B2O3, 11.5% or less of P2O5, 10.0 to 59.5% of a (=SiO2+B2O3+P2O5+GeO2), 66.5% or less of (a+Al2O3), 7.0% or less of Ga2O3, 0.44 or less of b (=Al2O3+Ga2O3+In2O3)/a, 20.0% or more of R2O (R2: alkaline earth metal), 50.0% or less of MgO, MgO≥BaO, CaO≥BaO, SrO≥BaO, MgO≥SrO, CaO≥SrO, 1.2% or less of R12O (R1: alkali metal), 4.8% or less of TiO2 or ZrO2, 9.5% or less of MnO2, 11.8% or less of ZnO, 0.067 or less of Ta2O5/SiO2, 15.0% or less of an impurity element, and 0.20 or less of F/O.

公开(公告)号：US20230135358A1

公开(公告)日：2023-05-04

申请号：US18049853

申请日：2022-10-26

Applicant: AGC Inc.

Inventor： Mikio NAGANO ,  Seiji INABA ,  Rikiya KADO ,  Kiyoshi TAMAI ,  Yuha KOBAYASHI

IPC: C03C3/085 ,  C03C3/062 ,  H01L21/56

Abstract: Glass contains, in mol percentage on an oxide basis, SiO2: 35% to 60%, B2O3: 0.8% to 8%, Al2O3: 6% to 21%, and MgO: 17% to 44%. Additionally, (MgO/Al2O3)≥1 is satisfied, a measured Madelung constant m calculated by an expression (1A) is equal to or larger than 1.05, and a thermal expansion factor as a ratio of a measured value α of a linear thermal expansion coefficient to a calculated value αcal of a linear thermal expansion coefficient calculated from composition is equal to or smaller than 0.7. Herein, E is a measured value of a Young's modulus of the glass, Vp is an average atomic packing factor of the glass, and Gt is average bond dissociation energy of the glass.

公开(公告)号：US20210032155A1

公开(公告)日：2021-02-04

申请号：US16941631

申请日：2020-07-29

Applicant: AGC Inc.

Inventor： Seiji INABA ,  Yasunari SAITO ,  Kiyoshi TAMAI ,  Kazutaka ONO ,  Yuha KOBAYASHI

IPC: C03C3/087 ,  C03C3/085 ,  C03C3/097 ,  C03C3/095 ,  C03C3/091 ,  H01L23/15

Abstract: A supporting glass substrate has a ratio of a Young's modulus (GPa) to a density (g/cm3) that is 37.0 (GPa·cm3/g) or more and the ratio has a value larger than a ratio calculation value, the ratio calculation value being a ratio of a Young's modulus (GPa) calculated from a composition to a density (g/cm3). The ratio calculation value is represented by the following expression: α=2·Σ{(Vi·Gi)/Mi·Xi}, where, in the expression, Vi is a filling parameter of a metal oxide contained in the supporting glass substrate, Gi is a dissociation energy of a metal oxide contained in the supporting glass substrate. Mi is a molecular weight of a metal oxide contained in the supporting glass substrate, and Xi is a molar ratio of a metal oxide contained in the supporting glass substrate.