公开(公告)号：US10426020B2

公开(公告)日：2019-09-24

申请号：US15013930

申请日：2016-02-02

Applicant: ASML NETHERLANDS B.V.

Inventor： Peter M. Baumgart ,  John Martin Algots ,  Abhiram Govindaraju ,  Chirag Rajyaguru

IPC: H05G2/00 ,  F16C11/12 ,  G21K5/00 ,  G21K5/08

Abstract: Steering system for a droplet generator in a EUV system. The steering system permits controlled positioning of a droplet release point of the droplet generator. A movable member holding the droplet generator is coupled to stationary elements of the EUV system through a coupling system having a first subsystem that constrains lateral translation of the movable member, and a second subsystem that controls a relative inclination of the movable member. The first and second subsystems preferably include one or a combination of flexures that permit highly precise and repeatable positioning.

公开(公告)号：US20170291196A1

公开(公告)日：2017-10-12

申请号：US15092293

申请日：2016-04-06

Applicant: ASML Netherlands B.V.

Inventor： Armin Bernhard Ridinger ,  Georgiy O. Vaschenko ,  Chirag Rajyaguru ,  Peter Michael Baumgart ,  Timothy Richard Palmer

IPC: B08B3/02

CPC classification number: B08B3/02 ,  B01D29/336 ,  B01D29/68 ,  B01D41/04 ,  B08B9/00

Abstract: A system and method for cleaning a sintered filter includes a cleaning fluid source and a cleaning nozzle. The cleaning nozzle includes an inlet end coupled to the cleaning fluid source and at least one outlet port for outputting the cleaning fluid injected through the cleaning nozzle. The outlet port is disposed proximate to an outlet end of the cleaning nozzle. The cleaning nozzle has an external width less than an internal width of the sintered filter to be cleaned. The cleaning nozzle has a nozzle length greater than a full depth of the sintered filter to be cleaned. The outlet port can be disposed in a side of the cleaning nozzle proximate to the outlet end of the cleaning nozzle. The outlet port can include more than one outlet ports.