公开(公告)号：US20180246338A1

公开(公告)日：2018-08-30

申请号：US15901976

申请日：2018-02-22

Applicant: ASML Netherlands B.V.

Inventor： Cory Alan Stinson ,  Philip M. Conklin

IPC: G02B27/42 ,  H05G2/00 ,  G02B27/09 ,  H01S3/00 ,  H01S3/10 ,  G02F1/09

CPC classification number: G02B27/4261 ,  G02B27/0944 ,  G02F1/093 ,  H01S3/005 ,  H01S3/10023 ,  H05G2/003 ,  H05G2/008

Abstract: A system for an extreme ultraviolet (EUV) light source includes a light-generation system configured to emit one or more light beams onto a beam path; one or more optical amplifiers, each of the one or more amplifiers including a gain medium on the beam path, each gain medium being configured to amplify the one or more light beams to produce one or more amplified light beams; and one or more diffractive optical elements on the beam path, where each of the one or more diffractive optical elements has a plurality of focal lengths, and each focal length of the diffractive optical element is associated with a particular polarization state.

公开(公告)号：US20180077786A1

公开(公告)日：2018-03-15

申请号：US15265373

申请日：2016-09-14

Applicant: ASML Netherlands B.V.

Inventor： Michael Leslie Price ,  Cory Alan Stinson ,  Mark Joseph Mitry

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H01S1/00

Abstract: A method is described for measuring a moving property of a target. The method includes: forming a remaining plasma that at least partially coincides with an extended target region, the remaining plasma being a plasma formed from an interaction between a prior target and a prior radiation pulse in a target space; releasing a current target along a trajectory toward the target space that is at least partly overlapping the extended target region; determining one or more moving properties of the current target when the current target is within the extended target region and after a prior and adjacent target has interacted with a prior radiation pulse in the target space; and if any of the determined one or more moving properties of the current target are outside an acceptable range, then adjusting one or more characteristics of a radiation pulse directed toward the target space.