Faraday rotators, optical isolators, driver laser arrangements and EUV radiation generation apparatus

    公开(公告)号:US11988909B2

    公开(公告)日:2024-05-21

    申请号:US16996238

    申请日:2020-08-18

    Inventor: Steffen Erhard

    CPC classification number: G02F1/093 G02F1/091 G02B1/12

    Abstract: A Faraday rotator includes: a disk-shaped magneto-optical solid-state medium, a magnet generator configured to generate a magnetic field in the magneto-optical solid-state medium, a heat sink with a support surface for the magneto-optical solid-state medium, a reflector mounted between the heat sink and the magneto-optical solid-state medium and configured to reflect a laser beam entering the magneto-optical solid-state medium in a first impingement region on a first side of the magneto-optical solid-state medium facing away from the support surface, and a deflector configured to deflect the laser beam emerging from the magneto-optical solid-state medium back to a second impingement region at least partly overlapping with the first impingement region on the first side. An optical isolator can have at least one such Faraday rotator. A driver laser arrangement can have at least one such optical isolator. An EUV radiation generation apparatus can have such a driver laser arrangement.

    Faraday rotator and magneto-optical element

    公开(公告)号:US11971617B2

    公开(公告)日:2024-04-30

    申请号:US17048117

    申请日:2019-03-07

    Inventor: Futoshi Suzuki

    CPC classification number: G02F1/093 C03C3/15 C03C4/00 G02B27/28 G02F2202/09

    Abstract: A Faraday rotator includes a magnetic circuit including first to third magnetic materials each provided with a through hole through which light passes, and a Faraday element disposed in the through hole. When a direction where light passes through the through hole is defined as a direction of an optical axis, the first magnetic material is magnetized in a direction perpendicular to the direction of the optical axis, the second magnetic material is magnetized in a direction parallel to the direction of the optical axis, and the third magnetic material is magnetized in a direction perpendicular to the direction of the optical axis, and a length of the Faraday element along the direction of the optical axis is shorter than a length of the second magnetic material along the direction of the optical axis.

    OPTICAL ISOLATOR, ULTRAVIOLET LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD

    公开(公告)号:US20240103305A1

    公开(公告)日:2024-03-28

    申请号:US18531775

    申请日:2023-12-07

    CPC classification number: G02F1/093 H01S3/10061

    Abstract: An optical isolator includes an enclosure, a first polarizer disposed in the enclosure, a first Faraday rotator including a first Faraday material rotating a polarization direction of the light having passed through the first polarizer, and a first magnet producing a first magnetic field applied to a first magnetic field generation region where the first Faraday material is disposed, the first Faraday rotator disposed in the enclosure, and a first position adjustment mechanism moving the first Faraday material relative to the enclosure. A cross-sectional shape of the first Faraday material in a cross section perpendicular to an optical axis of the light passing through the first Faraday material and a cross-sectional shape of the first magnetic field generation region have major axes in the same direction. The first position adjustment mechanism moves the first Faraday material in the direction of a minor axis perpendicular to the major axis.

    Optical isolators
    5.
    发明授权

    公开(公告)号:US11719965B2

    公开(公告)日:2023-08-08

    申请号:US17123623

    申请日:2020-12-16

    CPC classification number: G02F1/093 G02B5/3083 G02B27/283 G02B27/30

    Abstract: An optical isolator device with minimized polarization mode dispersion includes a first polarization splitter/combiner, a non-reciprocal polarization rotator and a second polarization splitter/combiner. Only forward propagation of light is allowed to propagate in the device, with backward optical signal blocked due to non-reciprocal polarization rotation. The optical paths of o-ray and e-ray are arranged to achieve equal optical path lengths, which makes polarization mode dispersion minimal to nonexistent. When symmetrically configured, both polarization mode dispersion (PMD) and polarization dependent loss (PDL) become zero in principle.

    MAGNETIC CIRCUIT, FARADAY ROTATOR, AND MAGNETO-OPTIC DEVICE

    公开(公告)号:US20230168525A1

    公开(公告)日:2023-06-01

    申请号:US17920853

    申请日:2021-06-02

    Inventor: Futoshi SUZUKI

    CPC classification number: G02F1/093 H01F7/02

    Abstract: Provided is a magnetic circuit which, with the use in an optical isolator, is less likely to cause the polarizer to be damaged even with higher laser output power. A magnetic circuit 1 includes first to third magnets 11 to 13 each provided with a through hole allowing light to pass through and is composed of the first to third magnets 11 to 13 arranged coaxially in this order in a front-to-rear direction, wherein one of the first and third magnets 11 and 13 is magnetized in a direction Y perpendicular to a direction X of an optical axis to have a north pole located toward the through hole 2, the other of the first and third magnets 11 and 13 is magnetized in a direction Y perpendicular to the direction X of the optical axis to have a south pole located toward the through hole 2, the second magnet 12 is magnetized in a direction parallel to the direction X of the optical axis to have a north pole located toward the one of the first and third magnets 11 and 13 having the north pole located toward the through hole 2, and a length L1 of the first magnet 11 along the direction X of the optical axis is different from a length L3 of the third magnet 13 along the direction X of the optical axis.

    Heat-dissipating structure for optical isolator

    公开(公告)号:US09933637B2

    公开(公告)日:2018-04-03

    申请号:US15501602

    申请日:2015-03-27

    Abstract: The present invention includes a holding stay made of a heat conductive material that is the same as that of an isolator holder, the holding stay being in contact with a radiation stay made of a member having good thermal conductivity, the radiation stay being in contact with radiation fins extracted from the inside of the isolator holder through an external opening for extraction, columnar welded portions bond the holding stay and the isolator holder through openings for welding, the welded portions apply tensile force toward the isolator holder to the radiation stay via the holding stay, and the radiation stay presses the radiation fins by means of the above-described tensile force to be fixed to the isolator holder.

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