公开(公告)号：US20060006346A1

公开(公告)日：2006-01-12

申请号：US10886308

申请日：2004-07-07

Applicant: Robert Rathmell ,  Douglas Brown ,  Andrew Ray

Inventor： Robert Rathmell ,  Douglas Brown ,  Andrew Ray

IPC: G21K5/10

CPC classification number: H01J37/3171 ,  H01J37/244 ,  H01J37/304 ,  H01J2237/24507 ,  H01J2237/24528 ,  H01J2237/31703

Abstract: The present invention facilitates semiconductor device fabrication by obtaining angle of incidence values and divergence of an ion beam normal to a plane of a scanned beam. A divergence detector comprising a mask and profiler/sensor is employed to obtain beamlets from the incoming ion beam and then to measure beam current at a number of vertical positions. These beam current measurements are then employed to provide the vertical angle of incidence values, which provide a vertical divergence profile that serves to characterize the ion beam. These values can be employed by an ion beam generation mechanism to perform adjustments on the generated ion beam or position of the workpiece if the values indicate deviation from desired values.

Abstract translation: 本发明通过获得垂直于扫描光束的平面的离子束的入射角和发散角来促进半导体器件的制造。 使用包括掩模和轮廓仪/传感器的发散检测器从入射离子束获得子束，然后在多个垂直位置测量束电流。 然后使用这些射束电流测量来提供垂直入射角，其提供用于表征离子束的垂直发散分布。 这些值可以由离子束产生机构使用，以对所产生的离子束或工件的位置执行调整，如果值表示偏离所需值。

公开(公告)号：US20050132246A1

公开(公告)日：2005-06-16

申请号：US10724801

申请日：2003-12-01

Applicant: Joseph Schmalz ,  Fabian Rojas ,  Martyn Riley ,  Andrew Ray

Inventor： Joseph Schmalz ,  Fabian Rojas ,  Martyn Riley ,  Andrew Ray

IPC: G04G7/00 ,  H04J3/06 ,  G06F1/04

CPC classification number: G04G7/00 ,  H04J3/0667

Abstract: Embodiments of methods, computer programs, and systems for adjusting time settings according to the invention are disclosed. One embodiment of the invention of the computer system includes a first processor (140) that maintains a first time as well as a communication medium (115) coupled to the first processor (140). The computer system also includes a second processor (125) that maintains a second time and is coupled to the communications medium (115). The first processor (140) is adapted to receive a first message and the second processor (125) is adapted to receive a second message. A first time is recorded when the first processor (140) receives the first message. A second time is recorded when the second processor (125) receives the second message. The first processor (140) is adapted to send a third message to the second processor (125). The second processor (125) is adapted to send a fourth message to the first processor (140) that includes information indicative of the recorded second time. Upon receipt of the fourth message, the first time is set based at least in part on the sum of the recorded second time and the roundtrip time for the third and fourth messages.

Abstract translation: 公开了用于调整根据本发明的时间设置的方法，计算机程序和系统的实施例。 计算机系统的本发明的一个实施例包括维持第一时间的第一处理器（140）以及耦合到第一处理器（140）的通信介质（115）。 计算机系统还包括第二处理器（125），其维持第二时间并耦合到通信介质（115）。 第一处理器（140）适于接收第一消息，并且第二处理器（125）适于接收第二消息。 当第一处理器（140）接收到第一消息时，记录第一次。 当第二处理器（125）接收到第二消息时，记录第二次。 第一处理器（140）适于向第二处理器（125）发送第三消息。 第二处理器（125）适于向第一处理器（140）发送包括指示所记录的第二时间的信息的第四消息。 在接收到第四消息时，至少部分地基于所记录的第二时间和第三和第四消息的往返时间之和来设置第一时间。