公开(公告)号：US20160124316A1

公开(公告)日：2016-05-05

申请号：US14993071

申请日：2016-01-11

Applicant: Applied Materials, Inc.

Inventor： David MARKLE ,  Thomas LAIDIG ,  Jeffrey KASKEY ,  Jang Fung CHEN

IPC: G03F7/20

CPC classification number: G03F7/7015 ,  G03B27/42 ,  G03F7/70291

Abstract: A spatial light modulator imaging system is disclosed. The system comprises an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system, a projection module configured to project the illumination light to a substrate, and an illumination-projection beam separator coupled between the illumination module and the projection module, where the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, and where the illumination optical axis and the projection optical axis are substantially parallel to each other.

Abstract translation: 公开了一种空间光调制器成像系统。 该系统包括：照明模块，被配置为提供表示由空间光调制器成像系统成像的数据图案的照明光;投影模块，被配置为将照明光投影到基板;以及照明投影光束分离器，其耦合在照明模块 以及所述投影模块，其中所述照明投影光束分离器被配置为沿着照明光轴接收照明光，并且沿着投影光轴传输接收到所述投影模块的照明光，并且其中所述照明光轴和所述投影光学 轴基本上彼此平行。