公开(公告)号：US20200303228A1

公开(公告)日：2020-09-24

申请号：US16899043

申请日：2020-06-11

Applicant: Applied Materials, Inc.

Inventor： Masato Ishii ,  Richard O. Collins ,  Richard Giljum ,  Alexander Berger

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/673 ,  H01L21/67 ,  H01L21/68

Abstract: A substrate processing system is disclosed which includes a processing chamber comprising a susceptor having a first surface and a second surface opposite to the first surface, a groove formed in the first surface adjacent to a perimeter thereof, and a substrate support structure including a plurality of carrier lift pins, each of the plurality of carrier lift pins movably disposed in an opening formed from the second surface to the first surface, wherein the opening is recessed from the groove.

公开(公告)号：US09613835B2

公开(公告)日：2017-04-04

申请号：US14195331

申请日：2014-03-03

Applicant: APPLIED MATERIALS, INC.

Inventor： Richard O. Collins ,  Nyi Oo Myo

IPC: F26B3/30 ,  H01L21/67 ,  H05B3/00

CPC classification number: H01L21/67115 ,  H05B3/0047 ,  H05B2203/032

Abstract: Embodiments of heating lamps and heating lamp assemblies are disclosed herein. In some embodiments, a heating lamp may include a bulb; a reflector circumscribing the bulb proximate a first end of the bulb; a base coupled to the reflector on a side opposite the bulb; a handle coupled to the base on a side opposite the reflector, wherein the handle comprises a body having a first end coupled to the base and an opposing second end; a first conductor extending from the bulb and through the base and the handle in a direction opposite the bulb; and a second conductor extending from the bulb and through the base and the handle in a direction opposite the bulb.

公开(公告)号：USD711331S1

公开(公告)日：2014-08-19

申请号：US29472048

申请日：2013-11-07

Applicant: Applied Materials, Inc.

Designer： Shu-Kwan Lau ,  Mehmet Tugrul Samir ,  Anzhong Chang ,  Paul Brillhart ,  Richard O. Collins