公开(公告)号：US11279656B2

公开(公告)日：2022-03-22

申请号：US16168003

申请日：2018-10-23

Applicant: Applied Materials, Inc.

Inventor： Guodong Zhan ,  Xiaowei Wu ,  Xiao Ming He ,  Jennifer Y. Sun

IPC: C04B35/505 ,  C23C16/30 ,  C23C16/455 ,  C23C4/134 ,  C23C4/10 ,  C04B35/628 ,  C04B35/622 ,  C04B35/64 ,  C04B35/632 ,  C23C16/44 ,  C04B35/486 ,  C23C14/34 ,  C04B35/645 ,  C23C16/40 ,  C01F17/265 ,  C01F17/218

Abstract: Nanopowders containing nanoparticles having a core particle with a thin film coating. The core particles and thin film coatings are, independently, formed from at least one of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof. The thin film coating may be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed from the nanopowders and methods of making and using the nanopowders.