公开(公告)号：US20240258279A1

公开(公告)日：2024-08-01

申请号：US18016589

申请日：2022-02-28

Applicant: BOE Technology Group Co., Ltd.

Inventor： Xue Dong ,  Guangcai Yuan ,  Xin Gu ,  Junwei Yan ,  Fei Wang ,  Xiao Zhang ,  Haixu Li ,  Xuan Liang ,  Chengfei Wang ,  Mingxing Wang ,  Shulei Li ,  Xiaolei Zhang ,  Xinxin Zhao

IPC: H01L25/075 ,  H01L21/68 ,  H01L33/00

CPC classification number: H01L25/0753 ,  H01L21/681 ,  H01L33/0093

Abstract: An optical path structure, an optical path system, and a transfer method. The optical path structure includes a beam adjustment module configured to adjust a diameter of a laser beam and output a first beam; a beam shaping module configured to perform energy homogenization on the first beam to obtain a second beam; and a beam focusing module configured to focus the second beam and output a target light spot; the target light spot is used for irradiating a device substrate, so that a bonding material in the device substrate changes after being irradiated by the target light spot, and a target device is separated from a carrier substrate; where the bonding material is disposed between the target device and the carrier substrate.