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公开(公告)号：US20240258279A1
公开(公告)日：2024-08-01
申请号：US18016589
申请日：2022-02-28
发明人： Xue Dong , Guangcai Yuan , Xin Gu , Junwei Yan , Fei Wang , Xiao Zhang , Haixu Li , Xuan Liang , Chengfei Wang , Mingxing Wang , Shulei Li , Xiaolei Zhang , Xinxin Zhao
IPC分类号： H01L25/075 , H01L21/68 , H01L33/00
CPC分类号： H01L25/0753 , H01L21/681 , H01L33/0093
摘要： An optical path structure, an optical path system, and a transfer method. The optical path structure includes a beam adjustment module configured to adjust a diameter of a laser beam and output a first beam; a beam shaping module configured to perform energy homogenization on the first beam to obtain a second beam; and a beam focusing module configured to focus the second beam and output a target light spot; the target light spot is used for irradiating a device substrate, so that a bonding material in the device substrate changes after being irradiated by the target light spot, and a target device is separated from a carrier substrate; where the bonding material is disposed between the target device and the carrier substrate.
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公开(公告)号：US12121873B2
公开(公告)日：2024-10-22
申请号：US17409013
申请日：2021-08-23
发明人： Shaodong Sun , Junwei Yan , Guangcai Yuan , Guocai Zhang , Shihao Dong , Lilei Zhang , Haoran Gao , Wenyue Fu , Chengfei Wang , Xiaojie Pan
IPC分类号： C25D21/04 , B01D45/04 , B01F23/50 , B01F35/00 , B01F35/71 , C25D3/38 , C25D21/14 , B01F101/22
CPC分类号： B01F35/189 , B01D45/04 , B01F23/59 , B01F35/71805 , C25D3/38 , C25D21/04 , C25D21/14 , B01F23/56 , B01F2101/22
摘要： The present disclosure provides a gas-solid separation structure including: a feeding pipeline including a first feeding part, a second feeding part and a first valve disposed between the first and second feeding parts; a discharge pipeline having a first opening and a second opening opposite to each other, the second feeding part extending into the discharge pipeline via the first opening; wherein an exhaust channel is formed between the second feeding part and the discharge pipeline, exhaust holes are formed in a portion of the discharge pipeline opposite to the second feeding part, and the exhaust channel is in communication with the exhaust holes. The present disclosure further provides a feeding device and an electrochemical deposition apparatus. The present disclosure can improve the problem of interference with medicine powder release caused by gases entering the discharge pipeline.
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公开(公告)号：US12024787B2
公开(公告)日：2024-07-02
申请号：US17514971
申请日：2021-10-29
发明人： Guocai Zhang , Junwei Yan , Shihao Dong , Shaodong Sun , Chengfei Wang
摘要： The present disclosure relates to a filling device and apparatus, an electrochemical deposition system, and a filling method. The filling device includes: a feeding structure including a first feed port and a first discharge port; a container including a second feed port and a second discharge port; a weighing means disposed on the container; a conveying structure disposed between the first discharge port and the second feed port, the second feed port being in communication with the first discharge port via the conveying structure, and the conveying structure being configured to convey a material output from the first discharge port to the second feed port; and a control structure connected to the weighing means and the conveying structure, respectively, and configured to control a conveying speed of the conveying structure according to the weight detected by the weighing means.
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公开(公告)号：US11707834B2
公开(公告)日：2023-07-25
申请号：US17516269
申请日：2021-11-01
发明人： Chengfei Wang , Junwei Yan , Guangcai Yuan , Shaodong Sun , Guocai Zhang , Shihao Dong , Pengcheng Dong
CPC分类号： B25J9/026 , B25J13/088 , B25J15/0253 , C25D17/06
摘要： The present application relates to a substrate transfer device, comprising a horizontally arranged cross beam, and support beams longitudinally arranged at two ends of the cross beam, wherein a substrate carrier is suspended on the cross beam, the substrate carrier is located between the two support beams, and the substrate carrier is parallel to a plane where the two support beams are located, the substrate carrier comprises two side walls oppositely arranged in a horizontal direction, and each of the support beams is provided with an auxiliary clamping structure for clamping the substrate carrier during transferring of the substrate carrier.
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公开(公告)号：US11686010B2
公开(公告)日：2023-06-27
申请号：US17516236
申请日：2021-11-01
发明人： Chengfei Wang , Junwei Yan , Guangcai Yuan , Shaodong Sun , Guocai Zhang , Shihao Dong , Pengcheng Dong
摘要： The present disclosure provides a carrier liquid leakage preventing device and an electrochemical deposition apparatus. The carrier liquid leakage preventing device is used for containing liquid medicine dripping from a carrier; the carrier liquid leakage preventing device comprises: a guide rail disposed along a first direction, the first direction is a vertical direction perpendicular to the horizontal plane or a direction at an angle to the horizontal plane; a leakage preventing groove provided on the guide rail and capable of performing a lifting movement along the guide rail so as to move above or below the carrier; and a driver for driving the lifting movement of the leakage preventing groove.
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