Transfer apparatus and laser annealing apparatus

    公开(公告)号:US09941147B2

    公开(公告)日:2018-04-10

    申请号:US15182953

    申请日:2016-06-15

    CPC classification number: H01L21/6838 H01L21/67288

    Abstract: A transfer apparatus includes a supporting member, a free electron excitation device and a detection device; the free electrons excitation device is configured to excite semiconductor material of an object to be transferred to generate free electrons, and the detection device is configured to detect whether material of a surface of the transferred object in contact with the support surface of the supporting member is conductive under excitation by the free electron excitation device. A laser annealing apparatus comprising the transfer apparatus is further provided.

    Hydraulic Jack
    12.
    发明申请

    公开(公告)号:US20170327358A1

    公开(公告)日:2017-11-16

    申请号:US15531798

    申请日:2016-02-17

    CPC classification number: B66F3/32 B66F3/25 B66F3/42 F16K11/0856

    Abstract: A hydraulic jack includes an oil cylinder, an oil tank, and an oil storage barrel. The oil storage barrel includes a front portion and a back portion which are opposite to each other; an oil outlet of the oil cylinder is connected with an oil inlet at the front portion of the oil storage barrel by means of an oil inlet pipe; and an oil inlet of the oil tank is connected with an oil outlet at the front portion of the oil storage barrel by means of an oil outlet pipe, the oil inlet pipe and the oil outlet pipe are provided with switching valves for alternatively turning on the oil inlet pipe and the oil outlet pipe. A partition plate that is capable of moving along a barrel wall and an elastic telescoping member are provided inside the oil storage barrel.

    Beam splitter, laser generator and excimer laser annealing apparatus

    公开(公告)号:US10133081B2

    公开(公告)日:2018-11-20

    申请号:US15308091

    申请日:2016-01-15

    Abstract: Embodiments of the present invention provide a beam splitter, a laser generator and an excimer laser annealing apparatus, which relate to field of display technology, and reduce probability of pollution of the beam splitter to some extent and increase homogeneity of the laser beam that is passed through the beam splitter. The beam splitter includes a transmission region configured as a through-hole and a reflective region arranged at a periphery of the through-hole, wherein the through-hole is configured to be transmitted by a first laser beam that is received; and the reflective region is configured to reflect the first laser beam that is received. The beam splitter may be used in a laser generator to perform a scanning annealing process.

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