公开(公告)号：US10968348B2

公开(公告)日：2021-04-06

申请号：US16229591

申请日：2018-12-21

Applicant: Brewer Science, Inc.

Inventor： Xiao Liu ,  Qi Wu ,  Rama Puligadda ,  Dongshun Bai ,  Baron Huang

IPC: C08L71/12 ,  H01L23/00 ,  H01L23/31 ,  H01L23/528 ,  H01L21/48 ,  C08K3/00 ,  H01L21/683

Abstract: Novel thermoplastic polyhydroxyether-based compositions for use as a laser-releasable composition for temporary bonding and laser debonding processes are provided. The inventive compositions can be debonded using various UV lasers, leaving behind little to no debris. The layers formed from these compositions possess good thermal stabilities and are soluble in commonly-used organic solvents (e.g., cyclopentanone). The compositions can also be used as build-up layers for RDL formation.

公开(公告)号：US20210033975A1

公开(公告)日：2021-02-04

申请号：US16945542

申请日：2020-07-31

Applicant: Brewer Science, Inc.

Inventor： Reihaneh Sejoubsari ,  Tony D. Flaim ,  Xiao Liu

IPC: G03F7/11 ,  G03F7/34 ,  G03F7/004 ,  C08L33/14 ,  B81C1/00

Abstract: Methods are disclosed to prepare permanent materials that can be coated onto microelectronic substrates or used for other structural or optical applications. The materials are thermally stable to at least about 300° C., curable using a photo or thermal process, exhibit good chemical resistance (including during metal passivation), and have a lifespan of at least about 5 years, preferably at least about 10 years, in the final device. Advantageously, these materials can also be bonded at room temperature. The materials exhibit no movement or squeeze-out after bonding and adhere to a variety of substrate types.