公开(公告)号：US07655579B2

公开(公告)日：2010-02-02

申请号：US11970612

申请日：2008-01-08

申请人： Masaaki Miyagawa ,  Akihiro Yoshimura

发明人： Masaaki Miyagawa ,  Akihiro Yoshimura

IPC分类号： H01L21/00

CPC分类号： H01L21/6831 ,  H01L21/67103

摘要： A focus ring heat transfer method improves heat transfer of a focus ring arranged in an outer peripheral portion of a mounting surface of a mounting table adapted to mount a target substrate in a chamber. The method includes steps of: disposing a heat transfer sheet between the focus ring and the mounting table; and vacuum-evacuating the chamber prior to processing the target substrate and then restoring the pressure the inside of the chamber to an atmospheric pressure or a light vacuum pressure. Therefore, air present in a fine gap between the heat transfer sheet and the mounting surface is removed to allow the heat transfer sheet to adhere to the mounting surface.

摘要翻译： 聚焦环传热方法改善了布置在适于将目标基板安装在室中的安装台的安装表面的外周部分中的聚焦环的热传递。 该方法包括以下步骤：在聚焦环和安装台之间设置传热片; 并且在处理目标基板之前对腔室进行真空抽真空，然后将腔室内部的压力恢复到大气压力或轻的真空压力。 因此，除去传热片与安装面之间的微细间隙的空气，使传热片粘附在安装面上。

公开(公告)号：US4427710A

公开(公告)日：1984-01-24

申请号：US333755

申请日：1981-12-23

申请人： Masaki Terada ,  Akihiro Yoshimura ,  Kohichiro Hohsai ,  Junichi Minami

发明人： Masaki Terada ,  Akihiro Yoshimura ,  Kohichiro Hohsai ,  Junichi Minami

IPC分类号： A23C20/02 ,  A23L11/00 ,  A23L1/20

CPC分类号： A23C20/025 ,  A23L11/07

摘要： Beans are soaked and ground to form a mush (go), and the mush is heated and powderized. A thickening agent having a gelatinizing property is mixed with the powder. The tofu is prepared by mixing the powder with water and an additional amount of gelatinizing material.

摘要翻译： 豆被浸泡和磨碎以形成糊状（糊），并且将糊状物加热并粉化。 将具有糊化性质的增稠剂与粉末混合。 通过将粉末与水和额外量的糊化材料混合来制备豆腐。