Wafer processing cluster tool batch preheating and degassing method
    12.
    发明授权
    Wafer processing cluster tool batch preheating and degassing method 失效
    晶圆处理集群工具批量预热和脱气方法

    公开(公告)号:US5380682A

    公开(公告)日:1995-01-10

    申请号:US147666

    申请日:1993-11-03

    摘要: A wafer processing cluster tool, having one or more load-locks, is provided with one or more batch preheating modules that receive wafers only from the cluster tool transport module at the internal vacuum pressure of the machine. The loading, unloading, handling and processing of wafers in the machine can occur while other wafers are being preheated. The preheat module has a vertically moveable rack and is loaded with various sized batches of wafers with no vacant positions between them. Wafer shaped shields may occupy positions adjacent top and bottom wafers to cause them to heat the same as other wafers in the rack. Infrared lamps positioned outside of quartz windows heat wafers in the preheat module. The rack may rotate to improve heating uniformity. Temperature sensors, such as pyrometers, that do not contact the wafers being preheated, measure temperature for control of the heating of the lamps.

    摘要翻译: 具有一个或多个负载锁定的晶片处理集群工具设置有一个或多个批量预热模块,其仅在机器的内部真空压力下从集群工具传送模块接收晶片。 当其他晶片被预热时,可能会发生机器中晶片的装载,卸载,处理和处理。 预热模块具有可垂直移动的支架,并且装载有各种尺寸的批量的晶片,它们之间没有空置位置。 晶圆形屏蔽件可能占据与顶部和底部晶片相邻的位置,以使它们与机架中的其它晶片相同。 位于石英窗外部的红外灯在预热模块中加热晶片。 机架可旋转以提高加热均匀性。 温度传感器,例如高温计,不接触被预热的晶片,测量温度以控制灯的加热。

    Endoscopic surgical apparatus with rotation lock
    13.
    发明授权
    Endoscopic surgical apparatus with rotation lock 失效
    内窥镜手术器具旋转锁定

    公开(公告)号:US5836960A

    公开(公告)日:1998-11-17

    申请号:US804854

    申请日:1997-02-24

    IPC分类号: A61B17/28 A61B17/00

    摘要: A surgical instrument is disclosed for use in a wide variety of roles including grasping, dissecting, clamping, or retracting materials or tissue during surgical procedures performed either in open surgery or within the abdominal cavity. The surgical instrument includes a handle portion, a tubular body portion extending from the handle portion and defining a longitudinal axis, and tool structure associated with a distal portion of the tubular body portion. A rotation assembly is provided for effectuating rotation of the tool structure about the longitudinal axis of the body portion. Rotation locking structure is provided to lock the rotation assembly at a predetermined orientation such that it cannot be rotated with respect to the handle.

    摘要翻译: 公开了用于各种角色的手术器械,包括在开放手术或腹腔内执行的手术过程中的抓握,解剖,夹紧或缩回材料或组织。 手术器械包括手柄部分,从手柄部分延伸并限定纵向轴线的管状主体部分和与管状主体部分的远端部分相关联的工具结构。 提供旋转组件用于实现工具结构围绕主体部分的纵向轴线的旋转。 提供旋转锁定结构以将旋转组件锁定在预定方位,使得其不能相对于把手旋转。

    Endoscopic surgical apparatus with rotation lock
    14.
    发明授权
    Endoscopic surgical apparatus with rotation lock 失效
    内窥镜手术器具旋转锁定

    公开(公告)号:US5609601A

    公开(公告)日:1997-03-11

    申请号:US311493

    申请日:1994-09-23

    IPC分类号: A61B17/28 A61B17/00

    摘要: A surgical instrument is disclosed for use in a wide variety of roles including grasping, dissecting, clamping, or retracting materials or tissue during surgical procedures performed either in open surgery or within the abdominal cavity. The surgical instrument includes a handle portion, a tubular body portion extending from the handle portion and defining a longitudinal axis, and tool structure associated with a distal portion of the tubular body portion. A rotation assembly is provided for effectuating rotation of the tool structure about the longitudinal axis of the body portion. Rotation locking structure is provided to lock the rotation assembly at a predetermined orientation such that it cannot be rotated with respect to the handle.

    摘要翻译: 公开了用于各种角色的手术器械,包括在开放手术或腹腔内执行的手术过程中的抓握,解剖,夹紧或缩回材料或组织。 手术器械包括手柄部分,从手柄部分延伸并限定纵向轴线的管状主体部分和与管状主体部分的远端部分相关联的工具结构。 提供旋转组件用于实现工具结构围绕主体部分的纵向轴线的旋转。 提供旋转锁定结构以将旋转组件锁定在预定方位,使得其不能相对于把手旋转。

    Laser ablation device
    15.
    发明授权
    Laser ablation device 有权
    激光消融装置

    公开(公告)号:US06280437B1

    公开(公告)日:2001-08-28

    申请号:US09653340

    申请日:2000-08-31

    IPC分类号: A61F700

    摘要: A controlled advancement laser ablation device is provided for precise ablation of body matter. The laser ablation device includes a laser energy transmission mechanism such as, e.g., a fiber optic fiber mounted for controlled translational longitudinal movement relative to a housing structure. A laser energy generator is optically connected to the laser energy transmission mechanism. A controlled advancement mechanism is provided in engagement with the laser energy transmission mechanism for advancing the mechanism through the housing structure at a controlled rated coordinated with the laser energy generator output to ablate body tissue. Controlled advancement mechanisms include constant and/or variable rate springs, motors, and other mechanisms which can be coordinated with the laser energy generator to advance the laser energy transmission mechanism as the targeted substance is ablated. The device is particularly suitable for use in transmyocardial revascularization (TMR) and angioplasty procedures.

    摘要翻译: 提供了一种用于精确消除身体物质的受控进步激光消融装置。 激光烧蚀装置包括激光能量传递机构,例如安装成相对于壳体结构控制的平移纵向移动的光纤纤维。 激光能量发生器与激光能量传递机构光学连接。 提供了一种与激光能量传递机构接合的受控进步机构,用于通过与激光能量发生器输出协调的受控额定值来推进机构通过壳体结构以烧蚀身体组织。 受控的前进机构包括恒定和/或可变速率弹簧,马达和其他机构,其可以与激光能量发生器配合,以在靶物质被消融时推进激光能量传递机制。 该装置特别适用于经心肌血运重建术(TMR)和血管成形术程序。

    Controlled advancement lasing device
    16.
    发明授权
    Controlled advancement lasing device 失效
    控制推进激光装置

    公开(公告)号:US6135996A

    公开(公告)日:2000-10-24

    申请号:US62527

    申请日:1998-04-17

    IPC分类号: A61B17/00 A61B18/22 A61B17/36

    CPC分类号: A61B18/22 A61B2017/00973

    摘要: A controlled advancement laser ablation device is provided for precise ablation of body matter. The laser ablation device includes a handle portion having proximal and distal openings and a fiber advancing device having a stationary member and a movable member. The movable member is movable towards and away from the stationary member. A fiber casing is included having proximal and distal ends. The distal end is secured to the proximal end of the handle portion and the proximal end is secured to the stationary member. At least one optical fiber is included having proximal and distal ends. The distal end is extendible through the handle portion and a portion of the fiber, defined between the proximal and distal ends, is secured to the movable member. A laser energy generator is optically connected to the proximal end of the optical fiber. The handle portion includes a self-biasing advancing mechanism. The self-biasing advancing mechanism includes a guide member positioned within at least a portion of a channel extending within the handle portion. At least one biasing member is operatively connected to the guide member to guide the guide member proximally as a proximal force is applied to the distal end of the optical fiber and to guide the guide member distally when laser energy is transmitted to the optical fiber by the laser energy generator. Controlled advancement mechanisms include constant and/or variable rate springs, motors, and other mechanisms which can be coordinated with the laser energy generator to advance the laser energy transmission mechanism as the targeted substance is ablated. The device is suitable for use in transmyocardial revascularization (TMR) and angioplasty procedures.

    摘要翻译: 提供了一种用于精确消除身体物质的受控进步激光消融装置。 激光烧蚀装置包括具有近端和远端开口的把手部分和具有静止部件和可移动部件的纤维推进装置。 可移动构件可朝向和远离固定构件移动。 包括具有近端和远端的纤维套管。 远端固定到把手部分的近端并且近端固定到固定构件。 包括具有近端和远端的至少一根光纤。 远端可延伸通过手柄部分,并且限定在近端和远端之间的纤维的一部分固定到可动构件。 激光能量发生器光学连接到光纤的近端。 手柄部分包括自偏压推进机构。 自偏压推进机构包括定位在在手柄部分内延伸的通道的至少一部分内的引导构件。 至少一个偏置构件可操作地连接到引导构件,以在近侧力施加到光纤的远端时向近侧引导引导构件,并且当激光能量通过光纤被传送到光纤时将引导构件向远侧引导 激光能量发生器。 受控的前进机构包括恒定和/或可变速率弹簧,马达和其他机构,其可以与激光能量发生器配合,以在靶物质被消融时推进激光能量传递机制。 该装置适用于经心肌血运重建术(TMR)和血管成形术程序。

    Lasing device
    17.
    发明授权
    Lasing device 失效
    激光装置

    公开(公告)号:US5807383A

    公开(公告)日:1998-09-15

    申请号:US720934

    申请日:1996-10-04

    摘要: A controlled advancement laser ablation device is provided for precise ablation of body matter. The laser ablation device includes a laser energy transmission mechanism such as, e.g. a fiber optic fiber mounted for controlled translational longitudinal movement relative to a housing structure. A laser energy generator is optically connected to the laser energy transmission mechanism. A controlled advancement mechanism is provided in engagement with the laser energy transmission mechanism for advancing the mechanism through the housing structure at a controlled rated coordinated with the laser energy generator output to ablate body tissue. Controlled advancement mechanisms include constant and/or variable rate springs, motors, and other mechanisms which can be coordinated with the laser energy generator to advance the laser energy transmission mechanism as the targeted substance is ablated. The device is particularly suitable for use in transmyocardial revascularization (TMR) and angioplasty procedures.

    摘要翻译: 提供了一种用于精确消除身体物质的受控进步激光消融装置。 激光烧蚀装置包括例如激光能量传递机构。 安装成相对于壳体结构控制的平移纵向运动的光纤。 激光能量发生器与激光能量传递机构光学连接。 提供了一种与激光能量传递机构接合的受控进步机构,用于通过与激光能量发生器输出协调的受控额定值来推进机构通过壳体结构以烧蚀身体组织。 受控的前进机构包括恒定和/或可变速率弹簧,马达和其他机构,其可以与激光能量发生器配合,以在靶物质被消融时推进激光能量传递机制。 该装置特别适用于经心肌血运重建术(TMR)和血管成形术程序。

    Pyrometer temperature measurement of plural wafers stacked on a
processing chamber
    18.
    发明授权
    Pyrometer temperature measurement of plural wafers stacked on a processing chamber 失效
    堆叠在处理室上的多个晶片的高温计温度测量

    公开(公告)号:US5352248A

    公开(公告)日:1994-10-04

    申请号:US869465

    申请日:1992-04-15

    摘要: A method of measuring and controlling the temperature of articles stacked in parallel in a chamber. A pyrometer is positioned outside of a chamber and directed, either directly or with mirrors, through a window in the chamber wall so that only energy from wafers removed from the ends of the stack is received by the pyrometer. The pyrometer is inclined at an angle so that substantially all energy from the opposite side of the stack and reflected through spaces between facing parallel pairs of wafer surfaces will have been reflected a large number of times by the wafers before entering the pyrometer. Thus, regardless of the emissivity or transmissivity of the wafers, the energy incident upon the pyrometer will approach that emitted by a black body of the same temperature as the wafers, and the temperature read by the pyrometer will be independent of the emissivity or transmissivity of the wafers.

    摘要翻译: 一种测量和控制在室中平行堆叠的物品的温度的方法。 高温计位于腔室的外部,直接或通过反射镜通过腔室壁中的窗口引导,使得仅从堆叠端部移除的晶片的能量被高温计接收。 高温计以一定的角度倾斜,使得来自堆叠的相对侧的基本上所有的能量并且通过在进入高温计之前被晶片反射大量的晶片表面之间的空间的反射。 因此,无论晶片的发射率或透射率如何,入射到高温计上的能量将接近与晶片相同温度的黑体发射的能量,并且由高温计读取的温度将与发射率或透射率无关 晶圆。

    Wafer processing cluster tool batch preheating and degassing apparatus
    19.
    发明授权
    Wafer processing cluster tool batch preheating and degassing apparatus 失效
    晶圆处理集群工具批量预热和脱气装置

    公开(公告)号:US5259881A

    公开(公告)日:1993-11-09

    申请号:US701800

    申请日:1991-05-17

    摘要: A wafer processing cluster tool, having one or more load-locks, is provided with one or more batch preheating modules that receive wafers only from the cluster tool transport module at the internal vacuum pressure of the machine. The loading, unloading, handling and processing of wafers in the machine can occur while other wafers are being preheated. The preheat module has a vertically moveable rack and is loaded with various sized batches of wafers with no vacant positions between them. Wafer shaped shields may occupy positions adjacent top and bottom wafers to cause them to heat the same as other wafers in the rack. Infrared lamps positioned outside of quartz windows heat wafers in the preheat module. The rack may rotate to improve heating uniformity. Temperature sensors, such as pyrometers, that do not contact the wafers being preheated, measure temperature for control of the heating of the lamps.

    摘要翻译: 具有一个或多个负载锁定的晶片处理集群工具设置有一个或多个批量预热模块,其仅在机器的内部真空压力下从集群工具传送模块接收晶片。 当其他晶片被预热时,可能会发生机器中晶片的装载,卸载,处理和处理。 预热模块具有可垂直移动的支架,并且装载有各种尺寸的批量的晶片,它们之间没有空置位置。 晶圆形屏蔽件可能占据与顶部和底部晶片相邻的位置,以使它们与机架中的其它晶片相同。 位于石英窗外部的红外灯在预热模块中加热晶片。 机架可旋转以提高加热均匀性。 温度传感器,例如高温计,不接触被预热的晶片,测量温度以控制灯的加热。