MICROPHONE DRIVING DEVICE AND DIGITAL MICROPHONE INCLUDING THE SAME

    公开(公告)号:US20180138882A1

    公开(公告)日:2018-05-17

    申请号:US15684625

    申请日:2017-08-23

    Abstract: The present disclosure relates to a microphone driving device and a digital microphone including the same. A microphone driving device according to an embodiment of the inventive concept includes a voltage-to-current converter, a current-to-voltage converter, an analog-to-digital converter, a digital amplification unit, and a gain controller. The voltage-to-current converter converts an acoustic signal to an output current signal based on a gain control signal. The current-to-voltage converter converts the output current signal to an amplified voltage signal. The analog-to-digital converter converts the amplified voltage signal to a digital signal. The digital amplification unit amplifies the digital signal to an amplified digital signal based on the gain control signal. The gain controller generates a gain control signal. The microphone driving device and the digital microphone including the same according to the inventive concept may have a wide dynamic range and reduce the influence of noise.

    PRESSURE SENSOR AND METHOD FOR FABRICATING THE SAME

    公开(公告)号:US20170241853A1

    公开(公告)日:2017-08-24

    申请号:US15234911

    申请日:2016-08-11

    CPC classification number: G01L9/0054 G01L9/0045

    Abstract: Provided is a pressure sensor including a substrate having a cavity therein, a partition wall disposed in the substrate to surround the cavity, a substrate insulation layer disposed on the top surface of the substrate to cover the cavity, a sensing unit disposed on the substrate insulation layer, and an encapsulation layer disposed on the substrate insulation layer to cover the sensing unit. The cavity may extend from a top surface toward a bottom surface of the substrate, the partition wall may have an inner sidewall exposed by the cavity, and at least a portion of the sensing unit may overlap the cavity when viewed in a plan view.

    MICROPHONE
    13.
    发明申请
    MICROPHONE 有权
    麦克风

    公开(公告)号:US20150146906A1

    公开(公告)日:2015-05-28

    申请号:US14282929

    申请日:2014-05-20

    CPC classification number: H04R7/02 H04R19/04

    Abstract: Provided is a microphone. The microphone includes a substrate including an acoustic chamber, a lower backplate disposed on the substrate, a diaphragm spaced apart from the lower backplate on the lower backplate, the diaphragm having a diaphragm hole passing therethrough, a connection unit disposed on the lower backplate to extend through the diaphragm hole, and an upper backplate disposed on the connection unit, the upper backplate being spaced apart from the diaphragm. Thus, the microphone may be improved in sensitivity and reliability.

    Abstract translation: 提供一个麦克风 该麦克风包括一个包括声学室的基板,设置在基板上的下背板,与下背板上的下背板隔开的隔膜,隔膜具有穿过其中的隔膜孔,连接单元设置在下背板上以延伸 通过隔膜孔和设置在连接单元上的上背板,上背板与隔膜间隔开。 因此,可以提高麦克风的灵敏度和可靠性。

    MICRO ELECTRO MECHANICAL SYSTEM CATALYTIC COMBUSTIBLE GAS SENSOR USING POROUS MEMBRANE EMBEDDED MICRO-HEATER
    14.
    发明申请
    MICRO ELECTRO MECHANICAL SYSTEM CATALYTIC COMBUSTIBLE GAS SENSOR USING POROUS MEMBRANE EMBEDDED MICRO-HEATER 审中-公开
    微电子机械系统催化可燃气体传感器使用多孔膜嵌入式微加热器

    公开(公告)号:US20140208838A1

    公开(公告)日:2014-07-31

    申请号:US13897293

    申请日:2013-05-17

    CPC classification number: G01N27/16

    Abstract: Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.

    Abstract translation: 提供了一种使用多孔膜嵌入式微型加热器和微机电系统(MEMS)技术的催化可燃气体传感器。 本公开提供了一种在结构上,机械上和电气上稳定的气体传感器,并且在MEMS催化可燃气体传感器中具有简单的装置制造工艺,其小型化并且还通过在多孔中刺穿多个孔而消耗极少量的功率 膜,加热电阻器和感测电极,通过蚀刻,从而通过多个孔将基板热隔离预定厚度,并且包括使用感测材料形成的感测结构和使用补偿材料形成的补偿结构。

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