公开(公告)号：US20170241853A1

公开(公告)日：2017-08-24

申请号：US15234911

申请日：2016-08-11

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Chang Han JE ,  Woo Seok YANG ,  Sung Q LEE ,  Chang Auck CHOI

IPC: G01L9/00

CPC classification number: G01L9/0054 ,  G01L9/0045

Abstract: Provided is a pressure sensor including a substrate having a cavity therein, a partition wall disposed in the substrate to surround the cavity, a substrate insulation layer disposed on the top surface of the substrate to cover the cavity, a sensing unit disposed on the substrate insulation layer, and an encapsulation layer disposed on the substrate insulation layer to cover the sensing unit. The cavity may extend from a top surface toward a bottom surface of the substrate, the partition wall may have an inner sidewall exposed by the cavity, and at least a portion of the sensing unit may overlap the cavity when viewed in a plan view.

公开(公告)号：US20150146906A1

公开(公告)日：2015-05-28

申请号：US14282929

申请日：2014-05-20

Applicant: Electronics and Telecommunications Research Institute

Inventor： Chang Han JE ,  Jaewoo LEE ,  Woo Seok YANG ,  Jong-Kee KWON

IPC: H04R7/02 ,  H04R1/08

CPC classification number: H04R7/02 ,  H04R19/04

Abstract: Provided is a microphone. The microphone includes a substrate including an acoustic chamber, a lower backplate disposed on the substrate, a diaphragm spaced apart from the lower backplate on the lower backplate, the diaphragm having a diaphragm hole passing therethrough, a connection unit disposed on the lower backplate to extend through the diaphragm hole, and an upper backplate disposed on the connection unit, the upper backplate being spaced apart from the diaphragm. Thus, the microphone may be improved in sensitivity and reliability.

Abstract translation: 提供一个麦克风 该麦克风包括一个包括声学室的基板，设置在基板上的下背板，与下背板上的下背板隔开的隔膜，隔膜具有穿过其中的隔膜孔，连接单元设置在下背板上以延伸 通过隔膜孔和设置在连接单元上的上背板，上背板与隔膜间隔开。 因此，可以提高麦克风的灵敏度和可靠性。

公开(公告)号：US20220251948A1

公开(公告)日：2022-08-11

申请号：US17546439

申请日：2021-12-09

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Sung Q LEE ,  Joho YUN ,  Chang Han JE ,  Gunn HWANG

IPC: E21B47/12 ,  G01F1/663 ,  G01F1/66

Abstract: Disclosed is a method of operating a flow sensor according to an embodiment of the present disclosure, which includes receiving an ultrasonic signal reflected from a particle, generating first and second digital, generating a first Doppler frequency based on the first and second digital signals, a predetermined number of samples, and a first time period, comparing the first Doppler frequency with a second reference frequency, when the first Doppler frequency is less than a first reference frequency, down-sampling the predetermined number of samples to a first sampling frequency or a second sampling frequency, generating a second Doppler frequency based on the first and second digital signals, the number of down-sampled samples, and a second time period determining an output frequency based on the second Doppler frequency when the first Doppler frequency is less than a first reference frequency, and obtaining flow information of the particle based on the output frequency.

公开(公告)号：US20200225138A1

公开(公告)日：2020-07-16

申请号：US16735899

申请日：2020-01-07

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Chang Han JE ,  Yil Suk YANG ,  Hyunjoong LEE

IPC: G01N11/16 ,  H01L41/053 ,  H01L41/113

Abstract: Provided is a fluid viscosity measuring device including a support structure having an opening part, the opening part penetrating the support structure in a first direction, a driving resonator fixed to the support structure and extending to overlap the opening part, and a detection resonator fixed to the support structure and extending parallel to the driving resonator, the detection resonator being spaced apart from the driving resonator in the first direction. The driving resonator includes a first piezoelectric body. The detection resonator includes a second piezoelectric body. The first piezoelectric body and the second piezoelectric body have the same shape.

公开(公告)号：US20150117680A1

公开(公告)日：2015-04-30

申请号：US14243755

申请日：2014-04-02

Applicant: Electronics and Telecommunications Research Institute

Inventor： Jaewoo LEE ,  Chang Han JE ,  Woo Seok YANG ,  Jong-Kee KWON

IPC: H04R17/02 ,  H04R1/08

CPC classification number: H04R19/005 ,  H04R2201/003

Abstract: Provided are an acoustic sensor and a method of manufacturing the same. The acoustic sensor includes a substrate including an acoustic chamber, a first hole, and a second hole, penetrating the substrate, a lower electrode pad extended onto a top surface of the substrate while covering a sidewall of the first hole, a diaphragm pad extended onto the top surface of the substrate while covering a sidewall of the second hole, a lower electrode provided on the acoustic chamber and connected to the lower electrode pad, and a diaphragm above the lower electrode while being separated from the lower electrode and connected to the diaphragm pad.

Abstract translation: 提供一种声传感器及其制造方法。 该声学传感器包括：衬底，包括穿透衬底的声学室，第一孔和第二孔;延伸到衬底顶表面上的下电极焊盘，同时覆盖第一孔的侧壁， 衬底的顶表面，同时覆盖第二孔的侧壁，设置在声学室上并连接到下电极焊盘的下电极，以及在与下电极分离并连接到隔膜的下电极之上的膜片 垫。

公开(公告)号：US20140084394A1

公开(公告)日：2014-03-27

申请号：US13934661

申请日：2013-07-03

Applicant: Electronics and Telecommunications Research Institute

Inventor： Chang Han JE

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0018 ,  B81B7/0054 ,  B81B2201/0257 ,  B81C1/00158

Abstract: Provided is a structure for improving performance of a micro electro mechanical system (MEMS) microphone by preventing deformation from occurring due to a residual stress and a package stress of a membrane and by decreasing membrane rigidity. A MEMS microphone according to the present disclosure includes a backplate formed on a substrate, an insulating layer formed on the substrate to surround the backplate; a membrane formed to be separate from above the backplate by a predetermined interval; a membrane supporting portion configured to connect the membrane to the substrate; and a buffering portion formed in a double spring structure between the membrane and the membrane supporting portion.

Abstract translation: 提供了一种用于通过防止由于残余应力和膜的封装应力而引起的变形以及降低膜刚度来提高微机电系统（MEMS）麦克风的性能的结构。 根据本公开的MEMS麦克风包括形成在基板上的背板，形成在基板上以围绕背板的绝缘层; 形成为与背板上方隔开预定间隔的膜; 膜支撑部分，其构造成将膜连接到基底; 以及形成在膜和膜支撑部之间的双弹簧结构中的缓冲部。

公开(公告)号：US20140061825A1

公开(公告)日：2014-03-06

申请号：US13873195

申请日：2013-04-29

Applicant: Electronics and Telecommunications Research Institute

Inventor： Jae Woo LEE ,  Chang Han JE ,  Woo Seok YANG ,  Jong Dae KIM

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0018 ,  B81B3/0072 ,  B81B2201/0257 ,  B81C1/00158 ,  B81C1/00182 ,  H04R19/005 ,  H04R19/04 ,  H04R31/006

Abstract: Provided are a micro electro mechanical system (MEMS) acoustic sensor for removing a nonlinear component that occurs due to a vertical motion of a lower electrode when external sound pressure is received by fixing the lower electrode to a substrate using a fixing pin, and a fabrication method thereof. The MEMS acoustic sensor removes an undesired vertical motion of a fixed electrode when sound pressure is received by forming a fixing groove on a portion of the substrate and then forming a fixing pin on the fixing groove, and fixing the fixed electrode to the substrate using the fixing pin, and thereby improves a frequency response characteristic and also improves a yield of a process by inhibiting thermal deformation of the fixed electrode that may occur during the process.

Abstract translation: 提供了一种微机电系统（MEMS）声传感器，用于通过使用固定销将下电极固定到基板上来接收外部声压时，去除由于下电极的垂直运动而发生的非线性分量，以及制造 方法。 通过在基板的一部分上形成固定槽，然后在固定槽上形成固定销，并通过使用该固定电极将固定电极固定到基板上，MEMS声学传感器消除固定电极的不期望的垂直运动， 固定销，从而提高了频率响应特性，并且还通过抑制在该过程中可能发生的固定电极的热变形来提高工艺的产量。

公开(公告)号：US20130185928A1

公开(公告)日：2013-07-25

申请号：US13796018

申请日：2013-03-12

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Jaewoo LEE ,  Chang Han JE ,  Woo Seok YANG ,  Jongdae KIM

IPC: H04R31/00

CPC classification number: H04R31/00 ,  H04R19/005 ,  H04R19/02

Abstract: Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.

Abstract translation: 提供了一种声学传感器。 声学传感器包括：基底，其包括侧壁部分和从侧壁部分的底部延伸的底部部分; 固定在所述基板上的下部电极，具有凹部和凸部，所述凹部包括在所述底部的中间区域的第一孔，所述凸部包括在所述底部的边缘区域上的第二孔; 隔膜面向下电极的凹部，其间具有振动空间; 隔膜支撑体设置在隔膜侧面的下电极上，具有与隔膜相同高度的顶表面; 以及设置在下部电极下方的底部和侧壁部之间的空间中的声学室。