公开(公告)号：US20230418152A1

公开(公告)日：2023-12-28

申请号：US18211968

申请日：2023-06-20

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Brian Wiseman ,  Paul J. Magoon ,  Huaping Wang

IPC: G03F1/66 ,  G03F1/38 ,  B65B23/20

CPC classification number: G03F1/66 ,  G03F1/38 ,  B65B23/20

Abstract: Spacers include a base configured to be placed within depressions of one of a cover or a baseplate of a reticle pod, and a contact surface configured to contact the other of the cover and the baseplate. The spacers are configured to space the cover and the baseplate apart from one another such that sealing surfaces of the cover and the baseplate are separated by a gap. The depressions can be gripper pockets of the baseplate. Multiple spacers can be used in a reticle pod to provide the gap between sealing surfaces. The spacers can be installed to prepare a reticle pod for shipment.