公开(公告)号：US20180149315A1

公开(公告)日：2018-05-31

申请号：US15574617

申请日：2016-05-16

Applicant: ENTEGRIS, INC.

Inventor： Joseph R. DESPRES ,  Barry Lewis CHAMBERS ,  Joseph D. Sweeney ,  Richard S. RAY ,  Steven E. BISHOP

IPC: F17C7/00 ,  H01L21/67 ,  F17C11/00 ,  F17C13/00

CPC classification number: F17C7/00 ,  F17C11/00 ,  F17C13/00 ,  F17C13/025 ,  F17C13/026 ,  F17C13/084 ,  F17C2205/0107 ,  F17C2205/0142 ,  F17C2205/0176 ,  F17C2221/03 ,  F17C2223/0123 ,  F17C2225/0123 ,  F17C2227/0107 ,  F17C2227/042 ,  F17C2250/032 ,  F17C2250/043 ,  F17C2250/0439 ,  F17C2250/0443 ,  F17C2250/0447 ,  F17C2250/0626 ,  F17C2250/0631 ,  F17C2270/0518 ,  H01L21/67 ,  H01L21/67017

Abstract: Gas supply systems and methods are described for delivery of gas to gas-utilizing process tools, e.g., gas-utilizing tools for manufacturing of semiconductor products, flat-panel displays, solar panels, etc. The gas supply systems may comprise gas cabinets that are arranged with adsorbent-based and/or interiorly pressure-regulated gas supply vessels therein, and a gas mixing manifold is described, which may be disposed in the gas cabinet or operated in a standalone fashion. In one aspect, gas supply systems are described in which vessels susceptible to cooling involving diminution of gas supply pressure are processed after pressure-controlled termination of dispensing operation, for dispensing operation achieving utilization of gas remaining in the vessel after such termination.