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公开(公告)号：US10888817B2
公开(公告)日：2021-01-12
申请号：US16500665
申请日：2018-03-28
Applicant: Edwards Limited
Inventor： Andrew Seeley , Duncan Michael Price
Abstract: A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.
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公开(公告)号：US10661217B2
公开(公告)日：2020-05-26
申请号：US15756428
申请日：2016-08-22
Applicant: Edwards Limited
Inventor： Duncan Michael Price , Gary Peter Knight
Abstract: The abatement apparatus includes a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of an effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This allows the apparatus to be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials.
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公开(公告)号：US20200030828A1
公开(公告)日：2020-01-30
申请号：US16498108
申请日：2018-03-21
Applicant: Edwards Limited
Inventor： Andrew Seeley , Duncan Michael Price
Abstract: A nozzle for an abatement apparatus and a method are disclosed. The nozzle is for abatement apparatus operable to treat an effluent stream from a processing tool, the nozzle comprises: a nozzle body defining a nozzle inlet operable to receive the effluent stream, a nozzle outlet, and a conduit extending between the nozzle inlet and the nozzle outlet and operable to convey the effluent stream in a direction of flow from the nozzle inlet to the nozzle outlet; and an effluent stream rotator configured to impart a rotational component to the effluent stream to rotate the effluent stream around the direction of flow. In this way, the effluent stream is rotated as it passes through the nozzle body. The destruction rate efficiency achieved by an abatement apparatus when receiving such rotating effluent streams has been found to be significantly improved compared to non-rotating effluent streams.
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公开(公告)号：US20180311607A1
公开(公告)日：2018-11-01
申请号：US15756428
申请日：2016-08-22
Applicant: Edwards Limited
Inventor： Duncan Michael Price , Gary Peter Knight
CPC classification number: B01D53/005 , B01D2257/2066 , B01D2259/80 , F23D14/16 , F23G5/10 , F23G7/063 , H01L21/67017
Abstract: The abatement apparatus includes a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of an effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This allows the apparatus to be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials.
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公开(公告)号：US12189362B2
公开(公告)日：2025-01-07
申请号：US17055391
申请日：2019-05-13
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Gary Peter Knight , Duncan Michael Price , Mayank Verma
IPC: G05B19/4099 , B33Y50/00 , F23D14/18 , G06F30/00 , G06F30/23 , G06F119/18 , G06T17/20 , F23G7/06 , G06F113/10
Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.
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Patent Agency Ranking
公开(公告)号：US20230001478A1
公开(公告)日：2023-01-05
申请号：US17779361
申请日：2020-11-24
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price
Abstract: A method of fabricating a burner element for an abatement apparatus is disclosed. The method comprises: injection moulding a charge comprising metal particles and a flow compound into a mould defining the burner element to produce a moulded burner element; and sintering the moulded burner element. In this way, injection moulding is used to produce the burner element, which provides far more flexibility regarding the design and properties of the burner element and avoids the necessity of incorporating a perforated support into the burner element. This allows burner elements of more intricate design to be produced, as well as burner elements which are thinner than those produced using existing techniques, which increases the volume of a combustion chamber defined by that burner element for any external burner element size, which in turn increases the amount of effluent gas that can be treated for any burner size.
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公开(公告)号：US20220234056A1
公开(公告)日：2022-07-28
申请号：US17617473
申请日：2020-06-05
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Ian David Stones , Duncan Michael Price
Abstract: An inlet assembly for an abatement apparatus includes an inlet nozzle defining a non-circular inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the abatement apparatus, at least one outlet aperture and a nozzle bore extending along a longitudinal axis between the non-circular inlet aperture and the outlet aperture for conveying the effluent gas stream from the non-circular inlet aperture to the outlet aperture for delivery to a treatment chamber of the abatement apparatus, the nozzle bore defining an inlet portion extending from the non-circular inlet aperture, a flow-dividing structure positioned downstream of the inlet portion and configured to separate the effluent gas stream into at least a pair of effluent gas streams and an outlet portion extending to the outlet aperture and configured to convey the pair of effluent gas streams to the treatment chamber of the abatement apparatus.
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公开(公告)号：US20210223755A1
公开(公告)日：2021-07-22
申请号：US17055391
申请日：2019-05-13
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Gary Peter Knight , Duncan Michael Price , Mayank Verma
IPC: G05B19/4099 , B33Y50/00
Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.
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公开(公告)号：US20180335209A1
公开(公告)日：2018-11-22
申请号：US15598499
申请日：2017-05-18
Applicant: Edwards Limited
Inventor： Andrew James Seeley , Duncan Michael Price
Abstract: An inlet assembly for a burner and a method are disclosed. The inlet assembly comprises: an inlet nozzle defining an inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the burner, a non-circular outlet aperture, and a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying the effluent gas stream from the inlet aperture to the outlet aperture for delivery to the combustion chamber of the burner, the nozzle bore having an inlet portion extending from the inlet aperture and an outlet portion extending to the non-circular outlet aperture. In this way, the non-circular outlet aperture provides a non-circular effluent gas stream flow into the combustion chamber. The non-circular effluent gas flow enables a greater volume of effluent gas stream to be introduced into the combustion chamber whilst still achieving or exceeding the required levels of abatement. This is because a non-circular effluent gas stream provides a reduced distance along which diffusion and reaction needs to occur compared to that of an equivalent circular effluent gas stream. Hence, an increased volume of effluent gas stream can be abated, compared to that of an equivalent circular effluent gas stream.
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公开(公告)号：US20180209420A1
公开(公告)日：2018-07-26
申请号：US15745619
申请日：2016-06-15
Applicant: Edwards Limited
Inventor： Gary Peter Knight , Andrew James Seeley , Geoffrey Young , Duncan Michael Price
CPC classification number: F04C19/005 , F04C19/00 , F04C19/004 , F04C25/00 , F04C29/0085 , F04C29/02 , F04C2280/04
Abstract: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.
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