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公开(公告)号:US10767860B2
公开(公告)日:2020-09-08
申请号:US15777023
申请日:2016-10-27
申请人: Edwards Limited
发明人: Gary Peter Knight
摘要: A treatment apparatus for treating an effluent gas includes a combustion chamber; a burner; an inlet for receiving secondary combustion air; an exhaust gas outlet for outputting exhaust gases from the combustion chamber; and a heat exchanger. The heat exchanger is configured to exchange heat between a first fluid and a second fluid flowing through respective first and second fluid flow paths. The first fluid flow path is connected to the inlet and the second fluid flow path is connected to the outlet such that the exhaust gases received at the outlet flow into the second fluid flow path. The heat exchanger comprises a fluid flow communication path for providing a path for flow of a portion of the exhaust gases from the second fluid into the first fluid; and at least one inlet aperture for inputting the first fluid to the combustion chamber.
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公开(公告)号:US20180214812A1
公开(公告)日:2018-08-02
申请号:US15745923
申请日:2016-06-15
申请人: Edwards Limited
IPC分类号: B01D47/10
CPC分类号: B01D47/10 , B01D53/68 , B01D53/75 , B01D53/78 , B01D2257/108 , B01D2257/2027 , B01D2257/204 , B01D2257/406 , B01D2257/553 , B01D2258/0216 , C23C16/44 , C23C16/4412 , F04C19/001 , Y02C20/30
摘要: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
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公开(公告)号:US20180335210A1
公开(公告)日:2018-11-22
申请号:US15777023
申请日:2016-10-27
申请人: Edwards Limited
发明人: Gary Peter Knight
摘要: A treatment apparatus for treating an effluent gas comprising:includes a combustion chamber; a burner; an inlet for receiving secondary combustion air; an exhaust gas outlet for outputting exhaust gases from the combustion chamber; and a heat exchanger. The heat exchanger is configured to exchange heat between a first fluid and a second fluid flowing through respective first and second fluid flow paths. The first fluid flow path is connected to the inlet such that the secondary combustion air flows from the inlet into the first fluid flow path and the second fluid flow path is connected to the outlet such that the exhaust gases received at the outlet flow into the second fluid flow path. The heat exchanger comprises a fluid flow communication path for providing a path for flow of a portion of the exhaust gases from the second fluid into the first fluid; and at least one inlet aperture for inputting the first fluid to the combustion chamber.
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公开(公告)号:US10661217B2
公开(公告)日:2020-05-26
申请号:US15756428
申请日:2016-08-22
申请人: Edwards Limited
摘要: The abatement apparatus includes a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of an effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This allows the apparatus to be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials.
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公开(公告)号:US20180311607A1
公开(公告)日:2018-11-01
申请号:US15756428
申请日:2016-08-22
申请人: Edwards Limited
CPC分类号: B01D53/005 , B01D2257/2066 , B01D2259/80 , F23D14/16 , F23G5/10 , F23G7/063 , H01L21/67017
摘要: The abatement apparatus includes a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of an effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This allows the apparatus to be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials.
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公开(公告)号:US20240179826A1
公开(公告)日:2024-05-30
申请号:US18553417
申请日:2022-03-30
申请人: Edwards Limited
发明人: Gary Peter Knight , Erik Wagenaars , Neil Condon , Simone Magni
CPC分类号: H05H1/3425 , H05H1/0037
摘要: Aspects relate to monitorable plasma torch device components and in particular to monitoring and predictive maintenance of one or more such monitorable plasma torch device components. One aspect provides a monitorable plasma torch device component, the component comprising: a component body and a sacrificial component located in an erosion zone of the component body. The sacrificial component comprises material which differs from the plasma torch device component body and which, on exposure to a plasma torch in a plasma torch device, generates electromagnetic radiation distinct from that of the plasma torch device component body. The distinct electromagnetic radiation generated is indicative of erosion of the monitorable plasma torch device component in the erosion zone. Such a monitorable plasma torch device component can facilitate effective component monitoring which allows for ameliorative action to be taken in the event that degradation of the device component is detected.
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公开(公告)号:US20210223755A1
公开(公告)日:2021-07-22
申请号:US17055391
申请日:2019-05-13
申请人: Edwards Limited
IPC分类号: G05B19/4099 , B33Y50/00
摘要: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.
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公开(公告)号:US20180209420A1
公开(公告)日:2018-07-26
申请号:US15745619
申请日:2016-06-15
申请人: Edwards Limited
CPC分类号: F04C19/005 , F04C19/00 , F04C19/004 , F04C25/00 , F04C29/0085 , F04C29/02 , F04C2280/04
摘要: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.
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公开(公告)号:US20180207581A1
公开(公告)日:2018-07-26
申请号:US15746266
申请日:2016-06-15
申请人: Edwards Limited
发明人: Christopher Mark Bailey , Clive Marcus Lloyd Tunna , Jack Raymond Tattersall , Ingo Stephen Graham , Michael Roger Czerniak , Gary Peter Knight , Darren Mennie , Duncan Michael Price , Derek Martin Baker , Andrew James Seeley
IPC分类号: B01D53/75 , B01D53/68 , B01D53/78 , C23C16/44 , C23C16/24 , H01J37/32 , F04C19/00 , F04C29/00 , F04C23/00 , A62C4/00 , F23G7/06
CPC分类号: B01D53/75 , A62C4/00 , B01D53/68 , B01D53/78 , B01D2252/103 , B01D2257/204 , B01D2257/206 , B01D2258/0216 , C23C16/24 , C23C16/4405 , C23C16/4408 , C23C16/4412 , F04C19/001 , F04C19/005 , F04C23/006 , F04C29/0092 , F23G7/06 , H01J37/32807 , H01J37/32862 , H01J2237/335 , Y02C20/30
摘要: Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.
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公开(公告)号:US10702824B2
公开(公告)日:2020-07-07
申请号:US15745923
申请日:2016-06-15
申请人: Edwards Limited
摘要: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
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