Abstract:
The present disclosure relates to a microphone driving device and a digital microphone including the same. A microphone driving device according to an embodiment of the inventive concept includes a voltage-to-current converter, a current-to-voltage converter, an analog-to-digital converter, a digital amplification unit, and a gain controller. The voltage-to-current converter converts an acoustic signal to an output current signal based on a gain control signal. The current-to-voltage converter converts the output current signal to an amplified voltage signal. The analog-to-digital converter converts the amplified voltage signal to a digital signal. The digital amplification unit amplifies the digital signal to an amplified digital signal based on the gain control signal. The gain controller generates a gain control signal. The microphone driving device and the digital microphone including the same according to the inventive concept may have a wide dynamic range and reduce the influence of noise.
Abstract:
Provided is a pressure sensor including a substrate having a cavity therein, a partition wall disposed in the substrate to surround the cavity, a substrate insulation layer disposed on the top surface of the substrate to cover the cavity, a sensing unit disposed on the substrate insulation layer, and an encapsulation layer disposed on the substrate insulation layer to cover the sensing unit. The cavity may extend from a top surface toward a bottom surface of the substrate, the partition wall may have an inner sidewall exposed by the cavity, and at least a portion of the sensing unit may overlap the cavity when viewed in a plan view.
Abstract:
Provided is a microphone. The microphone includes a substrate including an acoustic chamber, a lower backplate disposed on the substrate, a diaphragm spaced apart from the lower backplate on the lower backplate, the diaphragm having a diaphragm hole passing therethrough, a connection unit disposed on the lower backplate to extend through the diaphragm hole, and an upper backplate disposed on the connection unit, the upper backplate being spaced apart from the diaphragm. Thus, the microphone may be improved in sensitivity and reliability.
Abstract:
Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.