公开(公告)号：US20160020062A1

公开(公告)日：2016-01-21

申请号：US14334293

申请日：2014-07-17

Applicant: FEI Company

Inventor： N. William Parker ,  Marcus Straw ,  Jorge Filevich

IPC: H01J37/12 ,  H01J37/26

CPC classification number: H01J37/12 ,  H01J37/244 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/12 ,  H01J2237/24415 ,  H01J2237/2445 ,  H01J2237/2602

Abstract: A transmissive lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include elements that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis.

Abstract translation: 提供了用于检测X射线和光的带电粒子束列中的透射透镜。 最终的透镜可以包括对于用于EDS成像和分析的X射线透射的元件或对于用于阴极发光（CL）成像和分析的光透射的元件。 最终的透镜可被构造和布置为包括用于X射线和光的透射的元件以用于组合的EDS和CL成像和分析。