公开(公告)号：US4922115A

公开(公告)日：1990-05-01

申请号：US213931

申请日：1988-06-30

申请人： Yasushi Mawatari ,  Toru Ikegami ,  Motoyuki Sato ,  Bertram Burgkhardt ,  Ernst Piesch ,  Hans-Gerd Rober

发明人： Yasushi Mawatari ,  Toru Ikegami ,  Motoyuki Sato ,  Bertram Burgkhardt ,  Ernst Piesch ,  Hans-Gerd Rober

IPC分类号： G01T1/06 ,  G01T1/10

CPC分类号： G01T1/06 ,  G01T1/10

摘要： A fluorescent glass dosimeter comprises a glass element holder including inner and outer envelopes. Each of the inner and outer envelopes has a mask frame used for covering the peripheral portions of the corresponding fluorescent detection surface of a fluorescent glass element. The fluorescent glass dosimeter further comprises upper and lower cases. The upper case serves as a pivotable lock member and includes a lock portion, the locking condition of which can be released by means of a magnet. The lower case is adapted to receive the glass element holder. The upper and lower cases are engageable with each other at their slide portions. The glass element holder includes an integral index plate havig an identification hole code at a predetermined location. A direction regulating member is provided for the lower case, and a portion engageable with the direction regulating member is provided for the glass element holder. The fluorescent glass holder is positioned as a result of the engagement between the direction regulating member and the engageable portion of the glass element holder. A filter, used for adjusting energy dependency upon a radiation exposure, is located on the inner side of the upper wall of each of the upper and lower cases. A filter, used for adjusting direction dependency upon an incident radiation, is located on the inner side of the side wall of the lower case.

摘要翻译： 荧光玻璃剂量计包括玻璃元件保持器，其包括内包封和外封套。 内包封和外包封中的每一个具有用于覆盖荧光玻璃元件的相应荧光检测表面的周边部分的掩模框架。 荧光玻璃剂量计还包括上壳体和下壳体。 上壳体用作可枢转的锁定构件，并且包括锁定部分，其锁定状态可以通过磁体释放。 下壳体适于容纳玻璃元件支架。 上壳体和下壳体在其滑动部分处可彼此接合。 玻璃元件保持器包括在预定位置处的识别孔代码的整体折射板。 一个方向调节件被设置用于下壳体，并且与该方向调节件接合的部分设置用于玻璃元件保持器。 荧光玻璃保持器由于方向调节构件和玻璃元件保持器的可接合部分之间的接合而定位。 用于调节对辐射照射的能量依赖性的过滤器位于每个上壳体和下壳体的上壁的内侧。 用于调整入射辐射的方向依赖性的滤光器位于下壳体的侧壁的内侧。

公开(公告)号：US4880986A

公开(公告)日：1989-11-14

申请号：US250245

申请日：1988-09-28

申请人： Junji Yamada ,  Yasushi Mawatari ,  Toru Ikegami ,  Koichi Nishio ,  Motoyuki Sato ,  Bertram Burgkhardt ,  Ernst Piesch ,  Siegfried Ugi

发明人： Junji Yamada ,  Yasushi Mawatari ,  Toru Ikegami ,  Koichi Nishio ,  Motoyuki Sato ,  Bertram Burgkhardt ,  Ernst Piesch ,  Siegfried Ugi

IPC分类号： G01T1/06 ,  G01T1/10 ,  G01T1/115 ,  G01T7/08

CPC分类号： G01T1/06 ,  G01T1/10 ,  G01T7/08

摘要： A radiation dose measuring system using fluorescent dosemeters comprises fluorescent dosemeters including fluorescent glass elements having a fluorescent detection surface, a magazine capable of holding a predetermined number of fluorescent dosemeters, a magazine conveying device for conveying a magazine of a plurality of magazines fed one by one such that is predetermined segment is located to a take-out position, a fluorescent dosemeter take-out device for taking the fluorescent dosemeter from the magazine located in a predetermined position, a fluorescent glass element setting device for moving the fluorescent glass element to a predetermined measuring position and a dose measuring device for subjecting the fluorescent glass element which is set to a measuring position to an ultraviolet ray and for measuring an intensity of fluorescent light which is emitted from an excited glass element.

摘要翻译： 使用荧光剂量计的放射剂量测量系统包括荧光剂量计，包括具有荧光检测表面的荧光玻璃元件，能够保持预定数量的荧光剂量计的储器;用于输送一个接一个地供给的多个杂志的杂志的杂志传送装置 使得预定片段位于取出位置，用于从位于预定位置的盒中取出荧光剂量计的荧光剂量计取出装置，用于将荧光玻璃元件移动到预定位置的荧光玻璃元件调节装置 测量位置和剂量测量装置，用于对设置在测量位置的荧光玻璃元件进行紫外线测量并测量从激发的玻璃元件发射的荧光强度。

公开(公告)号：US09297649B2

公开(公告)日：2016-03-29

申请号：US14001433

申请日：2011-12-12

申请人： Hiroki Kawada ,  Norio Hasegawa ,  Toru Ikegami

发明人： Hiroki Kawada ,  Norio Hasegawa ,  Toru Ikegami

IPC分类号： G01B15/06 ,  G01N23/225 ,  H01J37/28 ,  H01J37/22 ,  G01N23/00 ,  H01J37/244

CPC分类号： G01B15/06 ,  G01N23/00 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2816 ,  H01J2237/2817

摘要： The present invention aims to provide a pattern dimension measurement method for accurately measuring an amount of shrinkage of a pattern that shrinks and an original dimension value before the shrinkage and a charged particle beam apparatus.In order to attain the above-mentioned object, there are proposed a pattern dimension measurement method and a charged particle beam apparatus that are characterized by: forming a thin film on a sample including the pattern after carrying out beam scanning onto a first portion of the pattern; acquiring a first measurement value by scanning a beam onto a region corresponding to the first portion on which the thin film is formed; acquiring a second measurement value by scanning a beam onto a second portion that has identical dimensions as those of the first portion on design data; and finding the amount of shrinkage of the pattern based on subtraction processing of subtracting the first measurement value from the second measurement value.

摘要翻译： 本发明的目的在于提供一种图形尺寸测量方法，用于精确测量收缩的图案的收缩量和收缩前的原始尺寸值以及带电粒子束装置。 为了实现上述目的，提出了一种图案尺寸测量方法和带电粒子束装置，其特征在于：在对包含图案的样品进行束扫描之后，在包含该图案的样品上形成薄膜至第一部分 模式; 通过将光束扫描到与其上形成有薄膜的第一部分对应的区域来获取第一测量值; 通过将光束扫描到与设计数据上的第一部分具有相同尺寸的第二部分上来获取第二测量值; 并且基于从第二测量值减去第一测量值的减法处理来找出图案的收缩量。

公开(公告)号：US20140048706A1

公开(公告)日：2014-02-20

申请号：US14001433

申请日：2011-12-12

申请人： Hiroki Kawada ,  Norio Hasegawa ,  Toru Ikegami

发明人： Hiroki Kawada ,  Norio Hasegawa ,  Toru Ikegami

IPC分类号： G01N23/00

CPC分类号： G01B15/06 ,  G01N23/00 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24578 ,  H01J2237/2816 ,  H01J2237/2817

摘要： The present invention aims to provide a pattern dimension measurement method for accurately measuring an amount of shrinkage of a pattern that shrinks and an original dimension value before the shrinkage and a charged particle beam apparatus.In order to attain the above-mentioned object, there are proposed a pattern dimension measurement method and a charged particle beam apparatus that are characterized by: forming a thin film on a sample including the pattern after carrying out beam scanning onto a first portion of the pattern; acquiring a first measurement value by scanning a beam onto a region corresponding to the first portion on which the thin film is formed; acquiring a second measurement value by scanning a beam onto a second portion that has identical dimensions as those of the first portion on design data; and finding the amount of shrinkage of the pattern based on subtraction processing of subtracting the first measurement value from the second measurement value.

摘要翻译： 本发明的目的在于提供一种图形尺寸测量方法，用于精确测量收缩的图案的收缩量和收缩前的原始尺寸值以及带电粒子束装置。 为了实现上述目的，提出了一种图案尺寸测量方法和带电粒子束装置，其特征在于：在对包含图案的样品进行束扫描之后，在包含该图案的样品上形成薄膜至第一部分 模式; 通过将光束扫描到与其上形成有薄膜的第一部分对应的区域来获取第一测量值; 通过将光束扫描到与设计数据上的第一部分具有相同尺寸的第二部分上来获取第二测量值; 并且基于从第二测量值减去第一测量值的减法处理来找出图案的收缩量。

公开(公告)号：US5057693A

公开(公告)日：1991-10-15

申请号：US583023

申请日：1990-09-17

申请人： Bertram Burgkhardt ,  Ernst Piesch ,  Michael Vilgis ,  Toru Ikegami ,  Motoyuki Sato

发明人： Bertram Burgkhardt ,  Ernst Piesch ,  Michael Vilgis ,  Toru Ikegami ,  Motoyuki Sato

IPC分类号： G01T1/06

CPC分类号： G01T1/06

摘要： In a radiation dose reading apparatus for a fluorescent glass element which was exposed to ionizing radiation and which is subjected to ultraviolet light radiation so as to cause fluorescence with an intensity depending on the radiation dose received by the glass element wherein the radiation dose is determined from the intensity of the fluorescence emitted from the glass elements detecting face, a fluorescence diaphragm arrangement is provided so as to overlay the glass element detecting face and is movable thereon for changing the fluorescence detecting areas and a fluorescence intensity reading device is provided for determining fluorescence intensity distribution and the glass element detecting face.

摘要翻译： 在用于荧光玻璃元件的放射线剂量读取装置中，其暴露于电离辐射并经受紫外光辐射，以便产生具有取决于由玻璃元件接收的辐射剂量的强度的荧光，其中辐射剂量由 提供从玻璃元件检测面发出的荧光的强度，荧光光阑装置，以覆盖玻璃元件检测面，并且可移动到其上以改变荧光检测区域，并且提供荧光强度读取装置以确定荧光强度 分布和玻璃元件检测面。