公开(公告)号：US20020159170A1

公开(公告)日：2002-10-31

申请号：US09950710

申请日：2001-09-13

Applicant: Fujitsu Limited

Inventor： Osamu Tsuboi ,  Satoshi Ueda ,  Yoshihiro Mizuno ,  Ippei Sawaki ,  Fumio Yamagishi

IPC: G02B005/08

CPC classification number: B81C1/00142 ,  B81B3/0078 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/00396 ,  G02B26/0841 ,  Y10S359/904

Abstract: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.

Abstract translation: 提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。 该方法包括以下步骤。 首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。 然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。 然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。 然后，选择性地去除第二掩模图案。 然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。 最后，删除第一个掩模图案。

公开(公告)号：US20010033422A1

公开(公告)日：2001-10-25

申请号：US09771907

申请日：2001-01-29

Applicant: FUJITSU LIMITED

Inventor： Michio Miura ,  Ippei Sawaki

IPC: G02B027/10

CPC classification number: G02B3/005 ,  G02B3/0068

Abstract: An optical device includes a plurality of lens plates spaced at specific intervals. At least one of the lens plates is provided with a lens array on at least one of its front and rear faces. The lens array is composed of a plurality of closely arranged lenses of a specific configuration. The lens array has at least one groove having a V-shaped cross-sectional configuration at a joint of adjacent lenses in at least one part of the lens array.

Abstract translation: 光学装置包括以特定间隔隔开的多个透镜板。 至少一个透镜板在其前表面和后表面中的至少一个上设置有透镜阵列。 透镜阵列由具有特定构造的多个紧密排列的透镜组成。 透镜阵列具有在透镜阵列的至少一部分中相邻透镜的接头处具有V形横截面构造的至少一个凹槽。