摘要:
Disclosed is an oscillation device comprising: a first movable plate adapted to be oscillated about a first rotation axis; a first elastic supporting portion for oscillatively supporting the first movable plate; a supporting substrate for fixing the first elastic supporting portion; a first magnetic field generating portion arranged in a position remote from the first movable plate; a second movable plate adapted to be oscillated about a second rotation axis; and a second elastic supporting portion fixed to the first movable plate for oscillatively supporting the second movable plate, in which a first coil is provided in the first movable plate to be turned round the second movable plate, and in which a second magnetic field generating portion is provided in the second movable plate. The oscillation device is capable of: operating at a high speed with large displacement; enhancing an energy efficiency; and oscillating about two axes.
摘要:
Disclosed is an optical scanning system and an image forming apparatus, being small in size but able to produce high-quality image outputs, wherein the optical scanning system includes a deflecting device for scanningly deflect a light beam from a light source in a main scan direction, and an imaging optical system for imaging, upon a surface to be scanned, the light beam deflected by a deflecting surface of the deflecting device, wherein the deflecting surface is reciprocatingly moved to reciprocatingly scan the surface in the main scan direction with the light beam deflected by the deflecting surface, wherein a first direction refers to a direction of a phase difference of wavefront aberration in the main scan direction between a marginal ray and a principal ray of the light beam reflected by the deflecting surface at an effective deflection angle of the same corresponding to a largest scan position in an effective scan region, the phase difference being produced as a result of reflection of the light beam by the deflecting surface, while a second direction refers to a direction of the phase difference of wavefront aberration in the main scan direction between a marginal ray and a principal ray of the light beam reflected by the deflecting surface at an effective deflection angle thereof, the phase difference being produced as a result of transmission of the light beam through said imaging optical system, and wherein at least one optical system inside the imaging optical system is provided with at least one optical surface of non-arculate shape in a main scan section, so as to assure that the first and second directions are made opposite to each other.
摘要:
An optical scanning system includes a deflecting device to scanningly deflect a light beam from a light source in a main scan direction, and an imaging optical system for imaging, upon a surface to be scanned, the light beam deflected by a deflecting surface of the deflecting device. First and second differences in wavefront aberration are respectively produced as a result of reflection by the deflecting surface and as a result of transmission through the imaging optical system. At least one optical surface inside the imaging optical system is non-arcuate in a main scan section, so as to assure that the first and second phase differences are made opposite to each other.
摘要:
There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.
摘要:
There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.
摘要:
There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.
摘要:
There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.
摘要:
There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.
摘要:
There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.
摘要:
An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are smaller than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.