Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device
    11.
    发明授权
    Oscillation device, optical deflector using the oscillation device, and image display device and image forming apparatus using the optical deflector, and method of manufacturing the oscillation device 失效
    振荡装置,使用振荡装置的光偏转器,以及使用该光偏转器的图像显示装置和图像形成装置,以及制造振荡装置的方法

    公开(公告)号:US06924915B2

    公开(公告)日:2005-08-02

    申请号:US10640046

    申请日:2003-08-14

    IPC分类号: B81B3/00 G02B26/08

    CPC分类号: B81B3/0018 G02B26/085

    摘要: Disclosed is an oscillation device comprising: a first movable plate adapted to be oscillated about a first rotation axis; a first elastic supporting portion for oscillatively supporting the first movable plate; a supporting substrate for fixing the first elastic supporting portion; a first magnetic field generating portion arranged in a position remote from the first movable plate; a second movable plate adapted to be oscillated about a second rotation axis; and a second elastic supporting portion fixed to the first movable plate for oscillatively supporting the second movable plate, in which a first coil is provided in the first movable plate to be turned round the second movable plate, and in which a second magnetic field generating portion is provided in the second movable plate. The oscillation device is capable of: operating at a high speed with large displacement; enhancing an energy efficiency; and oscillating about two axes.

    摘要翻译: 公开了一种振荡装置,包括:适于围绕第一旋转轴线摆动的第一可动板; 用于摆动地支撑所述第一可动板的第一弹性支撑部分; 用于固定所述第一弹性支撑部的支撑基板; 布置在远离所述第一可动板的位置的第一磁场产生部分; 适于围绕第二旋转轴线摆动的第二活动板; 以及第二弹性支撑部,其固定到所述第一可动板,用于振荡地支撑所述第二可动板,其中,所述第一可动板中设置有第一线圈,以绕所述第二可移动板转动,并且其中第二磁场产生部分 设置在第二可移动板中。 振荡装置能够:大排量高速运转; 提高能源效率; 并围绕两个轴摆动。

    Optical scanning system and image forming apparatus using the same
    12.
    发明申请
    Optical scanning system and image forming apparatus using the same 有权
    光学扫描系统和使用其的成像装置

    公开(公告)号:US20070041070A1

    公开(公告)日:2007-02-22

    申请号:US11503069

    申请日:2006-08-14

    IPC分类号: G02B26/08

    摘要: Disclosed is an optical scanning system and an image forming apparatus, being small in size but able to produce high-quality image outputs, wherein the optical scanning system includes a deflecting device for scanningly deflect a light beam from a light source in a main scan direction, and an imaging optical system for imaging, upon a surface to be scanned, the light beam deflected by a deflecting surface of the deflecting device, wherein the deflecting surface is reciprocatingly moved to reciprocatingly scan the surface in the main scan direction with the light beam deflected by the deflecting surface, wherein a first direction refers to a direction of a phase difference of wavefront aberration in the main scan direction between a marginal ray and a principal ray of the light beam reflected by the deflecting surface at an effective deflection angle of the same corresponding to a largest scan position in an effective scan region, the phase difference being produced as a result of reflection of the light beam by the deflecting surface, while a second direction refers to a direction of the phase difference of wavefront aberration in the main scan direction between a marginal ray and a principal ray of the light beam reflected by the deflecting surface at an effective deflection angle thereof, the phase difference being produced as a result of transmission of the light beam through said imaging optical system, and wherein at least one optical system inside the imaging optical system is provided with at least one optical surface of non-arculate shape in a main scan section, so as to assure that the first and second directions are made opposite to each other.

    摘要翻译: 公开了一种光学扫描系统和图像形成装置,其尺寸小,但能够产生高质量的图像输出,其中光学扫描系统包括用于沿主扫描方向扫描地偏转来自光源的光束的偏转装置 以及成像光学系统,用于在待扫描的表面上对由偏转装置的偏转表面偏转的光束进行成像,其中偏转表面被往复移动,以使光束在主扫描方向上往复扫描表面 由偏转表面偏转,其中第一方向是指在主扫描方向上的波前像差的相位差的方向之间的边缘射线和由偏转表面反射的光束的主光线之间的有效偏转角的方向 与有效扫描区域中的最大扫描位置对应的相同,作为反射的结果产生相位差 而第二方向指的是在有效的偏转表面反射的光束的边缘光线和主光线之间的主扫描方向上的波前像差的相位差的方向 其偏转角由于通过所述成像光学系统的光束的透射而产生相位差,并且其中在成像光学系统内部的至少一个光学系统设置有至少一个非弧形形状的光学表面, 主扫描部分,以确保第一和第二方向彼此相反。

    Optical scanning system and image forming apparatus using the same
    13.
    发明授权
    Optical scanning system and image forming apparatus using the same 有权
    光学扫描系统和使用其的成像装置

    公开(公告)号:US07385746B2

    公开(公告)日:2008-06-10

    申请号:US11503069

    申请日:2006-08-14

    IPC分类号: G02B26/08 B41J15/14

    摘要: An optical scanning system includes a deflecting device to scanningly deflect a light beam from a light source in a main scan direction, and an imaging optical system for imaging, upon a surface to be scanned, the light beam deflected by a deflecting surface of the deflecting device. First and second differences in wavefront aberration are respectively produced as a result of reflection by the deflecting surface and as a result of transmission through the imaging optical system. At least one optical surface inside the imaging optical system is non-arcuate in a main scan section, so as to assure that the first and second phase differences are made opposite to each other.

    摘要翻译: 光学扫描系统包括用于沿主扫描方向扫描地偏转来自光源的光束的偏转装置,以及用于在被扫描的表面上成像由偏转的偏转表面偏转的光束的成像光学系统 设备。 波面像差的第一和第二差异分别由偏转表面的反射和通过成像光学系统传输的结果产生。 成像光学系统内的至少一个光学表面在主扫描部分中不是弧形的,以便确保第一和第二相位差彼此相反。

    Optical deflector and method of producing same
    14.
    发明授权
    Optical deflector and method of producing same 失效
    光偏转器及其制作方法

    公开(公告)号:US07038834B2

    公开(公告)日:2006-05-02

    申请号:US11101515

    申请日:2005-04-08

    IPC分类号: G02B26/08

    摘要: There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

    摘要翻译: 提供了能够以低电压高速驱动的小型光学偏转器,提供大的偏转角度,即使在高速运转中也具有低的变形,并且具有反射表面的高静态平坦度, 制造光学偏转器。 光学偏转器相对于支撑基板驱动可移动板以使入射在反射表面上的光偏转,并且具有在其上未形成反射表面的可动板的表面中形成至少两个凹部的构造,以及 在凹部中设置磁性材料。

    Light deflector, method of manufacturing light deflector and torsion oscillating member
    17.
    发明申请
    Light deflector, method of manufacturing light deflector and torsion oscillating member 失效
    光偏转器,制造导光板和扭转摆动构件的方法

    公开(公告)号:US20050185240A1

    公开(公告)日:2005-08-25

    申请号:US11117357

    申请日:2005-04-29

    摘要: There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.

    摘要翻译: 公开了一种光偏转器,其中可动板的两端通过弹性支撑部支撑在支撑基板上,反射面形成在可动板的一个表面上,并且可动板围绕扭转扭转振荡 弹性支撑部分的轴线作为中心以偏转入射到反射表面的入射光,其中在作为未形成反射面的表面的两侧的至少一个侧表面上形成有凹部,以及 弹性支撑部的扭转轴插入其间。

    Optical deflector and method of producing same
    18.
    发明申请
    Optical deflector and method of producing same 失效
    光偏转器及其制作方法

    公开(公告)号:US20050179985A1

    公开(公告)日:2005-08-18

    申请号:US11101515

    申请日:2005-04-08

    摘要: There are provided a small optical deflector that can be driven at a high speed with a low voltage, provides a large angle of deflection, has a low distortion even in high speed operation and has a high static flatness of a reflective surface, and a method of producing the optical deflector. The optical deflector drives a movable plate relative to a supporting substrate to deflect a light incident on a reflective surface and has a configuration in which at least two recesses are formed in a surface of the movable plate on which the reflective surface is not formed, and a magnetic material is provided in the recesses.

    摘要翻译: 提供了能够以低电压高速驱动的小型光学偏转器,提供大的偏转角度,即使在高速运转中也具有低的变形,并且具有反射表面的高静态平坦度, 制造光学偏转器。 光学偏转器相对于支撑基板驱动可移动板以使入射在反射表面上的光偏转,并且具有在其上未形成反射表面的可动板的表面中形成至少两个凹部的构造,以及 在凹部中设置磁性材料。

    Light deflector, method of manufacturing light deflector and torsion oscillating member
    19.
    发明授权
    Light deflector, method of manufacturing light deflector and torsion oscillating member 失效
    光偏转器,制造导光板和扭转摆动构件的方法

    公开(公告)号:US07057783B2

    公开(公告)日:2006-06-06

    申请号:US11117357

    申请日:2005-04-29

    IPC分类号: G02B26/08

    摘要: There is disclosed a light deflector in which both ends of a movable plate is supported to a support substrate by an elastic support portion, a reflection surface is formed on one surface of the movable plate, and the movable plate is torsion-oscillated about a torsion axis of the elastic support portion as a center to deflect an incident light that enters the reflection surface, wherein a recessed portion is formed on at least one side surface of both sides, which is a surface on which the reflection surface is not formed, and between which the torsion axis of the elastic support portion is interposed.

    摘要翻译: 公开了一种光偏转器,其中可动板的两端通过弹性支撑部支撑在支撑基板上,反射面形成在可动板的一个表面上,并且可动板围绕扭转扭转振荡 弹性支撑部分的轴线作为中心以偏转入射到反射表面的入射光,其中在作为未形成反射面的表面的两侧的至少一个侧表面上形成有凹部,以及 弹性支撑部的扭转轴插入其间。

    Charged particle beam lens and exposure apparatus using the same

    公开(公告)号:US08901511B2

    公开(公告)日:2014-12-02

    申请号:US14004845

    申请日:2012-03-14

    IPC分类号: H01J37/12 H01J37/18

    摘要: An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are smaller than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.