公开(公告)号：US08901511B2

公开(公告)日：2014-12-02

申请号：US14004845

申请日：2012-03-14

申请人： Takahisa Kato ,  Yutaka Setomoto

发明人： Takahisa Kato ,  Yutaka Setomoto

IPC分类号： H01J37/12 ,  H01J37/18

摘要： An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are smaller than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.

公开(公告)号：US20140166894A1

公开(公告)日：2014-06-19

申请号：US14005187

申请日：2012-03-14

申请人： Takahisa Kato ,  Yutaka Setomoto

发明人： Takahisa Kato ,  Yutaka Setomoto

IPC分类号： G21K1/087

CPC分类号： G21K1/087 ,  H01J37/12 ,  H01J2237/04924 ,  H01J2237/1205 ,  H01J2237/1207 ,  H01J2237/31774

摘要： An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. A circularity in a first region that is on the first surface side and a circularity in a second region that is on the second surface side are each better than a circularity in a third region that is a region in the electrode disposed between the first surface and the second surface.

摘要翻译： 静电带电粒子束透镜包括：电极，其包括平板，该平板具有沿光轴方向延伸的法线的第一表面和与该第一表面相对的第二表面，该电极具有从第一表面延伸的通孔 表面到第二表面。 位于第一表面侧的第一区域中的圆形度和位于第二表面侧的第二区域中的圆形度在第三区域中优于圆形度，第三区域是设置在第一表面和第二表面之间的电极中的区域 第二个表面。

公开(公告)号：US20140151571A1

公开(公告)日：2014-06-05

申请号：US14005175

申请日：2012-03-14

申请人： Takahisa Kato ,  Yutaka Setomoto

发明人： Takahisa Kato ,  Yutaka Setomoto

IPC分类号： H01J37/12

CPC分类号： H01J37/12 ,  H01J2237/04924 ,  H01J2237/1205 ,  H01J2237/1207 ,  H01J2237/31774

摘要： In a charged particle beam lens according to the present invention, the orientations of through-holes formed in electrodes and precision of forming the through-holes are determined in accordance with the degree of influences of the surfaces of the electrodes on the aberration of the lens.

摘要翻译： 在根据本发明的带电粒子束透镜中，形成在电极中的通孔的取向和形成通孔的精度根据电极表面对透镜的像差的影响程度来确定 。

公开(公告)号：US20140151570A1

公开(公告)日：2014-06-05

申请号：US14004845

申请日：2012-03-14

申请人： Takahisa Kato ,  Yutaka Setomoto

发明人： Takahisa Kato ,  Yutaka Setomoto

IPC分类号： H01J37/12

CPC分类号： H01J37/12 ,  H01J2237/04924 ,  H01J2237/1205 ,  H01J2237/1207 ,  H01J2237/31774

摘要： An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are smaller than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.

摘要翻译： 静电带电粒子束透镜包括：电极，其包括平板，该平板具有沿光轴方向延伸的法线的第一表面和与该第一表面相对的第二表面，该电极具有从第一表面延伸的通孔 表面到第二表面。 当开口横截面被定义为沿着垂直于法线的平面截取的通孔的横截面，并且代表性直径被定义为通过对开口横截面进行回归分析而获得的圆的直径时，代表 在第一表面侧的第一区域中的开口横截面的直径和位于第二表面侧的第二区域中的开口横截面的代表性直径小于开口横截面的代表性直径 第三区域，其是设置在第一表面和第二表面之间的电极中的区域。

公开(公告)号：US20140197325A1

公开(公告)日：2014-07-17

申请号：US14005078

申请日：2012-03-14

申请人： Takahisa Kato ,  Yutaka Setomoto

发明人： Takahisa Kato ,  Yutaka Setomoto

IPC分类号： H01J37/12 ,  H01J3/18

CPC分类号： H01J37/12 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J37/3177 ,  H01J2237/04924 ,  H01J2237/1205 ,  H01J2237/1207

摘要： An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are each larger than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.

摘要翻译： 静电带电粒子束透镜包括：电极，其包括平板，该平板具有沿光轴方向延伸的法线的第一表面和与该第一表面相对的第二表面，该电极具有从第一表面延伸的通孔 表面到第二表面。 当开口横截面被定义为沿着垂直于法线的平面截取的通孔的横截面，并且代表性直径被定义为通过对开口横截面进行回归分析而获得的圆的直径时，代表 在第一表面侧的第一区域中的开口横截面的直径和位于第二表面侧的第二区域中的开口横截面的代表性直径分别大于开口横截面的代表性直径 第三区域，其是设置在第一表面和第二表面之间的电极中的区域。

公开(公告)号：US20140190006A1

公开(公告)日：2014-07-10

申请号：US14005037

申请日：2012-03-14

申请人： Yutaka Setomoto ,  Takahisa Kato

发明人： Yutaka Setomoto ,  Takahisa Kato

IPC分类号： H05K3/46

CPC分类号： H05K3/4679 ,  H01J37/12 ,  H01J2237/0437 ,  H01J2237/04924 ,  H01J2237/1205 ,  Y10T29/49165

摘要： There is provided a method for manufacturing a charged particle beam lens having a bonded electrode obtained by bonding at least a first conductive substrate having a first through-hole and a second conductive substrate having a second through-hole. The above method includes: forming the first through-hole in the first conductive substrate; forming the second through-hole in the second conductive substrate; and bonding the first conductive substrate and the second conductive substrate so that the first through-hole and the second through-hole communicate with each other.

摘要翻译： 提供了一种制造带电粒子束透镜的方法，该方法具有通过将至少具有第一通孔的第一导电基板和具有第二通孔的第二导电基板结合而获得的接合电极。 上述方法包括：在第一导电衬底中形成第一通孔; 在第二导电衬底中形成第二通孔; 并且将第一导电基板和第二导电基板接合，使得第一通孔和第二通孔彼此连通。

公开(公告)号：US08472096B2

公开(公告)日：2013-06-25

申请号：US12674325

申请日：2008-11-13

申请人： Kazunari Fujii ,  Takahisa Kato ,  Yoshio Hotta ,  Suguru Miyagawa ,  Takahiro Akiyama

发明人： Kazunari Fujii ,  Takahisa Kato ,  Yoshio Hotta ,  Suguru Miyagawa ,  Takahiro Akiyama

IPC分类号： G02B26/08

CPC分类号： G02B26/0833 ,  Y10T29/49826

摘要： A method of manufacturing an oscillator device having first and second oscillators being driven at first and second driving resonance frequencies gf1 and gf2, the method including a first step for processing the two oscillators, wherein, when the two oscillators are going to be processed as oscillators having first and second resonance frequencies different from the two driving resonance frequencies with a certain dispersion range, the two oscillators are so processed that the first and second resonance frequencies different from the two driving resonance frequencies become equal to first and second resonance frequencies f1 and f2, respectively, which are included in adjustable resonance frequency ranges, respectively, and a second step for adjusting the first and second resonance frequencies f1 and f2 so that they become equal to the first and second driving resonance frequencies gf1 and gf2, respectively.

摘要翻译： 一种制造具有第一和第二驱动谐振频率gf1和gf2的第一和第二振荡器的振荡器装置的方法，该方法包括用于处理两个振荡器的第一步骤，其中当两个振荡器将被作为振荡器处理时 具有与具有一定色散范围的两个驱动谐振频率不同的第一和第二谐振频率，两个振荡器被如此处理，使得与两个驱动谐振频率不同的第一和第二谐振频率变得等于第一和第二谐振频率f1和f2 分别包括在可调节的共振频率范围内，第二步骤用于分别调整第一和第二共振频率f1和f2使得它们分别等于第一和第二驱动谐振频率gf1和gf2。

公开(公告)号：US08191994B2

公开(公告)日：2012-06-05

申请号：US13079418

申请日：2011-04-04

申请人： Toru Nakakubo ,  Takahisa Kato ,  Haruhito Ono ,  Suguru Miyagawa

发明人： Toru Nakakubo ,  Takahisa Kato ,  Haruhito Ono ,  Suguru Miyagawa

IPC分类号： B41J2/04

CPC分类号： B41J2/175 ,  B41J2/085 ,  B41J2/09 ,  B41J2/18

摘要： Provided is a continuous-type charge deflection liquid ejection head that is suitable for higher-density and multiple nozzles. This liquid ejection head includes: an orifice plate having a plurality of nozzles arranged in a two-dimensional manner; a charging electrode plate having a charging electrode to charge ink droplets from each of the plurality of nozzles; and first and second deflection electrode plates each having a deflection electrode to deflect each of the ink droplets charged by the charging electrode, in which each of the charging member, the first deflection member, and the second deflection member has through-holes that ink droplets pass through, and the charging member, the first deflection member, and the second deflection member are laminated in this order in an ejecting direction of the ink droplets.

摘要翻译： 提供适用于更高密度和多个喷嘴的连续型电荷偏转液体喷射头。 该液体喷射头包括：具有以二维方式布置的多个喷嘴的孔板; 充电电极板，具有用于对来自所述多个喷嘴中的每一个喷嘴的墨滴充电的充电电极; 以及第一和第二偏转电极板，每个偏转电极板具有偏转电极，以使由充电电极充电的每个墨滴偏转，其中充电部件，第一偏转部件和第二偏转部件中的每一个具有通孔， 并且充电构件，第一偏转构件和第二偏转构件按照墨滴的排出方向依次层叠。

公开(公告)号：US20120024453A1

公开(公告)日：2012-02-02

申请号：US13193395

申请日：2011-07-28

申请人： Takahisa Kato

发明人： Takahisa Kato

IPC分类号： B29C65/42

CPC分类号： B81C3/005 ,  B29C65/42 ,  B81C2203/054 ,  Y10T156/10 ,  Y10T156/17

摘要： A structure includes a holder unit including a peripheral portion and a step portion that is higher than the peripheral portion; and a device unit including a bonding portion, an elastic portion, and a support portion that are formed integrally with each other, the support portion being elastically supported with respect to the bonding portion by the elastic portion. The bonding portion is fixed to the peripheral portion of the holder unit. The support portion is caused to contact the step portion by a restoring force of the elastic portion in an elastically deformed state.

摘要翻译： 结构包括：保持单元，其包括周边部分和高于周边部分的台阶部分; 以及包括彼此一体形成的接合部分，弹性部分和支撑部分的装置单元，所述支撑部分通过弹性部分相对于接合部分弹性地支撑。 接合部分固定到保持器单元的周边部分。 通过弹性部分的弹性变形状态的恢复力使支撑部与台阶部接触。

公开(公告)号：US20110116145A1

公开(公告)日：2011-05-19

申请号：US12674325

申请日：2008-11-13

申请人： Kazunari Fujii ,  Takahisa Kato ,  Yoshio Hotta ,  Suguru Miyagawa ,  Takahiro Akiyama

发明人： Kazunari Fujii ,  Takahisa Kato ,  Yoshio Hotta ,  Suguru Miyagawa ,  Takahiro Akiyama

IPC分类号： G02B26/08 ,  B23P17/04

CPC分类号： G02B26/0833 ,  Y10T29/49826

摘要： A method of manufacturing an oscillator device having first and second oscillators being driven at first and second driving resonance frequencies gf1 and gf2, the method including a first step for processing the two oscillators, wherein, when the two oscillators are going to be processed as oscillators having first and second resonance frequencies different from the two driving resonance frequencies with a certain dispersion range, the two oscillators are so processed that the first and second resonance frequencies different from the two driving resonance frequencies become equal to first and second resonance frequencies f1 and f2, respectively, which are included in adjustable resonance frequency ranges, respectively, and a second step for adjusting the first and second resonance frequencies f1 and f2 so that they become equal to the first and second driving resonance frequencies gf1 and gf2, respectively.

摘要翻译： 一种制造具有第一和第二驱动谐振频率gf1和gf2的第一和第二振荡器的振荡器装置的方法，该方法包括用于处理两个振荡器的第一步骤，其中当两个振荡器将被作为振荡器处理时 具有与具有一定色散范围的两个驱动谐振频率不同的第一和第二谐振频率，两个振荡器被如此处理，使得与两个驱动谐振频率不同的第一和第二谐振频率变得等于第一和第二谐振频率f1和f2 分别包括在可调节的共振频率范围内，第二步骤用于分别调整第一和第二共振频率f1和f2使得它们分别等于第一和第二驱动谐振频率gf1和gf2。