公开(公告)号：US20150332972A1

公开(公告)日：2015-11-19

申请号：US14279480

申请日：2014-05-16

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Xusheng WU ,  Jianwei PENG ,  Min-hwa CHI

IPC: H01L21/8234 ,  H01L21/02

CPC classification number: H01L21/823431 ,  H01L21/02521 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02538 ,  H01L21/823437 ,  H01L21/823475

Abstract: A method of fabricating a raised fin structure including a raised contact structure is provided. The method may include: providing a base fin structure; providing at least one ancillary fin structure, the at least one ancillary fin structure contacting the base fin structure at a side of the base fin structure; growing a material over the base fin structure to form the raised fin structure; and, growing the material over the at least one ancillary fin structure, wherein the at least one ancillary fin structure contacting the base fin structure increases a volume of material grown over the base fin structure near the contact between the base fin structure and the at least one ancillary fin structure to form the raised contact structure.

Abstract translation: 提供了一种制造包括凸起接触结构的凸起鳍结构的方法。 该方法可以包括：提供底鳍结构; 提供至少一个辅助翅片结构，所述至少一个辅助翅片结构在所述基部翅片结构的一侧与所述底部翅片结构接触; 在基板结构上生长材料以形成凸起的翅片结构; 并且在所述至少一个辅助翅片结构上生长所述材料，其中所述至少一个辅助翅片结构接触所述基底翅片结构增加了在所述基底翅片结构与所述至少 一个辅助翅片结构形成凸起的接触结构。