公开(公告)号：US20160249443A1

公开(公告)日：2016-08-25

申请号：US15143066

申请日：2016-04-29

Applicant: Gigaphoton Inc.

Inventor： Yutaka SHIRAISHI ,  Toshiyuki HIRASHITA ,  Shinya IKESAKA

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/005 ,  H05G2/008

Abstract: A target supply device may include: a target generator configured to accommodate a liquid target material and having a nozzle with a nozzle hole from which the liquid target material is outputted; and a filter disposed in the target generator and made of glass, the glass reacting with the liquid target material, so that a solid reaction product is generated. The filter may include a first through-hole configured to allow the liquid target material to pass therethrough, and an inner surface of the first through-hole may be coated with a material which is not easy to react with the liquid target material.

Abstract translation: 目标供给装置可以包括：目标发生器，被配置为容纳液体目标材料，并具有喷嘴，喷嘴孔从所述喷嘴孔输出所述液体目标材料; 以及设置在靶发生器中并由玻璃制成的过滤器，玻璃与液体靶材料反应，从而产生固体反应产物。 过滤器可以包括构造成允许液体目标材料通过的第一通孔，并且第一通孔的内表面可以涂覆有不容易与液体目标材料反应的材料。

公开(公告)号：US20220015218A1

公开(公告)日：2022-01-13

申请号：US17333538

申请日：2021-05-28

Applicant: Gigaphoton Inc.

Inventor： Yutaka SHIRAISHI ,  Toshihiro NISHISAKA ,  Tsukasa HORI

IPC: H05G2/00 ,  G03F7/20

Abstract: A target supply device may include a first containing member configured to contain a target substance; a second containing member configured to contain the target substance flowing from the first containing member; a ring-shaped sealing portion which is formed integrally with one of the first containing member and the second containing member, and is brought into close contact with the other containing member; and a fastening member which fastens the first containing member and the second containing member to each other so that the first containing member communicates with the second containing member through the communication portion, and presses the sealing portion against the other containing member. Here, the sealing portion being plastically deformed by being pressed against the other containing member by the fastening member to seal a gap between the first containing member and the second containing member around the communication portion due to the plastic deformation.

公开(公告)号：US20210410261A1

公开(公告)日：2021-12-30

申请号：US17308182

申请日：2021-05-05

Applicant: Gigaphoton Inc.

Inventor： Yutaka SHIRAISHI ,  Tsukasa HORI

IPC: H05G2/00 ,  G03F7/20

Abstract: A target supply device may include a first container configured to contain a solid target substance; a second container including a first connection port connected to the first container, a second connection port connected to a first pressurized gas supply line, and a third connection port connected to a target substance lead-out path; a moving body including a first recessed portion configured to contain the solid target substance supplied from the first container and move the first recessed portion inside the second container to cause an opening of the first recessed portion to be overlapped sequentially with the first to third connection ports; a third container connected to both a second pressurized gas supply line and the target substance lead-out path and configured to melt the solid target substance supplied from the third connection port; and a nozzle configured to output the melted target substance supplied from the third container.

公开(公告)号：US20190045614A1

公开(公告)日：2019-02-07

申请号：US16155192

申请日：2018-10-09

Applicant: Gigaphoton Inc.

Inventor： Tsukasa HORI ,  Yutaka SHIRAISHI ,  Shinya IKESAKA ,  Takanobu ISHIHARA ,  Toshiro UMEKI

IPC: H05G2/00

Abstract: A target supply device according to a first aspect of the present disclosure is configured to supply a metal target in a plasma generation region and may include a tank configured to house the metal target, a filter having been subjected to a dehydration process, the filter being configured to suppress passage of particles in the metal target housed in the tank, and a nozzle provided with a nozzle hole configured to eject the metal target that has passed through the filter.

公开(公告)号：US20180288863A1

公开(公告)日：2018-10-04

申请号：US16001441

申请日：2018-06-06

Applicant: GIGAPHOTON INC.

Inventor： Takahisa FUJIMAKI ,  Takayuki YABU ,  Yuta TAKASHIMA ,  Fumio IWAMOTO ,  Yutaka SHIRAISHI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  G05D16/2006 ,  G05D23/19 ,  H05G2/00 ,  H05G2/008

Abstract: A target supply device may include a nozzle configured to output a liquid target substance contained in a tank, an excitation element, a droplet detection unit configured to detect a droplet output from the nozzle, a passage time interval measurement unit configured to measure a passage time interval of droplets, and a control unit. The control unit may be configured to set a proper range of the passage time interval, change the duty value of the electric signal to be input to the excitation element, store the passage time interval measurement values of the droplets generated with respect to a plurality of duty values and variation thereof in association with the duty values, and determine an operation duty value based on the variation from among the duty values with which the passage time interval measurement values are within the proper range, among the duty values.

公开(公告)号：US20170053780A1

公开(公告)日：2017-02-23

申请号：US15346431

申请日：2016-11-08

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO ,  Yutaka SHIRAISHI ,  Tsukasa HORI ,  Osamu WAKABAYASHI

IPC: H01J37/32

CPC classification number: H01J37/32449 ,  H05G2/00 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.

Abstract translation: 目标供给装置可以设置有容纳作为目标材料的金属的罐，具有目标材料从罐输出的喷嘴孔的喷嘴，设置在用于将目标材料传导的连通部中的过滤器 所述罐到喷嘴孔，温度调节器，其构造成改变罐中的目标材料的温度;以及控制器，控制温度调节器以改变罐中的目标材料的温度，使得靶材料中的氧沉淀 作为金属氧化物。

公开(公告)号：US20160227637A1

公开(公告)日：2016-08-04

申请号：US14992477

申请日：2014-06-13

Applicant: GIGAPHOTON INC.

Inventor： Tomohide ICHINOSE ,  Fumio IWAMOTO ,  Yutaka SHIRAISHI ,  Tsukasa HORI ,  Hideo HOSHINO

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  B01D25/16 ,  B01D29/46 ,  B01D46/406 ,  G03F7/70191 ,  H05G2/005

Abstract: A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area.

Abstract translation: 过滤器可以包括：具有设置有通道的第一表面的第一构件; 以及第二构件，其具有覆盖所述通道的第二表面。 第一构件可以包括第一可通过部分，其允许流体在通道的第一区域之间在第一表面和限定在与第一表面相对的第一构件的表面旁边的第一空间之间通过。 第二构件可以包括第二可通过部分，其允许流体在第二表面和第二空间之间通过，第二空间限定在与第二表面相对的第二构件的表面旁边，通过与第二空间相距的通道的第二区域 第一区。

公开(公告)号：US20230008733A1

公开(公告)日：2023-01-12

申请号：US17831255

申请日：2022-06-02

Applicant: Gigaphoton Inc.

Inventor： Yutaka SHIRAISHI ,  Hideki SHISHIBA

IPC: H05G2/00 ,  G03F7/20 ,  H01L21/027

Abstract: A target substance replenishment device may include a first container containing a solid target substance, a first path through which the solid target substance supplied from the first container passes, a first supply switching device switching between a first state where supply of the solid target substance from the first container to the first path is suppressed and a second state where the supply of the solid target substance from the first container to the first path is allowed, a first valve connected to the first path, a second path which is connected to the first valve and through which the solid target substance having passed through the first valve passes, a first detector outputting a first detection signal indicating that the second path is clogged with the solid target substance, and a processor controlling the first supply switching device to the first state based on the first detection signal.

公开(公告)号：US20190237303A1

公开(公告)日：2019-08-01

申请号：US16379539

申请日：2019-04-09

Applicant: Gigaphoton Inc.

Inventor： Fumio IWAMOTO ,  Yutaka SHIRAISHI ,  Tsukasa HORI ,  Osamu WAKABAYASHI

IPC: H01J37/32 ,  H05G2/00

CPC classification number: H01J37/32449 ,  H05G2/00 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A target supply device may be provided with a tank configured to contain a metal as a target material, a nozzle having a nozzle hole through which the target material is output from the tank, a filter disposed in a communication portion for conducting the target material from the tank to the nozzle hole, a temperature adjuster configured to change the temperature of the target material in the tank, and a controller controlling the temperature adjuster to change the temperature of the target material in the tank such that oxygen in the target material is precipitated as metal oxide.

公开(公告)号：US20180341180A1

公开(公告)日：2018-11-29

申请号：US16052466

申请日：2018-08-01

Applicant: Gigaphoton Inc.

Inventor： Yutaka SHIRAISHI ,  Hideki SHISHIBA

IPC: G03F7/20 ,  H05G2/00 ,  H01L21/027

Abstract: A target supply device may include a tank for storing a target material, a nozzle which is connected to the tank and outputs the target material, and a gas supply section for supplying the tank with gas. The gas supply section may include a booster which is connected to a gas line, boosts the gas supplied from the gas line, and outputs the boosted gas to the tank, a pressure sensor for measuring the pressure inside the tank, and a pressure controller which adjusts the pressure of the gas to be supplied to the tank on the basis of a measurement result from the pressure sensor.