公开(公告)号：US20120292162A1

公开(公告)日：2012-11-22

申请号：US13475341

申请日：2012-05-18

申请人： Huisu Jeong ,  Gun-Young Jung

发明人： Huisu Jeong ,  Gun-Young Jung

IPC分类号： H01R4/58 ,  H01H57/00 ,  B05D5/12 ,  H05K13/00 ,  B82Y15/00 ,  B82Y40/00

CPC分类号： G06F3/045 ,  B82Y10/00 ,  G06F2203/04103

摘要： Provided are an electronic device, a method of manufacturing the same, and a touch panel including the device. The electronic device includes a nanostructure having a plurality of metal oxide nanorods vertically aligned at predetermined intervals in intersection regions between bottom electrodes and top electrodes that perpendicularly cross each other. The nanorods are formed to the same diameter and the same height so that the electronic device can exhibit uniform performance. Also, a method of manufacturing an electronic device includes selectively vertically growing the same number of metal oxide nanostructures with a uniform size only on the bottom electrodes using a nano-template with a plurality of vertical holes. Furthermore, a touch panel includes a nanostructure having a plurality of piezoelectric nanorods disposed in a plurality of touch cells arranged in a matrix.

摘要翻译： 提供了一种电子设备，其制造方法和包括该设备的触摸面板。 电子器件包括具有多个金属氧化物纳米棒的纳米结构，该金属氧化物纳米棒在底部电极和彼此垂直交叉的顶部电极之间的交叉区域中以预定间隔垂直对准。 纳米棒形成为相同的直径和相同的高度，使得电子器件可以表现出均匀的性能。 此外，制造电子器件的方法包括使用具有多个垂直孔的纳米模板，在底部电极上选择性地垂直生长具有均匀尺寸的相同数量的金属氧化物纳米结构。 此外，触摸面板包括具有布置在矩阵中的多个触摸单元中的多个压电纳米棒的纳米结构。

公开(公告)号：US07080596B2

公开(公告)日：2006-07-25

申请号：US10794928

申请日：2004-03-05

申请人： Heon Lee ,  Gun-Young Jung

发明人： Heon Lee ,  Gun-Young Jung

IPC分类号： B82B1/00 ,  B29C33/38

CPC分类号： B81C99/009 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H05K3/12 ,  Y10S977/887 ,  Y10T428/24479

摘要： A micro-casted silicon carbide nano-imprinting stamp and method of making a micro-casted silicon carbide nano-imprinting stamp are disclosed. A micro-casting technique is used to form a foundation layer and a plurality of nano-sized features connected with the foundation layer. The foundation layer and the nano-sized features are unitary whole that is made entirely from a material comprising silicon carbide (SiC) which is harder than silicon (Si) alone. As a result, the micro-casted silicon carbide nano-imprinting stamp has a longer service lifetime because it can endure several imprinting cycles without wearing out or breaking. The longer service lifetime makes the micro-casted silicon carbide nano-imprinting stamp economically feasible to manufacture as the manufacturing cost can be recouped over the service lifetime.

摘要翻译： 公开了一种微铸造碳化硅纳米压印印模和制造微铸造碳化硅纳米压印印模的方法。 使用微铸造技术形成与基础层连接的基础层和多个纳米尺寸特征。 基础层和纳米尺寸特征是整体整体，其完全由包含比单独的硅（Si）更硬的碳化硅（SiC）的材料制成。 结果，微铸造碳化硅纳米压印印模具有更长的使用寿命，因为它可以承受几个压印周期而不会磨损或断裂。 更长的使用寿命使得微型碳化硅纳米压印印模经济上可行，因为制造成本可以在使用寿命内回收。

公开(公告)号：US20060012079A1

公开(公告)日：2006-01-19

申请号：US10893082

申请日：2004-07-16

申请人： Gun-Young Jung ,  Yong Chen ,  R. Williams ,  Sivapackia Ganapathiappan

发明人： Gun-Young Jung ,  Yong Chen ,  R. Williams ,  Sivapackia Ganapathiappan

IPC分类号： B28B7/36 ,  B29C33/58

CPC分类号： G03F7/0002 ,  B29C33/58 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00

摘要： A method is provided for coating a surface having features thereon with a self-assembled monolayer for aiding release of the surface during an imprinting procedure. The method comprises exposing the surface to a vapor of a mold release agent.

摘要翻译： 提供了一种用于在其上具有特征的表面用自组装单层涂覆以便在印刷过程期间帮助释放表面的方法。 该方法包括将表面暴露于脱模剂的蒸气。

公开(公告)号：US06916511B2

公开(公告)日：2005-07-12

申请号：US10279407

申请日：2002-10-24

申请人： Heon Lee ,  Gun-Young Jung

发明人： Heon Lee ,  Gun-Young Jung

IPC分类号： B82B3/00 ,  B81C1/00 ,  G03F7/00 ,  H01L21/027 ,  H05H1/24

CPC分类号： B82Y10/00 ,  B81C99/009 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10T428/24355

摘要： A method of forming a hardened nano-imprinting stamp is disclosed. The hardened nano-imprinting stamp includes a plurality of silicon-based nano-sized features that have an hardened shell of silicon carbide, silicon nitride, or silicon carbide nitride. The hardened shell is made harder than the underlying silicon by a plasma carburization and/or a plasma nitridation process. During the plasma process atoms of carbon and/or nitrogen bombard and penetrate a plurality of exposed surfaces of the nano-sized features and chemically react with the silicon to form the hardened shell of silicon carbide, silicon nitride, or silicon carbide nitride.

摘要翻译： 公开了形成硬化的纳米压印印模的方法。 硬化的纳米压印印模包括多个硅基纳米尺寸特征，其具有碳化硅，氮化硅或碳化硅氮化物的硬化壳。 通过等离子体渗碳和/或等离子体氮化处理使硬化的壳比下面的硅更硬。 在等离子体工艺期间，碳和/或氮原子轰击并穿透纳米尺寸特征的多个暴露表面并与硅发生化学反应以形成碳化硅，氮化硅或碳化硅氮化物的硬化壳。

公开(公告)号：US06755984B2

公开(公告)日：2004-06-29

申请号：US10279643

申请日：2002-10-24

申请人： Heon Lee ,  Gun-Young Jung

发明人： Heon Lee ,  Gun-Young Jung

IPC分类号： B44C122

CPC分类号： B81C99/009 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H05K3/12 ,  Y10S977/887 ,  Y10T428/24479

摘要： A micro-casted silicon carbide nano-imprinting stamp and method of making a micro-casted silicon carbide nano-imprinting stamp are disclosed. A micro-casting technique is used to form a foundation layer and a plurality of nano-sized features connected with the foundation layer. The foundation layer and the nano-sized features are unitary whole that is made entirely from a material comprising silicon carbide (SiC) which is harder than silicon (Si) alone. As a result, the micro-casted silicon carbide nano-imprinting stamp has a longer service lifetime because it can endure several imprinting cycles without wearing out or breaking. The longer service lifetime makes the micro-casted silicon carbide nano-imprinting stamp economically feasible to manufacture as the manufacturing cost can be recouped over the service lifetime.

摘要翻译： 公开了一种微铸造碳化硅纳米压印印模和制造微铸造碳化硅纳米压印印模的方法。 使用微铸造技术形成与基础层连接的基础层和多个纳米尺寸特征。 基础层和纳米尺寸特征是整体整体，其完全由包含比单独的硅（Si）更硬的碳化硅（SiC）的材料制成。 结果，微铸造碳化硅纳米压印印模具有更长的使用寿命，因为它可以承受几个压印周期而不会磨损或断裂。 更长的使用寿命使得微型碳化硅纳米压印印模经济上可行，因为制造成本可以在使用寿命内回收。