Method of depositing particles with an electrostatic chuck

    公开(公告)号:US06670038B2

    公开(公告)日:2003-12-30

    申请号:US10174301

    申请日:2002-06-17

    IPC分类号: B32B516

    摘要: The present invention is directed to electrostatic chucks, methods for their use, the electrostatic deposition of objects, such as particles in a dry powder, onto recipient substrates, and the recipient substrates themselves that have been subjected to electrostatic deposition. In one aspect, the present invention provides an electrostatic chuck for electrostatically attracting an object or objects wherein the object is used in chemical or pharmaceutical assaying or manufacturing. The objects can be pharmaceutical substrates, for example, such as a pharmaceutical tablet. Additional embodiments of the invention provide chucks and their use to electrostatically attract particles, such as a pharmaceutically active ingredient, to a substrate, such as a tablet. In one aspect, the electrostatic chuck comprises a floating electrode, and is used to selectively attract particles to a substrate above the floating electrode, thereby providing for charge imaging for the deposition of particles in a selected image. Additionally, the invention provides comprising a sensing electrode, optionally for use with an electrostatic chuck, for sensing the number of particles attracted to the objects on the chuck or other substrate, thereby providing for deposition of an accurate amount of particles. Furthermore, the present invention provides objects having selected areas in which particles are applied to the object via electrostatic means.

    Method of depositing particles with an electrostatic chuck
    13.
    发明授权
    Method of depositing particles with an electrostatic chuck 失效
    用静电卡盘沉积颗粒的方法

    公开(公告)号:US06440486B2

    公开(公告)日:2002-08-27

    申请号:US09740123

    申请日:2000-12-19

    IPC分类号: B05D106

    摘要: The present invention is directed to electrostatic chucks, methods for their use, the electrostatic deposition of objects, such as particles in a dry powder, onto recipient substrates, and the recipient substrates themselves that have been subjected to electrostatic deposition. In one aspect, the present invention provides an electrostatic chuck for electrostatically attracting an object or objects wherein the object is used in chemical or pharmaceutical assaying or manufacturing. The objects can be pharmaceutical substrates, for example, such as a pharmaceutical tablet. Additional embodiments of the invention provide chucks and their use to electrostatically attract particles, such as a pharmaceutically active ingredient, to a substrate, such as a tablet. In one aspect, the electrostatic chuck comprises a floating electrode, and is used to selectively attract particles to a substrate above the floating electrode, thereby providing for charge imaging for the deposition of particles in a selected image. Additionally, the invention provides comprising a sensing electrode, optionally for use with an electrostatic chuck, for sensing the number of particles attracted to the objects on the chuck or other substrate, thereby providing for deposition of an accurate amount of particles. Furthermore, the present invention provides objects having selected areas in which particles are applied to the object via electrostatic means.

    摘要翻译: 本发明涉及静电卡盘,它们的使用方法,诸如干粉末中的物体的静电沉积到受体基底上,以及已经经过静电沉积的受体底物本身。 一方面,本发明提供一种用于静电吸引物体的静电吸盘,其中该物体用于化学或药物测定或制造。 物体可以是药物底物,例如药物片剂。 本发明的另外的实施方案提供了卡盘及其用于静电吸引诸如药物活性成分的颗粒到底物例如片剂。 一方面,静电卡盘包括浮动电极,并且用于选择性地将颗粒吸引到浮动电极上方的衬底上,从而为选定图像中的颗粒沉积提供电荷成像。 另外,本发明提供了包括感测电极,可选地与静电卡盘一起使用,用于感测吸附到卡盘或其它基底上的物体的颗粒的数量,从而提供精确量的颗粒的沉积。 此外,本发明提供了具有通过静电装置将颗粒施加到物体的选择区域的物体。

    Electrostatic chucks and a particle deposition apparatus therefor
    14.
    发明授权
    Electrostatic chucks and a particle deposition apparatus therefor 失效
    静电吸盘及其颗粒沉积设备

    公开(公告)号:US5858099A

    公开(公告)日:1999-01-12

    申请号:US661210

    申请日:1996-06-10

    摘要: The present invention is directed to electrostatic chucks, methods for their use, the electrostatic deposition of objects, such as particles in a dry powder, onto recipient substrates, and the recipient substrates themselves that have been subjected to electrostatic deposition. In one aspect, the present invention provides an electrostatic chuck for electrostatically attracting an object or objects wherein the object is used in chemical or pharmaceutical assaying or manufacturing. The objects can be pharmaceutical substrates, for example, such as a pharmaceutical tablet. Additional embodiments of the invention provide chucks and their use to electrostatically attract particles, such as a pharmaceutically active ingredient, to a substrate, such as a tablet. In one aspect, the electrostatic chuck comprises a floating electrode, and is used to selectively attract particles to a substrate above the floating electrode, thereby providing for charge imaging for the deposition of particles in a selected image. Additionally, the invention provides comprising a sensing electrode, optionally for use with an electrostatic chuck, for sensing the number of particles attracted to the objects on the chuck or other substrate, thereby providing for deposition of an accurate amount of particles.

    摘要翻译: 本发明涉及静电卡盘,它们的使用方法,诸如干粉末中的物体的静电沉积到受体基底上,以及已经经过静电沉积的受体底物本身。 一方面,本发明提供一种用于静电吸引物体的静电吸盘,其中该物体用于化学或药物测定或制造。 物体可以是药物底物,例如药物片剂。 本发明的另外的实施方案提供了卡盘及其用于静电吸引诸如药物活性成分的颗粒到底物例如片剂。 一方面,静电卡盘包括浮动电极,并且用于选择性地将颗粒吸引到浮动电极上方的衬底上,从而为选定图像中的颗粒沉积提供电荷成像。 另外,本发明提供了包括感测电极,可选地与静电卡盘一起使用,用于感测吸附到卡盘或其它基底上的物体的颗粒的数量,从而提供精确量的颗粒的沉积。