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公开(公告)号:US12270638B2
公开(公告)日:2025-04-08
申请号:US18089547
申请日:2022-12-27
Applicant: Industrial Technology Research Institute
Inventor: Hsiang-Chun Wei , Chun-Wei Lo , Chung-Lun Kuo , Chih-Hsiang Liu
Abstract: A measurement system including an excitation light source, an image sensor, and a calculator is provided. The excitation light source is configured to emit an excitation light beam. The image sensor is configured to record an image of the excitation light beam passing through a glass substrate having a plurality of vias. The image is a 2D interference pattern. The calculator is electrically connected to the image sensor. The calculator analyzes a 3D geometric-structure image of the vias in the glass substrate according to the image. A measurement method is also provided.
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公开(公告)号:US20240110968A1
公开(公告)日:2024-04-04
申请号:US18334387
申请日:2023-06-14
Applicant: Industrial Technology Research Institute
Inventor: Yan-Rung Lin , Chung-Lun Kuo , Chia-Liang Yeh
CPC classification number: G01R31/2635 , G01R31/44
Abstract: An inspection system includes an excitation light source, a voltage-sensing film, an illumination light source, an image capture device. The excitation light source provides an excitation beam to light-emitting diodes to generate open-circuit voltages. The voltage-sensing film is at a top side of the light-emitting diodes and includes a voltage-sensing medium layer and a first electrode layer. The first electrode layer is in the voltage-sensing medium layer to provide a gain effect of the open-circuit voltages, so that the voltage-sensing medium layer senses the open-circuit voltages, and a display of the voltage-sensing medium layer is changed with a portion or all of the open-circuit voltages. The illumination light source provides an illumination beam to the voltage-sensing film to generate a sensing image according to a display change. The image capture device is on a transmission path of the sensing image and receives the sensing image to generate an inspection result.
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公开(公告)号:US11656181B2
公开(公告)日:2023-05-23
申请号:US17135874
申请日:2020-12-28
Applicant: Industrial Technology Research Institute
Inventor: Yan-Rung Lin , Chih-Hsiang Liu , Chung-Lun Kuo , Hsiang-Chun Wei , Yeou-Sung Lin , Chieh-Yi Lo
CPC classification number: G01N21/66 , G01N21/8806 , G01N2201/062
Abstract: An inspection apparatus for inspecting a light-emitting diode wafer is provided. The inspection apparatus includes a Z-axis translation stage, a sensing probe, a height measurement module, a carrier, an illumination light source, and a processing device. The sensing probe is integrated with the Z-axis translation stage. The Z-axis translation stage is adapted to drive the sensing probe to move in a Z axis. The sensing probe includes a photoelectric sensor, a beam splitter, and a photoelectric sensing structure. One of the photoelectric sensor of the sensing probe and the height measurement module is adapted to receive a light beam penetrating the beam splitter, and the other one of the photoelectric sensor of the sensing probe and the height measurement module is adapted to receive a light beam reflected by the beam splitter. The carrier is configured to carry the light-emitting diode wafer. The illumination light source is configured to emit an illumination beam to irradiate the light-emitting diode wafer. An inspection method for inspecting light-emitting diodes is also provided.
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公开(公告)号:US20210231570A1
公开(公告)日:2021-07-29
申请号:US17135874
申请日:2020-12-28
Applicant: Industrial Technology Research Institute
Inventor: Yan-Rung Lin , Chih-Hsiang Liu , Chung-Lun Kuo , Hsiang-Chun Wei , Yeou-Sung Lin , Chieh-Yi Lo
Abstract: An inspection apparatus for inspecting a light-emitting diode wafer is provided. The inspection apparatus includes a Z-axis translation stage, a sensing probe, a height measurement module, a carrier, an illumination light source, and a processing device. The sensing probe is integrated with the Z-axis translation stage. The Z-axis translation stage is adapted to drive the sensing probe to move in a Z axis. The sensing probe includes a photoelectric sensor, a beam splitter, and a photoelectric sensing structure. One of the photoelectric sensor of the sensing probe and the height measurement module is adapted to receive a light beam penetrating the beam splitter, and the other one of the photoelectric sensor of the sensing probe and the height measurement module is adapted to receive a light beam reflected by the beam splitter. The carrier is configured to carry the light-emitting diode wafer. The illumination light source is configured to emit an illumination beam to irradiate the light-emitting diode wafer. An inspection method for inspecting light-emitting diodes is also provided.
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公开(公告)号:US20190056781A1
公开(公告)日:2019-02-21
申请号:US15846209
申请日:2017-12-19
Applicant: Industrial Technology Research Institute
Inventor: Hsiao-Wei Liu , Yu-Ying Lan , Hsin-Cheng Lin , Chung-Lun Kuo , Chia-Liang Yeh
Abstract: An eye tracking apparatus and an eye tracking method for the eye tracking apparatus are provided. The eye tracking apparatus includes an image capture device and a computing device. The image capture device is adapted to capture at least one face image. The computing device is coupled to the image capture device. The computing device receives the face image to obtain an eye image and identifies at least one iris region of the eye image. The computing device chooses the largest iris region from the iris regions to obtain a fitting pattern of the largest iris region and obtains a gaze point of the eye image based on the fitting pattern.
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