公开(公告)号：US10281519B2

公开(公告)日：2019-05-07

申请号：US15286394

申请日：2016-10-05

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yao-Chung Hsu ,  Sen-Chia Chang ,  Tsung-Jung Hsieh

IPC: G01R31/26 ,  G08B21/18

Abstract: An abnormality measuring method and an abnormality measuring apparatus of equipment are provided. The abnormality measuring method includes the following steps: acquiring a feature sequence corresponding to a life cycle according to recipe information and sensing information, wherein the feature sequence includes a plurality of feature subset sequences, and the life cycle is relative to a plurality of process runs; performing repeatedly a life segment analyzing process to acquire a plurality of life segments of the life cycle and each of the plurality of the feature subset sequences corresponding to one of the plurality of life segments; building a corresponding trending distribution of each of the plurality of life segments according to a corresponding feature subset sequence of the life segment; and determining whether to send an alarm message according to a plurality of trending distributions.

公开(公告)号：US10281362B2

公开(公告)日：2019-05-07

申请号：US14983033

申请日：2015-12-29

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Tsung-Jung Hsieh ,  Sen-Chia Chang ,  Yao-Chung Hsu

IPC: G01M99/00 ,  G06F17/11

Abstract: A breakdown measuring method and a breakdown measuring device are disclosed. The breakdown measuring method includes the following steps: capturing a plurality of process flows, each of the process flows includes at least one recipe step; analyzing a flow attribute corresponding to each of the process flows; capturing sensing data corresponding to the at least one recipe step; generating a local feature in a time interval corresponding to each of the process flows according to the corresponding flow attribute, the corresponding at least one recipe step and the corresponding sensing data; generating a trend distribution according to the local features of the process flows; determining whether to send an alarm information based on the trend distribution.