公开(公告)号：US10997710B2

公开(公告)日：2021-05-04

申请号：US16158774

申请日：2018-10-12

Applicant: KLA-TENCOR CORPORATION

Inventor： Himanshu Vajaria ,  Jan Lauber ,  Yong Zhang

IPC: G06T7/00 ,  G01N21/95 ,  G01N21/88 ,  G06T7/11 ,  G01N21/956

Abstract: The present disclosure describes methods, systems, and articles of manufacture for performing a defect inspection of a die image using adaptive care areas (ACAs). The use of ACAs solve the problem of handling rotations of components that require rotating care areas; handling the situation where each care area requires its own rotation, translation, or affine transformation; and the situation of decoupling intensity differences caused by defects or process variation from intensity differences caused by size variations.

公开(公告)号：US20160372303A1

公开(公告)日：2016-12-22

申请号：US15247774

申请日：2016-08-25

Applicant: KLA-Tencor Corporation

Inventor： Allen Park ,  Ajay Gupta ,  Jan Lauber

IPC: H01J37/22 ,  G06K9/62 ,  G06T7/00

CPC classification number: H01J37/222 ,  G01N21/956 ,  G01N2021/8883 ,  G03F7/70625 ,  G06K9/6267 ,  G06T7/0004 ,  G06T7/11 ,  G06T2207/30148 ,  H01J2237/2817 ,  H01L22/12 ,  H01L22/20

Abstract: Methods and systems for determining parameter(s) of a process to be performed on a specimen are provided. One system includes one or more computer subsystems configured for determining an area of a defect detected on a specimen. The computer subsystem(s) are also configured for correlating the area of the defect with information for a design for the specimen and determining a spatial relationship between the area of the defect and the information for the design based on results of the correlating. In addition, the computer subsystem(s) are configured for automatically generating a region of interest to be measured during a process performed for the specimen with a measurement subsystem based on the spatial relationship.

Abstract translation: 提供了用于确定要在样本上执行的过程的参数的方法和系统。 一个系统包括被配置用于确定在样本上检测到的缺陷区域的一个或多个计算机子系统。 计算机子系统还被配置为将缺陷的区域与用于样本的设计的信息相关联，并且基于相关的结果确定缺陷的区域与设计的信息之间的空间关系。 此外，计算机子系统被配置为在基于空间关系的测量子系统对于具有样本的处理过程中自动生成要测量的感兴趣区域。