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公开(公告)号：US20190122913A1
公开(公告)日：2019-04-25
申请号：US16160515
申请日：2018-10-15
发明人： Jan Lauber , Himanshu Vajaria , Yong Zhang
摘要： A die-die inspection image can be aligned using a method or system configured to receive a reference image and a test image, determine a global offset and rotation angle from local sections on the reference image and test image, and perform a rough alignment de-skew of the test image prior to performing a fine alignment.
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公开(公告)号：US20200090969A1
公开(公告)日：2020-03-19
申请号：US16189497
申请日：2018-11-13
发明人： Jason Kirkwood , Jan Lauber
摘要： A system for defect detection and analysis is provided. The system may include an inspection sub-system and a controller including a memory and one or more processors. The inspection sub-system may include an illumination source and one or more detectors configured to acquire control patch images of defects of a control specimen along one or more detector channels. The one or more processors may be configured to train a defect classifier using the control patch images and known parameters associated with the defects of the control specimen. The inspection sub-system may be further configured to acquire patch images of identified defects on an additional specimen. The one or more processors may be configured to determine parameters of the identified defects using the defect classifier.
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公开(公告)号：US10483081B2
公开(公告)日：2019-11-19
申请号：US15247774
申请日：2016-08-25
发明人： Allen Park , Ajay Gupta , Jan Lauber
摘要： Methods and systems for determining parameter(s) of a process to be performed on a specimen are provided. One system includes one or more computer subsystems configured for determining an area of a defect detected on a specimen. The computer subsystem(s) are also configured for correlating the area of the defect with information for a design for the specimen and determining a spatial relationship between the area of the defect and the information for the design based on results of the correlating. In addition, the computer subsystem(s) are configured for automatically generating a region of interest to be measured during a process performed for the specimen with a measurement subsystem based on the spatial relationship.
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4.发明申请公开(公告)号：US20190333206A1
公开(公告)日：2019-10-31
申请号：US16508778
申请日：2019-07-11
发明人： Hucheng Lee , Lisheng Gao , Jan Lauber , Yong Zhang
摘要： The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image.
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5.发明授权公开(公告)号：US10410338B2
公开(公告)日：2019-09-10
申请号：US14506407
申请日：2014-10-03
发明人： Hucheng Lee , Lisheng Gao , Jan Lauber , Yong Zhang
摘要： The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image.
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6.发明申请Method and System for Correlating Optical Images with Scanning Electron Microscopy Images 审中-公开将光学图像与扫描电子显微镜图像相关联的方法和系统公开(公告)号：US20150125065A1
公开(公告)日：2015-05-07
申请号：US14506407
申请日：2014-10-03
发明人： Hucheng Lee , Lisheng Gao , Jan Lauber , Yong Zhang
CPC分类号： G06T7/001 , G06T5/00 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01J37/28
摘要： The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image.
摘要翻译： 光学图像与SEM图像的相关性包括通过用光学检查子系统扫描样本来获取样品的全部光学图像，存储全部光学图像，识别存在于全光学中的感兴趣特征的位置 具有附加源的图像，使用SEM工具获取包括所述特征的所述特征的一部分的SEM图像，获取由所述附加源识别的位置处的光学图像部分，所述图像部分包括参考结构 ，基于图像部分和SEM图像两者中感兴趣特征和参考结构的存在，将图像部分和SEM图像相关联，并将感兴趣特征的位置转移到SEM图像中 全光学图像的图像部分的坐标系，以形成校正的光学图像。
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公开(公告)号：US10854486B2
公开(公告)日：2020-12-01
申请号：US16189497
申请日：2018-11-13
发明人： Jason Kirkwood , Jan Lauber
摘要： A system for defect detection and analysis is provided. The system may include an inspection sub-system and a controller including a memory and one or more processors. The inspection sub-system may include an illumination source and one or more detectors configured to acquire control patch images of defects of a control specimen along one or more detector channels. The one or more processors may be configured to train a defect classifier using the control patch images and known parameters associated with the defects of the control specimen. The inspection sub-system may be further configured to acquire patch images of identified defects on an additional specimen. The one or more processors may be configured to determine parameters of the identified defects using the defect classifier.
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公开(公告)号：US10522376B2
公开(公告)日：2019-12-31
申请号：US16160515
申请日：2018-10-15
发明人： Jan Lauber , Himanshu Vajaria , Yong Zhang
摘要： A die-die inspection image can be aligned using a method or system configured to receive a reference image and a test image, determine a global offset and rotation angle from local sections on the reference image and test image, and perform a rough alignment de-skew of the test image prior to performing a fine alignment.
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公开(公告)号：US20190114758A1
公开(公告)日：2019-04-18
申请号：US16158774
申请日：2018-10-12
发明人： Himanshu Vajaria , Jan Lauber , Yong Zhang
IPC分类号： G06T7/00 , G01N21/95 , G01N21/88 , G01N21/956 , G06T7/11
摘要： The present disclosure describes methods, systems, and articles of manufacture for performing a defect inspection of a die image using adaptive care areas (ACAs). The use of ACAs solve the problem of handling rotations of components that require rotating care areas; handling the situation where each care area requires its own rotation, translation, or affine transformation; and the situation of decoupling intensity differences caused by defects or process variation from intensity differences caused by size variations.
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10.发明授权公开(公告)号：US11244442B2
公开(公告)日：2022-02-08
申请号：US16508778
申请日：2019-07-11
发明人： Hucheng Lee , Lisheng Gao , Jan Lauber , Yong Zhang
摘要： The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image.
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