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    Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control
    12.
    发明授权
    Ceramic electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control 有权

    公开(公告)号：US10192767B2

    公开(公告)日：2019-01-29

    申请号：US16108632

    申请日：2018-08-22

    Applicant: Lam Research Corporation

    Inventor： Neil Martin Paul Benjamin ,  Henry Povolny ,  Anthony J. Ricci

    IPC: H01L21/683 ,  H01J37/32 ,  H01L21/66 ,  H01L21/67

    Abstract: A ceramic assembly is attached to a lower support structure having a bowl shape. The ceramic assembly has a top surface configured to support a substrate. At least one clamp electrode is positioned within an upper region of the ceramic assembly. A primary radiofrequency (RF) power delivery electrode is positioned within the ceramic assembly at a location vertically below the at least one clamp electrode such that a region of the ceramic assembly between the primary RF power delivery electrode and the at least one clamp electrode is substantially free of other electrically conductive material. A plurality of RF power delivery connection modules is distributed in a substantially uniform manner about a perimeter of the ceramic assembly. Each of the RF power delivery connection modules is configured to form an electrical connection from the lower support structure to the primary RF power delivery electrode at its respective location.

    APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBSTRATE
    14.
    发明申请
    APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBSTRATE 审中-公开
    用于空间和时间控制温度在基板上的装置

    公开(公告)号：US20140332161A1

    公开(公告)日：2014-11-13

    申请号：US14340083

    申请日：2014-07-24

    Applicant: Lam Research Corporation

    Inventor： Anthony J. Ricci ,  Keith Comendant ,  James Tappan

    IPC: H01L21/683 ,  H01J37/32 ,  H05B3/26

    CPC classification number: H01L21/6833 ,  H01J37/32724 ,  H01J2237/20 ,  H01L21/67103 ,  H01L21/6831 ,  H01L2221/683 ,  H05B3/26 ,  Y10T29/49146 ,  Y10T29/53252 ,  Y10T279/23

    Abstract: An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus.

    Abstract translation: 用于控制基板的温度的装置具有温度控制的基座，加热器，金属板，电介质材料层。 加热器在与金属板电绝缘的同时热耦合到金属板的下侧。 第一层粘合剂材料将金属板和加热器粘合到温度受控底座的顶部表面。 该粘合剂层具有机械柔性，并具有设计用于平衡加热器的热能和外部工艺的物理性能，以在设备的表面上提供期望的温度图案。 第二层粘合剂材料将介电材料层粘合到金属板的顶表面上。 该第二粘合剂层具有设计成将期望的温度图案转移到设备的表面的物理性质。

    Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods
    15.
    发明授权
    Ceramic layer for electrostatic chuck including embedded faraday cage for RF delivery and associated methods 有权

    公开(公告)号：US11101107B2

    公开(公告)日：2021-08-24

    申请号：US16591553

    申请日：2019-10-02

    Applicant: Lam Research Corporation

    Inventor： Neil Martin Paul Benjamin ,  Henry Povolny ,  Anthony J. Ricci

    IPC: H01L21/683 ,  H01J37/32 ,  H01L21/67 ,  H01L21/66

    Abstract: A ceramic layer is attached to a top surface of a base plate using a bond layer. The ceramic layer has a top surface configured to support a substrate. At least one clamp electrode is positioned within an upper region of the ceramic layer. A primary radiofrequency (RF) power delivery electrode is positioned within the ceramic layer at a location vertically below the at least one clamp electrode such that a region of the ceramic layer between the primary RF power delivery electrode and the at least one clamp electrode is substantially free of other electrically conductive material. A plurality of RF power delivery connection modules is distributed in a substantially uniform manner about a perimeter of the ceramic layer. Each of the RF power delivery connection modules is configured to form an electrical connection from the base plate to the primary RF power delivery electrode at its respective location.

    Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods
    16.
    发明申请
    Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods 审中-公开

    公开(公告)号：US20200035455A1

    公开(公告)日：2020-01-30

    申请号：US16591553

    申请日：2019-10-02

    Applicant: Lam Research Corporation

    Inventor： Neil Martin Paul Benjamin ,  Henry Povolny ,  Anthony J. Ricci

    IPC: H01J37/32 ,  H01L21/683 ,  H01L21/67 ,  H01L21/66

    Abstract: A ceramic layer is attached to a top surface of a base plate using a bond layer. The ceramic layer has a top surface configured to support a substrate. At least one clamp electrode is positioned within an upper region of the ceramic layer. A primary radiofrequency (RF) power delivery electrode is positioned within the ceramic layer at a location vertically below the at least one clamp electrode such that a region of the ceramic layer between the primary RF power delivery electrode and the at least one clamp electrode is substantially free of other electrically conductive material. A plurality of RF power delivery connection modules is distributed in a substantially uniform manner about a perimeter of the ceramic layer. Each of the RF power delivery connection modules is configured to form an electrical connection from the base plate to the primary RF power delivery electrode at its respective location.

    APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBSTRATE
    19.
    发明申请
    APPARATUS FOR SPATIAL AND TEMPORAL CONTROL OF TEMPERATURE ON A SUBSTRATE 有权
    用于空间和时间控制温度在基板上的装置

    公开(公告)号：US20130072024A1

    公开(公告)日：2013-03-21

    申请号：US13657031

    申请日：2012-10-22

    Applicant: Lam Research Corporation

    Inventor： Anthony J. Ricci ,  Keith Comendant ,  James Tappan

    IPC: H01L21/3065

    CPC classification number: H01L21/6833 ,  H01J37/32724 ,  H01J2237/20 ,  H01L21/67103 ,  H01L21/6831 ,  H01L2221/683 ,  H05B3/26 ,  Y10T29/49146 ,  Y10T29/53252 ,  Y10T279/23

    Abstract: An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.

    Abstract translation: 用于控制基板的温度的装置具有温度控制的基座，加热器，金属板，电介质材料层。 加热器在与金属板电绝缘的同时热耦合到金属板的下侧。 第一层粘合剂材料将金属板和加热器粘合到温度受控底座的顶部表面。 该粘合剂层具有机械柔性，并具有设计用于平衡加热器的热能和外部工艺的物理性能，以在设备的表面上提供期望的温度图案。 第二层粘合剂材料将介电材料层粘合到金属板的顶表面上。 该第二粘合剂层具有设计成将期望的温度图案转移到设备的表面的物理性质。 介电材料层形成静电夹持机构并支撑基板。

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