公开(公告)号：US10943769B2

公开(公告)日：2021-03-09

申请号：US16040326

申请日：2018-07-19

Applicant: Lam Research Corporation

Inventor： Mark Taskar ,  Iqbal A. Shareef

IPC: H01J37/32 ,  F16K11/10

Abstract: Apparatus and methods for distributing and mixing gas are provided. In one example, a gas distributor comprises a body, a gas inlet for admitting gas to the body, an orbital array of gas outlets for distributing the gas to an external component, and a central gas distribution point disposed within the body at a center of the orbital array of gas outlets and in fluid communication with the orbital array of gas outlets.

公开(公告)号：US09364870B2

公开(公告)日：2016-06-14

申请号：US14926575

申请日：2015-10-29

Applicant: Lam Research Corporation

Inventor： Evangelos T. Spyropoulos ,  Iqbal A. Shareef ,  Clifford Erik La Croix

IPC: B08B3/12 ,  G02B27/00 ,  H01J37/32 ,  B08B3/10 ,  B08B3/04 ,  B08B11/04 ,  B08B11/00 ,  B08B1/00 ,  B08B3/00 ,  B08B11/02

CPC classification number: B08B3/12 ,  A47L2601/17 ,  B08B1/00 ,  B08B3/00 ,  B08B3/044 ,  B08B3/045 ,  B08B3/047 ,  B08B3/048 ,  B08B3/10 ,  B08B3/108 ,  B08B11/00 ,  B08B11/02 ,  B08B11/04 ,  B08B2209/005 ,  G02B27/0006 ,  H01J37/32862

Abstract: Ultrasonic cleaning apparatuses and methods of cleaning substantially planar articles. An apparatus comprises (i) a substantially circular tank; (ii) a plurality of cleaning fluid inlets for delivering a cleaning fluid to the tank; (iii) an intermediate support for receiving an article to be cleaned; and (iv) an ultrasonic generator coupled to the tank for generating ultrasonic waves in the tank and cleaning fluid received therein. The apparatus is configured to remove particles from a substantially planar article and have them carried by flow of cleaning fluid away from the article and out of the tank. Using such an apparatus, a cleaning method comprises introducing a substantially planar article to be cleaned into the tank; introducing a cleaning fluid into the tank through the plurality of cleaning fluid inlets; and exciting the cleaning fluid with ultrasonic waves.