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公开(公告)号:US20200076166A1
公开(公告)日:2020-03-05
申请号:US16244842
申请日:2019-01-10
Applicant: Lumentum Operations LLC
Inventor: Benjamin Kesler , Ajit Vijay Barve , Guowei Zhao
IPC: H01S5/42
Abstract: A wafer may comprise a substrate layer and a plurality of vertical cavity surface emitting lasers (VCSELs) formed on or within the substrate layer. A respective trench-to-trench distance associated with the plurality of VCSELs may vary across the wafer based on a predicted variation of an oxidation rate of an oxidation layer across the wafer.
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公开(公告)号:US20190199063A1
公开(公告)日:2019-06-27
申请号:US16217790
申请日:2018-12-12
Applicant: Lumentum Operations LLC
Inventor: Ajit Vijay BARVE , Benjamin Kesler , Matthew Glenn Petters
IPC: H01S5/183
CPC classification number: H01S5/18305 , H01S5/18311 , H01S5/18344 , H01S5/18369
Abstract: An emitter array may comprise a plurality of emitters and a metallization layer to electrically connect the plurality of emitters. The metallization layer may have a first end and a second end. The plurality of emitters may include a first emitter and a second emitter. The first emitter may be located closer to the first end than the second emitter. The first emitter and the second emitter have differently sized structures to compensate for a first impedance of the metallization layer between the first end and the first emitter and a second impedance between the first end and the second emitter.
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