TELECENTRIC OPTICAL APPARATUS
    11.
    发明申请
    TELECENTRIC OPTICAL APPARATUS 审中-公开
    电子光学设备

    公开(公告)号:US20160349490A1

    公开(公告)日:2016-12-01

    申请号:US15139543

    申请日:2016-04-27

    Abstract: A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

    Abstract translation: 提供了能够抑制部件数量增加以及实现高精度光轴对准的远心光学装置。 本发明的远心光学装置的特征在于具有:设置在物体侧的第一远心透镜面; 第二远心透镜表面,其设置在图像侧并与第一远心透镜表面共享焦点位置; 以及在位于第一远心透镜表面和第二远心透镜表面之间的外部区域中的光路修剪部分,该外部区域位于比位于焦点位置的中心的光通过区域更远的一侧 并且改变光路,从而防止入射在外部区域上的光束对图像形成有贡献。

    Inclination adjusting mechanism
    12.
    发明授权

    公开(公告)号:US10908380B2

    公开(公告)日:2021-02-02

    申请号:US16159976

    申请日:2018-10-15

    Abstract: An inclination adjusting mechanism includes a first member that is attachable to a connection portion of a lens unit that is connectable to a lens barrel; a second member that faces the first member and that is attachable to a connection portion of the lens barrel that is connectable to the lens unit; contact members that are fixed to the first member, that protrude from the first member toward the second member, and that contact the second member; and adjusting/fixing members that are capable of adjusting an inclination of the first member relative to the second member and capable of fixing the first member to the second member. The second member has an inclined surface that the contact members contact, and each of the contact members has a curved surface that contacts the inclined surface.

    LIGHT INTERFERENCE MEASURING DEVICE AND PROGRAM THEREFOR
    15.
    发明申请
    LIGHT INTERFERENCE MEASURING DEVICE AND PROGRAM THEREFOR 有权
    光干扰测量装置及其程序

    公开(公告)号:US20150176967A1

    公开(公告)日:2015-06-25

    申请号:US14570376

    申请日:2014-12-15

    CPC classification number: G01B9/02077 G01B9/0209 G01B11/2441

    Abstract: A light interference measuring device comprises: a light source 20 that outputs light; a beam splitter 222 that causes the light output from the light source to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light that has passed through the reference optical path and reflection light that has passed through a measuring object arranged in the measurement optical path are combined; a reference mirror 231 that is arranged in the reference optical path and that reflects light which is diverged into the reference optical path by the beam splitter 222; a stage 12 that is arranged in the measurement optical path and that has the work W placed thereon; an imaging part 25 that images an image in which the combined wave is formed; a reference mirror adjustment mechanism (234, 238, 239) that adjusts a posture of the reference mirror 231; and a control part that controls the reference mirror adjustment mechanism such that a reflecting surface of the reference mirror 231 corresponds to a measurement surface of the work W, based on an image imaged in a condition where a work W is placed on the stage.

    Abstract translation: 光干涉测量装置包括:输出光的光源20; 分束器222,其使得从光源输出的光发散到参考光路和测量光路中,并且输出组合波,其中已经穿过参考光路的反射光和已经穿过的反射光 布置在测量光路中的测量对象被组合; 参考反射镜231,布置在参考光路中,并且反射由分束器222分散到参考光路中的光; 布置在测量光路中并且放置在其上的工件W的台12; 成像部25,其对形成有组合波的图像进行成像; 调整参考镜231的姿势的参考镜调节机构(234,238,239); 以及控制部,其基于在工件W放置在台架上的状态下成像的图像来控制参考镜调节机构,使得参考镜231的反射表面对应于作品W的测量表面。

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