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公开(公告)号:US10197382B2
公开(公告)日:2019-02-05
申请号:US15724328
申请日:2017-10-04
Applicant: Mitutoyo Corporation
Inventor: Sadayuki Matsumiya , Kenji Okabe , Koji Kubo , Nobuya Kaneko
Abstract: A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.
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公开(公告)号:US11467384B2
公开(公告)日:2022-10-11
申请号:US16679731
申请日:2019-11-11
Applicant: Mitutoyo Corporation
Inventor: Kenji Okabe , Tatsuya Nagahama , Toru Yaku , Kimitoshi Ono
Abstract: A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.
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公开(公告)号:US10520710B2
公开(公告)日:2019-12-31
申请号:US15139543
申请日:2016-04-27
Applicant: Mitutoyo Corporation
Inventor: Kenji Okabe , Tatsuya Nagahama , Toru Yaku , Kimitoshi Ono
IPC: G02B13/22
Abstract: A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.
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公开(公告)号:US10088420B2
公开(公告)日:2018-10-02
申请号:US15597856
申请日:2017-05-17
Applicant: Mitutoyo Corporation
Inventor: Kenji Okabe , Tatsuya Nagahama , Nobuya Kaneko
IPC: G01N21/64
Abstract: A measurement system includes detachable parts, on which one filter module out of a plurality of filter modules including optical filters that each transmit different types of special light is detachably mounted, a specification part that specifies the optical filter of the one filter module mounted on the detachable parts, and a set value switching part that switches, according to the specified optical filter specified by the specification part, set values for adjustment used in a measurement using a specific optical filter.
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公开(公告)号:US09726473B2
公开(公告)日:2017-08-08
申请号:US14570376
申请日:2014-12-15
Applicant: Mitutoyo Corporation
Inventor: Kenji Okabe , Gyokubu Cho , Tatsuya Nagahama
CPC classification number: G01B9/02077 , G01B9/0209 , G01B11/2441
Abstract: A light interference measuring device comprises: a light source 20 that outputs light; a beam splitter 222 that causes the light output from the light source to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light that has passed through the reference optical path and reflection light that has passed through a measuring object arranged in the measurement optical path are combined; a reference mirror 231 that is arranged in the reference optical path and that reflects light which is diverged into the reference optical path by the beam splitter 222; a stage 12 that is arranged in the measurement optical path and that has the work W placed thereon; an imaging part 25 that images an image in which the combined wave is formed; a reference mirror adjustment mechanism (234, 238, 239) that adjusts a posture of the reference mirror 231; and a control part that controls the reference mirror adjustment mechanism such that a reflecting surface of the reference mirror 231 corresponds to a measurement surface of the work W, based on an image imaged in a condition where a work W is placed on the stage.
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公开(公告)号:US09170196B2
公开(公告)日:2015-10-27
申请号:US14167562
申请日:2014-01-29
Applicant: MITUTOYO CORPORATION
Inventor: Kenji Okabe , Tatsuya Nagahama , Nobuya Kaneko
CPC classification number: G01N21/64 , G01N21/25 , G02B21/248
Abstract: In an optical measuring device, the visual observation section includes: a white light source which emits white light; a first objective lens arranged between the white light source and measurement object, through which the white light emitted from the white light source and return light from the measurement object transmit; a plurality of tube lenses which change a magnification of the return light passing through the first objective lens to a predetermined magnification; and a lens switching mechanism which can selectively switch the tube lenses so as to select one of the tube lenses to be arranged on the return light, and the special observation section includes: a special light source which emits special light; and a second objective lens arranged between the special light source and measurement object, through which the special light emitted from the special light source and return light from the measurement object transmit.
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公开(公告)号:USD706847S1
公开(公告)日:2014-06-10
申请号:US29448386
申请日:2013-03-12
Applicant: Mitutoyo Corporation
Designer: Sadayuki Matsumiya , Kenji Okabe , Yasushi Fukumoto , Shigeru Ohtani , Kenji Iwamoto
CPC classification number: G02B21/24
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公开(公告)号:US20200073093A1
公开(公告)日:2020-03-05
申请号:US16679731
申请日:2019-11-11
Applicant: Mitutoyo Corporation
Inventor: Kenji Okabe , Tatsuya Nagahama , Toru Yaku , Kimitoshi Ono
Abstract: A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.
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公开(公告)号:US20190146176A1
公开(公告)日:2019-05-16
申请号:US16159976
申请日:2018-10-15
Applicant: Mitutoyo Corporation
Inventor: Hidekazu Sano , Kenji Okabe
IPC: G02B7/02
Abstract: An inclination adjusting mechanism includes a first member that is attachable to a connection portion of a lens unit that is connectable to a lens barrel; a second member that faces the first member and that is attachable to a connection portion of the lens barrel that is connectable to the lens unit; contact members that are fixed to the first member, that protrude from the first member toward the second member, and that contact the second member; and adjusting/fixing members that are capable of adjusting an inclination of the first member relative to the second member and capable of fixing the first member to the second member. The second member has an inclined surface that the contact members contact, and each of the contact members has a curved surface that contacts the inclined surface.
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公开(公告)号:US20180112966A1
公开(公告)日:2018-04-26
申请号:US15724328
申请日:2017-10-04
Applicant: Mitutoyo Corporation
Inventor: Sadayuki Matsumiya , Kenji Okabe , Koji Kubo , Nobuya Kaneko
CPC classification number: G01B11/002 , G01B11/0608 , G01B2210/50 , G01J3/0218 , G01J3/2823
Abstract: A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.
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