公开(公告)号：US10948334B2

公开(公告)日：2021-03-16

申请号：US16527486

申请日：2019-07-31

Applicant: MITUTOYO CORPORATION

Inventor： Koji Kubo

IPC: G01F23/292 ,  G01J1/32

Abstract: A non-contact displacement sensor includes a focus timing calculator that, calculates a measurement-side focus timing at which measurement light is focused on a surface of a measurable object, a first reference-side focus timing at which reference light is focused on a first reference surface, and a second reference-side focus timing at which the reference light is focused on a second reference surface; a characteristics calculator that calculates the refractive index characteristics of a liquid lens apparatus based on the first reference-side focus timing, the second reference-side focus timing, and an optical path length difference; and a position calculator that calculates a position of the measurable object based on the refractive index characteristics and a phase of the measurement-side focus timing relative to a period of a drive signal.

公开(公告)号：US10830585B2

公开(公告)日：2020-11-10

申请号：US16519117

申请日：2019-07-23

Applicant: MITUTOYO CORPORATION

Inventor： Koji Kubo ,  Yuko Shishido

IPC: G01C3/32 ,  G01C3/02 ,  G02B3/14 ,  H04N5/232 ,  G01S17/08 ,  H04N5/225 ,  G02B26/00

Abstract: A non-contact type displacement sensor includes a light source that emits measurement light; a liquid lens apparatus in which a refractive index periodically changes in response to an input drive signal; an objective lens emitting, at a measurable object, the measurement light that is emitted from the light source and has passed through the liquid lens apparatus; a photodetector receiving the measurement light that is reflected by the measurable object and outputs a photodetection signal; and a signal processor (controller) that calculates focus timing with which the measurement light is in focus on a surface of the measurable object based on the photodetection signal output from the photodetector, and that obtains a position of the measurable object based on a phase of the focus timing with respect to a cycle of the drive signal.

公开(公告)号：US10094656B2

公开(公告)日：2018-10-09

申请号：US15417751

申请日：2017-01-27

Applicant: MITUTOYO CORPORATION

Inventor： Norihiko Masuda ,  Koji Kubo

IPC: G01B11/14 ,  G01B11/04 ,  G01B11/00

Abstract: Provided is a chromatic confocal sensor including: a first light source that emits measurement light including a plurality of light beams having different wavelengths; a second light source that emits a visible light beam having a predetermined wavelength; an optical head that causes incident light to be converged at a focal position corresponding to a wavelength of the incident light and outputs reflection light reflected by an object to be measured at the focal position; a position calculation section that calculates a position of the object to be measured on the basis of the reflection light output by the optical head; and a switching section that selectively switches between a first operation in which only the measurement light enters the optical head and a second operation in which at least the visible light beam enters the optical head.

公开(公告)号：US09541376B2

公开(公告)日：2017-01-10

申请号：US15054722

申请日：2016-02-26

Applicant: Mitutoyo Corporation

Inventor： Koji Kubo

IPC: G01J3/28 ,  G01B11/02 ,  G02B21/00

CPC classification number: G01B11/026 ,  G01B2210/50 ,  G02B21/0064

Abstract: Provided is a chromatic confocal sensor including: a light source section that emits a plurality of light beams having different wavelengths; an optical head that includes an objective lens that converges the plurality of light beams at different focal positions and selects, as measurement light, light reflected by an object to be measured at the focal position out of the plurality of light beams; a spectroscope including diffraction gratings that split the selected measurement light into a plurality of diffracted light beams and a sensor that receives two or more of the plurality of diffracted light beams; and a signal processing/control section that calculates a position of the object to be measured based on a difference between light reception positions of the two or more diffracted light beams received by the sensor.

Abstract translation: 提供一种彩色共焦传感器，包括：发射具有不同波长的多个光束的光源部; 光学头包括物镜，所述物镜在不同的焦点位置会聚所述多个光束，并且将所述多个光束中的所述焦点处的待测量物体反射的光选择为测量光; 包括将所选择的测量光分成多个衍射光束的衍射光栅的分光器和接收多个衍射光束中的两个或更多个的传感器; 以及信号处理/控制部分，其基于由传感器接收的两个或更多个衍射光束的光接收位置之间的差异来计算被测量物体的位置。