公开(公告)号：US20160103443A1

公开(公告)日：2016-04-14

申请号：US14511100

申请日：2014-10-09

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll

IPC: G05B19/21

CPC classification number: G05B19/21 ,  G01B11/005 ,  G01B2210/50 ,  G02B21/0016 ,  G02B21/0064 ,  G05B2219/23182 ,  G05B2219/37208 ,  G05B2219/37449 ,  G05B2219/37553 ,  G06F9/00

Abstract: A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program.

Abstract translation: 一种用于为包括3D运动控制系统，第一类型Z高度感测系统和第二类Z高度感测系统的度量系统的三维（3D）工件扫描路径进行编程的方法，其提供较不精确的表面 在更高的Z高度测量范围内的Z高度测量。 该方法包括：将代表性工件放置在测量系统的台上，为代表性工件定义至少第一工件扫描路径段，确定沿着第一工件扫描路径段的初步实际表面Z高度测量值，以及确定精确 3D扫描路径用于移动第一种类型的Z高度感测系统，以执行精确的表面Z高度测量。 精确的3D扫描路径基于确定的初步实际表面Z高度测量。 精确的3D扫描路径可用于执行精确的表面Z高度测量或存储以用于检查程序。

公开(公告)号：US10281700B1

公开(公告)日：2019-05-07

申请号：US15940537

申请日：2018-03-29

Applicant: Mitutoyo Corporation

Inventor： Michael Nahum ,  Joseph Andrew Summers ,  Robert Kamil Bryll ,  Paul Gerard Gladnick

IPC: G02B21/00 ,  H04N5/235 ,  G02B7/10 ,  G02B27/10 ,  G03B13/34

Abstract: A focus state reference subsystem comprising a focus state (FS) reference object is provided for use in a variable focal length (VFL) lens system comprising a VFL lens, a controller that modulates its optical power, and a camera located along an optical path including an objective lens and the VFL lens. Reference object image light from the FS reference object is transmitted along a portion of the optical path through the VFL lens to the camera. Respective FS reference regions (FSRRs) of the FS reference object include a contrast pattern fixed at respective focus positions. A camera image that includes a best-focus image of a particular FSRR defines a best-focus reference state associated with that FSRR, wherein that best-focus reference state comprises a VFL optical power and/or effective focus position of the VFL lens system through the objective lens.

公开(公告)号：US20170324895A1

公开(公告)日：2017-11-09

申请号：US15394194

申请日：2016-12-29

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll ,  Mark Lawrence Delaney

IPC: H04N5/232 ,  H04N5/225 ,  G06T7/00 ,  H04N5/235

CPC classification number: H04N5/23212 ,  G01N21/8806 ,  G01N2021/8838 ,  G06T7/0004 ,  G06T2207/30164 ,  H04N5/2254 ,  H04N5/2256 ,  H04N5/23216 ,  H04N5/2353

Abstract: A system for providing an automatically focused image comprises an imaging system including a high speed periodically modulated variable focal length (VFL) lens, a VFL lens controller, a VFL-projected light source, a focus determining portion, an exposure timing adjustment circuit, and an exposure strobe time controller. The focus determining portion comprises an optical detector that inputs reflected VFL-projected light that is projected to, and reflected from, a workpiece through the VFL lens, and provides a focus deviation signal. The exposure timing adjustment circuit provides an exposure timing adjustment signal based on the focus deviation signal, which indicates a time when the imaging system focus Z-height approximately coincides with the workpiece surface Z height. The exposure strobe time controller uses the exposure timing adjustment signal to adjust the image exposure time so the imaging system focus Z-height coincides with the workpiece surface Z height at the adjusted image exposure time.

公开(公告)号：US20150145980A1

公开(公告)日：2015-05-28

申请号：US14092862

申请日：2013-11-27

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll

IPC: G02B21/36 ,  G02B21/02

CPC classification number: G02B21/367 ,  G02B21/241 ,  G02B21/361 ,  G02B27/0075

Abstract: A method for operating an imaging system of a machine vision inspection system to provide an extended depth of field (EDOF) image. The method comprises (a) placing a workpiece in a field of view; (b) periodically modulating a focus position of the imaging system without macroscopically adjusting the spacing between elements in the imaging system, the focus position is periodically modulated over a plurality of positions along a focus axis direction in a focus range including a workpiece surface height; (c) exposing a first preliminary image during an image integration time while modulating the focus position in the focus range; and (d) processing the first preliminary image to remove blurred image contributions occurring in the focus range during the image integration time to provide an EDOF image that is focused throughout a larger depth of field than the imaging system provides at a single focal position.

Abstract translation: 一种用于操作机器视觉检查系统的成像系统以提供扩展景深（EDOF）图像的方法。 该方法包括（a）将工件放置在视场中; （b）周期地调制成像系统的焦点位置，而不会宏观地调整成像系统中的元件之间的间隔，聚焦位置在包括工件表面高度的对焦范围内沿着焦点轴线方向在多个位置周期性地调制; （c）在图像积分时间期间曝光第一预备图像，同时调制对焦范围中的焦点位置; 以及（d）处理第一初步图像以去除在图像积分时间期间发生在焦点范围内的模糊图像贡献，以提供聚焦在比成像系统在单个焦点位置处提供的更大景深的更大景深的EDOF图像。

公开(公告)号：US08995749B2

公开(公告)日：2015-03-31

申请号：US13852945

申请日：2013-03-28

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll

IPC: G06K9/00 ,  G06K9/48 ,  G06T7/00

CPC classification number: G06T7/0004 ,  G06T7/13 ,  G06T2207/10016 ,  G06T2207/30164

Abstract: A method is provided for enhancing edge detection for edges of irregular surfaces in a machine vision inspection system. The inspection system comprises an edge feature video tool configured to determine profile data for an edge feature based on a plurality of differently focused images. An edge-referenced alignment compensation is provided related to substantially minimizing a respective offset amount of the edge feature at respective locations along a directional filtering direction used for directionally filtering the plurality of differently focused images prior to determining the profile data for the edge feature. In some embodiments, the plurality of differently focused images may be directionally filtered using a directional filtering sub region (DFS) defined relative to a point corresponding to a PFF basis pixel location in each of the plurality of images, each DFS having a relatively longer dimension along the directional filtering direction.

Abstract translation: 提供了一种用于增强机器视觉检查系统中不规则表面边缘的边缘检测的方法。 检查系统包括边缘特征视频工具，其被配置为基于多个不同聚焦的图像来确定边缘特征的简档数据。 提供了边缘参考对准补偿，其涉及在确定用于边缘特征的轮廓数据之前，沿着用于定向过滤多个不同聚焦图像的方向滤波方向的相应位置处的边缘特征的相应偏移量。 在一些实施例中，可以使用相对于多个图像中的每一个中的PFF基像素位置相对应的点定义的方向滤波子区域（DFS）来定向地滤波多个不同聚焦图像，每个DFS具有相对较长的尺寸 沿着方向滤波方向。

公开(公告)号：US08917940B2

公开(公告)日：2014-12-23

申请号：US13872041

申请日：2013-04-26

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll

IPC: G06K9/48 ,  G06T7/00

CPC classification number: G06T7/0004 ,  G06T7/13 ,  G06T7/136 ,  G06T2200/24 ,  G06T2207/10016 ,  G06T2207/10056 ,  G06T2207/30164

Abstract: A reliable method for discriminating between a plurality of edges in a region of interest of an edge feature video tool in a machine vision system comprises determining a scan direction and an intensity gradient threshold value, and defining associated gradient prominences. The gradient threshold value may be required to fall within a maximum range that is based on certain characteristics of an intensity gradient profile derived from an image of the region of interest. Gradient prominences are defined by limits at sequential intersections between the intensity gradient profile and the edge gradient threshold. A single prominence is allowed to include gradient extrema corresponding to a plurality of respective edges. A gradient prominence-counting parameter is automatically determined that is indicative of the location of the selected edge in relation to the defined gradient prominences. The gradient prominence-counting parameter may correspond to the scan direction.

Abstract translation: 用于区分机器视觉系统中边缘特征视频工具的感兴趣区域中的多个边缘的可靠方法包括确定扫描方向和强度梯度阈值，以及定义相关联的梯度突出。 可能需要梯度阈值落在基于从感兴趣区域的图像导出的强度梯度分布的某些特性的最大范围内。 梯度突起由强度梯度轮廓和边缘梯度阈值之间的顺序交点处的限制定义。 允许单个突出部包括对应于多个相应边缘的梯度极值。 自动确定梯度突出计数参数，其指示所选择的边缘相对于限定的梯度突出部分的位置。 梯度突出计数参数可以对应于扫描方向。

公开(公告)号：US08885945B2

公开(公告)日：2014-11-11

申请号：US13728842

申请日：2012-12-27

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll ,  Yuhua Ding

IPC: G06K9/48 ,  G06K9/64 ,  G06K9/46

CPC classification number: G06K9/6204 ,  G06K9/50 ,  G06K2209/19

Abstract: A method for improving repeatability in edge location measurement results of a machine vision inspection system comprises: placing a workpiece in a field of view of the machine vision inspection system; providing an edge measurement video tool comprising an edge-referenced alignment compensation defining portion; operating the edge measurement video tool to define a region of interest of the video tool which includes an edge feature of the workpiece; operating the edge measurement video tool to automatically perform scan line direction alignment operations such that the scan line direction of the edge measurement video tool is aligned along a first direction relative to the edge feature, wherein the first direction is defined by predetermined alignment operations of the edge-referenced alignment compensation defining portion; and performing edge location measurement operations with the region of interest in that position.

Abstract translation: 一种用于提高机器视觉检查系统的边缘位置测量结果中的重复性的方法，包括：将工件放置在机器视觉检查系统的视野内; 提供包括边缘参考对准补偿限定部分的边缘测量视频工具; 操作边缘测量视频工具以定义包括工件的边缘特征的视频工具的感兴趣区域; 操作所述边缘测量视频工具以自动执行扫描线方向对准操作，使得所述边缘测量视频工具的扫描线方向相对于所述边缘特征沿着第一方向对准，其中所述第一方向由所述边缘测量视频工具的预定对准操作定义 边缘参考对准补偿定义部分; 并且与该位置的感兴趣区域执行边缘位置测量操作。

公开(公告)号：US20140294284A1

公开(公告)日：2014-10-02

申请号：US13852945

申请日：2013-03-28

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T7/13 ,  G06T2207/10016 ,  G06T2207/30164

Abstract: A method is provided for enhancing edge detection for edges of irregular surfaces in a machine vision inspection system. The inspection system comprises an edge feature video tool configured to determine profile data for an edge feature based on a plurality of differently focused images. An edge-referenced alignment compensation is provided related to substantially minimizing a respective offset amount of the edge feature at respective locations along a directional filtering direction used for directionally filtering the plurality of differently focused images prior to determining the profile data for the edge feature. In some embodiments, the plurality of differently focused images may be directionally filtered using a directional filtering sub region (DFS) defined relative to a point corresponding to a PFF basis pixel location in each of the plurality of images, each DFS having a relatively longer dimension along the directional filtering direction.

Abstract translation: 提供了一种用于增强机器视觉检查系统中不规则表面边缘的边缘检测的方法。 检查系统包括边缘特征视频工具，其被配置为基于多个不同聚焦的图像来确定边缘特征的简档数据。 提供了边缘参考对准补偿，其涉及在确定用于边缘特征的轮廓数据之前，沿着用于定向过滤多个不同聚焦图像的方向滤波方向的相应位置处的边缘特征的相应偏移量。 在一些实施例中，可以使用相对于多个图像中的每一个中的PFF基像素位置相对应的点定义的方向滤波子区域（DFS）来定向地滤波多个不同聚焦图像，每个DFS具有相对较长的尺寸 沿着方向滤波方向。

公开(公告)号：US11150200B1

公开(公告)日：2021-10-19

申请号：US16902182

申请日：2020-06-15

Applicant: Mitutoyo Corporation

Inventor： William Todd Watson ,  Shannon Roy Campbell ,  Robert Kamil Bryll

IPC: H04N17/00 ,  G01N21/956 ,  G01N21/88 ,  G06T7/00

Abstract: A workpiece inspection and defect detection system includes a light source, a lens that inputs image light arising from a surface of a workpiece, and a camera that receives imaging light transmitted along an imaging optical path. The system utilizes images of workpieces acquired with the camera as training images to train a defect detection portion to detect defect images that include workpieces with defects, and determines a performance of the defect detection portion as trained with the training images. Based on the performance of the defect detection portion, an indication is provided as to whether additional defect images should be provided for training. After training is complete, the camera is utilized to acquire new images of workpieces which are analyzed to determine defect images that include workpieces with defects, and for which additional operations may be performed (e.g., metrology operations for measuring dimensions of the defects, etc.)

公开(公告)号：US20180143419A1

公开(公告)日：2018-05-24

申请号：US15360579

申请日：2016-11-23

Applicant: Mitutoyo Corporation

Inventor： Robert Kamil Bryll ,  Tatsuya Nagahama

IPC: G02B21/36 ,  G06T5/00 ,  H04N5/232 ,  G02F1/11 ,  G02B21/00

CPC classification number: G02B21/367 ,  G02B21/0016 ,  G02F1/113 ,  G06T5/003 ,  H04N5/23212 ,  H04N5/23216

Abstract: An imaging system including a tunable acoustic gradient (TAG) lens is associated with a user interface including a live display of an extended depth of field (EDOF) image. The TAG lens is utilized to produce a raw EDOF image, which may include defocus blur (e.g., resulting in part from the periodically modulated optical power variation of the TAG lens). The live EDOF image is repetitively updated in the user interface based on a translation state signal at a current time (e.g., indicating a speed of translation of the workpiece across a field of view of the imaging system, etc.) In response to a current state of the translation state signal, a corresponding type of live EDOF image of the workpiece is displayed in the user interface corresponding to an EDOF image data set that is based on a corresponding level of image processing to remove defocus blur.