Method for programming a three-dimensional workpiece scan path for a metrology system

    公开(公告)号:US09740190B2

    公开(公告)日:2017-08-22

    申请号:US14511100

    申请日:2014-10-09

    IPC分类号: G05B19/21

    摘要: A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program.

    Computer controlled lighting system with distributed control resources
    3.
    发明授权
    Computer controlled lighting system with distributed control resources 失效
    具有分布式控制资源的计算机控制照明系统

    公开(公告)号:US5769527A

    公开(公告)日:1998-06-23

    申请号:US473150

    申请日:1995-06-07

    摘要: A stage lighting system is comprised of a plurality of lamp units which may have diverse communication protocols, functions and data parameters. The stage lighting system is controlled by a modular control system comprised of a modular controller mainframe interconnected with a plurality of control devices which may have diverse communications protocols and data formats. The modular controller mainframe consists of a plurality of input and output modules, mass storage devices and a main processor kernel, all interconnected by a number of data buses. The input modules serve as an interface between the modular controller mainframe and the diverse protocols of the various control devices. Similarly, the output modules serve as an interface between the modular controller mainframe and the diverse protocols of the various types of lamp units. The modular controller mainframe serves as an interface system by providing one or more of said input or output modules with the capability of translating parameter commands, where necessary, to accommodate control devices having diverse communications protocols and output devices having diverse communications protocols, functions and data formats. The system may also include a distributed control system for a lighting system in which two or more fully-functional control devices are online simultaneously to control any function of any of a plurality of luminaries from the control devices. Various methods for arbitrating and resolving conflicts between or among plural control consoles are also used.

    摘要翻译: 舞台照明系统由可以具有不同通信协议,功能和数据参数的多个灯单元组成。 舞台照明系统由模块化控制系统控制,该模块化控制系统包括与可以具有不同通信协议和数据格式的多个控制设备互连的模块化控制器主机。 模块化控制器主机由多个输入和输出模块,大容量存储设备和主处理器内核组成,全部由多个数据总线互连。 输入模块用作模块化控制器主机和各种控制设备的各种协议之间的接口。 类似地,输出模块用作模块化控制器主机和各种类型的灯单元的多种协议之间的接口。 模块化控制器主机通过提供一个或多个所述输入或输出模块具有转换参数命令的能力,作为接口系统,必要时能够容纳具有不同通信协议的控制设备和具有不同通信协议,功能和数据的输出设备 格式。 该系统还可以包括用于照明系统的分布式控制系统,其中两个或更多个全功能控制装置在线同时控制来自控制装置的多个发光体中的任一个的任何功能。 还使用用于仲裁和解决多个控制台之间或之间的冲突的各种方法。

    METHOD FOR PROGRAMMING A THREE-DIMENSIONAL WORKPIECE SCAN PATH FOR A METROLOGY SYSTEM
    5.
    发明申请
    METHOD FOR PROGRAMMING A THREE-DIMENSIONAL WORKPIECE SCAN PATH FOR A METROLOGY SYSTEM 有权
    用于编程系统系统的三维工作扫描路径的方法

    公开(公告)号:US20160103443A1

    公开(公告)日:2016-04-14

    申请号:US14511100

    申请日:2014-10-09

    IPC分类号: G05B19/21

    摘要: A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program.

    摘要翻译: 一种用于为包括3D运动控制系统,第一类型Z高度感测系统和第二类Z高度感测系统的度量系统的三维(3D)工件扫描路径进行编程的方法,其提供较不精确的表面 在更高的Z高度测量范围内的Z高度测量。 该方法包括:将代表性工件放置在测量系统的台上,为代表性工件定义至少第一工件扫描路径段,确定沿着第一工件扫描路径段的初步实际表面Z高度测量值,以及确定精确 3D扫描路径用于移动第一种类型的Z高度感测系统,以执行精确的表面Z高度测量。 精确的3D扫描路径基于确定的初步实际表面Z高度测量。 精确的3D扫描路径可用于执行精确的表面Z高度测量或存储以用于检查程序。