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公开(公告)号：US06229144B1
公开(公告)日：2001-05-08
申请号：US09212404
申请日：1998-12-16
IPC分类号： H01L3109
摘要： A bolometric heat detector having an active part composed of at least two coplanar electrodes (8, 10) placed in electrical contact with a first thin semiconducting layer (6), doped by a first doping agent with a first type of conductivity. There is a second thin semiconducting layer (4) doped like the first layer or undoped, and a third thin semiconducting layer (2) doped by a second doping agent with a second type of conductivity opposed to the first. The second layer (4) is placed between the first (6) and the third (2) layers.
摘要翻译： 一种热辐射热检测器，其具有由至少两个共面电极（8,10）构成的有源部分，所述至少两个共面电极（8,10）与第一薄膜半导体层（6）电接触，由第一掺杂剂掺杂，具有第一类型的导电性。 存在掺杂类似于第一层或未掺杂的第二薄半导体层（4）和由第二掺杂剂掺杂的第三薄半导电层（2），其具有与第一掺杂相对的第二类型的导电性。 第二层（4）被放置在第一层（6）和第三层（2）之间。
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12.发明授权Device for detection of electromagnetic radiation with low sensitivity to spatial noise 有权用于检测对空间噪声敏感度低的电磁辐射的装置公开(公告)号：US08803074B2
公开(公告)日：2014-08-12
申请号：US13084006
申请日：2011-04-11
申请人： Jean-Jacques Yon , Patrick Robert
发明人： Jean-Jacques Yon , Patrick Robert
IPC分类号： G12B13/00
摘要： An electromagnetic radiation detection device including multiple elementary detectors grouped into one or more sub-assemblies each including several elementary detectors, where each elementary detector is connected by an interconnection to an impedance-matching device. The impedance-matching device is common to all the elementary detectors of a single sub-assembly, in each sub-assembly the interconnections have roughly the same resistance value.
摘要翻译： 一种电磁辐射检测装置，其包括分组成一个或多个子组件的多个基本检测器，每个子组件包括几个基本检测器，其中每个基本检测器通过互连连接到阻抗匹配装置。 阻抗匹配装置对于单个子组件的所有基本检测器是共同的，在每个子组件中互连具有大致相同的电阻值。
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公开(公告)号：US09417134B2
公开(公告)日：2016-08-16
申请号：US14131298
申请日：2012-07-13
申请人： Charlie Koechlin , Patrick Bouchon , Riad Haidar , Jean-Luc Pelouard , Jean-Jacques Yon , Joël Deschamps , Fabrice Pardo , Stéphane Collin
发明人： Charlie Koechlin , Patrick Bouchon , Riad Haidar , Jean-Luc Pelouard , Jean-Jacques Yon , Joël Deschamps , Fabrice Pardo , Stéphane Collin
IPC分类号： H04N5/33 , G01J5/20 , G01J5/08 , H01L27/146
CPC分类号： G01J5/20 , G01J5/08 , G01J5/0853 , G01J2005/204 , H01L27/14685 , H04N5/33
摘要： According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers (300) of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane (301) suspended above said supporting substrate, said membrane consisting of an element (305) for absorbing the incident radiation and a thermometric element (304) in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (311), a dielectric film (310), and a second metallic film (309), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band. The area of the microbolometer pixel covered by said membrane (301) is less than or equal to half of the total area of the microbolometer pixel.
摘要翻译： 根据一个方面，本发明涉及一种用于在给定光谱带中的热辐射的热检测的微热辐射计阵列，其包括支撑衬底和以阵列布置的给定尺寸的微热计（300）阵列。 每个所述微伏热计包括悬挂在所述支撑基底上方的膜（301），所述膜由用于吸收入射辐射的元件（305）和与所述吸收体热接触的测温元件（304）组成，所述温度测量元件 。 所述吸收元件包括至少一个第一金属/绝缘体/金属（MIM）结构，其包括具有亚微米级厚度的三层重叠膜的多层，即第一金属膜（311），电介质膜（310）和第二金属膜 （309），所述MIM结构能够在所述光谱带中具有至少一个波长的所述入射辐射的共振吸收。 由所述膜（301）覆盖的微热辐射计像素的面积小于或等于微测热计像素的总面积的一半。
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