Manufacturing method for metallic stamper and metallic stamper and, manufacturing method for optical disk substrate with the use of the stamper and optical disk fabricated by the manufacturing method
    11.
    发明授权
    Manufacturing method for metallic stamper and metallic stamper and, manufacturing method for optical disk substrate with the use of the stamper and optical disk fabricated by the manufacturing method 失效
    金属压模和金属压模的制造方法以及使用通过制造方法制造的压模和光盘的光盘基板的制造方法

    公开(公告)号:US06352656B1

    公开(公告)日:2002-03-05

    申请号:US09311638

    申请日:1999-05-14

    IPC分类号: B29D1100

    摘要: The present invention provides a method for manufacturing optical disk substrates whereby grooves and pits of optical disk substrates are formed highly accurately and finely, so that resulting optical disks can be of large-capacity and reduced in noise level. A coat of an organic material is provided on a substrate which is to be a master, on which a mask material is patterned as an etching mask. After the coat of the organic material is etched, the mask material is removed, whereby a master is obtained. A metallic coat is formed to the master. A metallic main body portion is integrally formed on the metallic coat. A metallic portion comprising the metallic coat and metallic main body portion is separated from the master. A metallic stamper is thus formed.

    摘要翻译: 本发明提供了一种光盘基板的制造方法,由此能够高精度地精细地形成光盘基板的凹槽和凹坑,从而使得所得到的光盘容量大,噪音水平降低。 在作为母版的基板上设置有机材料涂层,掩模材料被图案化为蚀刻掩模。 在蚀刻有机材料的涂层之后,去除掩模材料,从而获得母版。 形成一个金属外套到主机。 金属主体部分一体地形成在金属外壳上。 包含金属涂层和金属主体部分的金属部分与主体分离。 由此形成金属压模。