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    Magnetic head and method of manufacturing the magnetic head
    11.
    发明申请
    Magnetic head and method of manufacturing the magnetic head 审中-公开
    磁头及制造磁头的方法

    公开(公告)号：US20080316656A1

    公开(公告)日：2008-12-25

    申请号：US12214748

    申请日：2008-06-20

    申请人： Kazuhito Miyata ,  Kentarou Namiki ,  Nobuto Yasui ,  Hideaki Tanaka ,  ATsuko Okawa ,  Akihiro Namba ,  Yoshiki Yonamoto

    发明人： Kazuhito Miyata ,  Kentarou Namiki ,  Nobuto Yasui ,  Hideaki Tanaka ,  ATsuko Okawa ,  Akihiro Namba ,  Yoshiki Yonamoto

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  B82Y10/00 ,  B82Y25/00 ,  G11B5/3909 ,  G11B5/41 ,  G11B2005/3996 ,  Y10T29/49048

    摘要： Embodiments of the present invention provide a magnetic head suitable for high density recording at a high yield by reducing the thickness of an air-bearing surface protection layer of a magnetic head and suppressing reduction in the signal-to-noise (S/N) ratio of a read element. According to one embodiment, a read element of a magnetic head has a magnetoresistive effect film (TMR film) between a lower magnetic shield layer and an upper magnetic shield layer, and has a refill film and a magnetic domain control film in both sides of the TMR film. The TMR film is configured by a lower metal layer, an antiferromagnetic layer, a ferromagnetic pinned layer, an intermediate layer, a ferromagnetic free layer, and an upper metal layer. An air-bearing surface protection layer, including a silicon nitride film about 2.0 nm in thickness, is formed on a recording medium facing surface of the TMR film. Since silicon in the silicon nitride film is inactivated by nitrogen, the silicon does not damage the TMR film. Therefore, noise of the read element can be controlled to be at a low level.

    摘要翻译： 本发明的实施例通过减小磁头的空气轴承表面保护层的厚度并且抑制信噪比（S / N）比的降低来提供适于高收率地高密度记录的磁头 的读取元素。 根据一个实施例，磁头的读取元件在下磁屏蔽层和上磁屏蔽层之间具有磁阻效应膜（TMR膜），并且在该磁屏蔽的两侧具有补充膜和磁畴控制膜 TMR膜。 TMR膜由下金属层，反铁磁层，铁磁性钉扎层，中间层，铁磁性自由层和上金属层构成。 在TMR膜的面向记录介质的表面上形成包含厚度约为2.0nm的氮化硅膜的空气轴承表面保护层。 由于氮化硅膜中的硅被氮气灭活，因此硅不会损坏TMR膜。 因此，可以将读取元件的噪声控制在低水平。

    METHOD FOR FABRICATING MAGNETIC HEAD SLIDER
    12.
    发明申请
    METHOD FOR FABRICATING MAGNETIC HEAD SLIDER 失效
    制造磁头滑块的方法

    公开(公告)号：US20080062579A1

    公开(公告)日：2008-03-13

    申请号：US11845010

    申请日：2007-08-24

    申请人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

    发明人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

    IPC分类号： G11B5/33

    CPC分类号： G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041

    摘要： Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

    摘要翻译： 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。

    Method for fabricating magnetic head slider
    13.
    发明授权
    Method for fabricating magnetic head slider 失效
    制造磁头滑块的方法

    公开(公告)号：US07735213B2

    公开(公告)日：2010-06-15

    申请号：US11845010

    申请日：2007-08-24

    申请人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

    发明人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

    IPC分类号： H04R31/00

    CPC分类号： G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041

    摘要： Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

    摘要翻译： 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。