公开(公告)号：US07735213B2

公开(公告)日：2010-06-15

申请号：US11845010

申请日：2007-08-24

申请人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

发明人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

IPC分类号： H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041

摘要： Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

摘要翻译： 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。

公开(公告)号：US20080062579A1

公开(公告)日：2008-03-13

申请号：US11845010

申请日：2007-08-24

申请人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

发明人： Nobuto Yasui ,  Katsuro Watanabe ,  Takateru Seki ,  Kazuhito Miyata ,  Tetsuya Matsusaki

IPC分类号： G11B5/33

CPC分类号： G11B5/3163 ,  G11B5/3169 ,  G11B5/3173 ,  G11B5/6011 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49041

摘要： Embodiments of the present invention provide a method of fabricating a magnetic head slider realizing high-recording density at high-yields by preventing formation of a short circuit on the air-bearing surface of a magnetic head slider and preventing formation of an oxidized layer with significant film thickness which increases the effective magnetic spacing, on the air-bearing surface of the magnetic head slider. According to one embodiment, after air-bearing surface mechanical lapping of a row bar or a magnetic head slider, cleaning is performed by ion beam bombardment to remove a conductive smear. Oxygen exposure is performed to recover a damaged region which was formed by ion beam bombardment at the end face of an intermediate layer of a magnetoresistive film 5. Thereafter, air-bearing surface protection films are formed and followed by rail formation. If the processes are performed on the row bar, the row bar is cut into individual separated magnetic head sliders.

摘要翻译： 本发明的实施例提供一种制造磁头滑块的方法，其通过防止在磁头滑块的空气轴承表面上形成短路而以高产率实现高记录密度，并且防止形成具有显着性的氧化层 在磁头滑块的空气轴承表面上增加有效磁间距的膜厚度。 根据一个实施例，在排杆或磁头滑块的空气轴承表面机械研磨之后，通过离子束轰击进行清洁以除去导电涂片。 进行氧曝光以回收在磁阻膜5的中间层的端面处通过离子束轰击形成的损伤区域。之后，形成空气轴承表面保护膜，然后形成轨道。 如果在行条上执行过程，则将行条切割成单独的分离的磁头滑块。

公开(公告)号：US06992860B2

公开(公告)日：2006-01-31

申请号：US10372406

申请日：2003-02-25

申请人： Eiji Nakanishi ,  Yukihiro Isono ,  Shigeru Tadokoro ,  Sunao Yonekawa ,  Tetsuya Matsusaki ,  Masao Matsushita

发明人： Eiji Nakanishi ,  Yukihiro Isono ,  Shigeru Tadokoro ,  Sunao Yonekawa ,  Tetsuya Matsusaki ,  Masao Matsushita

IPC分类号： G11B5/60

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3106 ,  G11B5/3116 ,  G11B5/3136 ,  G11B5/3173 ,  G11B5/3967 ,  G11B5/40 ,  G11B2005/3996

摘要： Protrusion of head elements to an air bearing surface is effectively reduced and their contact with a recording medium is thereby prevented by forming a level gap (concave) of about 3 nm in a multilayered protective film on the air bearing surface in a part matching an inductive write thin film head in a recording/reproducing separated type magnetic head and thereby offsetting protrusion of the head elements to the air bearing surface due to thermal deformation of the heads.

摘要翻译： 头部元件向空气轴承表面的突出被有效地减少，并且因此通过在匹配感应的部分的空气轴承表面上的多层保护膜中形成约3nm的水平间隙（凹陷）来防止与记录介质的接触 在记录/再现分离型磁头中写入薄膜头，由此由于头的热变形而使头元件向空气轴承表面的突出。

公开(公告)号：US08218266B2

公开(公告)日：2012-07-10

申请号：US11899772

申请日：2007-09-07

申请人： Yuki Shimizu ,  Junguo Xu ,  Jianhua Li ,  Hidekazu Kohira ,  Tetsuya Matsusaki ,  Hidetoshi Anan

发明人： Yuki Shimizu ,  Junguo Xu ,  Jianhua Li ,  Hidekazu Kohira ,  Tetsuya Matsusaki ,  Hidetoshi Anan

IPC分类号： G11B5/60

CPC分类号： G11B5/3173 ,  G11B5/3106 ,  G11B5/3169 ,  G11B5/40 ,  G11B5/6082

摘要： Embodiments of the present invention provide a slider that may suppress contamination from being attached to the flying surface of the slider without influence on reduction of the flying height of the slider. Ions exerting an effect of decreasing surface energy are implanted in the whole surface of a flying surface of a magnetic head slider except for a front rail surface and a center rail surface. According to this, contamination is prevented from being attached to a front step bearing surface, a side step bearing surface, a center step bearing surface and a negative pressure groove where contamination is particularly liable to be attached in the flying surface of the magnetic head slider, so as to suppress destabilization in flying of the slider.

摘要翻译： 本发明的实施例提供了一种滑块，其可以抑制污染物附着到滑块的飞行表面，而不会影响滑块的飞行高度的减小。 具有降低表面能的效果的离子注入除了前导轨面和中心导轨面之外的磁头滑块的飞行面的整个表面。 因此，防止了污染物附着在前台阶承载面，侧台承载面，中心台阶承载面和负压槽上，污染物尤其容易附着在磁头滑块的飞行面上 ，以抑制滑块的飞行中的不稳定。

公开(公告)号：US08361284B2

公开(公告)日：2013-01-29

申请号：US11800182

申请日：2007-05-03

申请人： Roberto Cabral Frias ,  Mario Garcia De la Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

发明人： Roberto Cabral Frias ,  Mario Garcia De la Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

IPC分类号： C23C14/32

CPC分类号： G11B5/3169 ,  G11B5/3163 ,  G11B5/6005

摘要： A method for reducing the height of a defect associated with an air bearing surface of a hard disk drive slider is disclosed. The technology initially ion mills for a first period of time at a first angle relative to an air bearing surface of a disk drive slider to remove a first portion of the air bearing surface. Then the technology ion mills for a second period of time at a second angle relative to an air bearing surface of the disk drive slider to remove a second portion of the air bearing surface. The second portion of the air bearing surface comprises a defect wherein the ion milling at the second angle reduces the height of the defect with respect to the air bearing surface.

摘要翻译： 公开了一种用于降低与硬盘驱动器滑块的空气轴承表面相关联的缺陷的高度的方法。 该技术首先离开第一时间段相对于盘驱动器滑块的空气轴承表面以第一角度铣削以移除空气轴承表面的第一部分。 然后，该技术离子相对于盘驱动器滑块的空气轴承表面以第二角度研磨第二时间段，以去除空气轴承表面的第二部分。 空气轴承表面的第二部分包括缺陷，其中以第二角度的离子铣削相对于空气轴承表面减小缺陷的高度。

公开(公告)号：US20080273271A1

公开(公告)日：2008-11-06

申请号：US11800182

申请日：2007-05-03

申请人： Roberto Cabral Frias ,  Mario Garcia De La Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

发明人： Roberto Cabral Frias ,  Mario Garcia De La Cruz ,  Cherngye Hwang ,  Tetsuya Matsusaki ,  Omar E. Montero Camacho ,  Yongjian Sun

IPC分类号： G11B5/60

CPC分类号： G11B5/3169 ,  G11B5/3163 ,  G11B5/6005

摘要： A method for reducing the height of a defect associated with an air bearing surface of a hard disk drive slider is disclosed. The technology initially ion mills for a first period of time at a first angle relative to an air bearing surface of a disk drive slider to remove a first portion of the air bearing surface. Then the technology ion mills for a second period of time at a second angle relative to an air bearing surface of the disk drive slider to remove a second portion of the air bearing surface. The second portion of the air bearing surface comprises a defect wherein the ion milling at the second angle reduces the height of the defect with respect to the air bearing surface.

摘要翻译： 公开了一种用于降低与硬盘驱动器滑块的空气轴承表面相关联的缺陷的高度的方法。 该技术首先离开第一时间段相对于盘驱动器滑块的空气轴承表面以第一角度铣削以移除空气轴承表面的第一部分。 然后，该技术离子相对于盘驱动器滑块的空气轴承表面以第二角度研磨第二时间段，以去除空气轴承表面的第二部分。 空气轴承表面的第二部分包括缺陷，其中以第二角度的离子铣削相对于空气轴承表面减小缺陷的高度。

公开(公告)号：US20080170332A1

公开(公告)日：2008-07-17

申请号：US11899772

申请日：2007-09-07

申请人： Yuki Shimizu ,  Junguo Xu ,  Jianhua Li ,  Hidekazu Kohira ,  Tetsuya Matsusaki ,  Hidetoshi Anan

发明人： Yuki Shimizu ,  Junguo Xu ,  Jianhua Li ,  Hidekazu Kohira ,  Tetsuya Matsusaki ,  Hidetoshi Anan

IPC分类号： G11B5/60

CPC分类号： G11B5/3173 ,  G11B5/3106 ,  G11B5/3169 ,  G11B5/40 ,  G11B5/6082

摘要： Embodiments of the present invention provide a slider that may suppress contamination from being attached to the flying surface of the slider without influence on reduction of the flying height of the slider, and a method for producing the same. According to one embodiment, ions exerting an effect of decreasing surface energy are implanted in the whole surface of a flying surface of a magnetic head slider except for a front rail surface and a center rail surface. According to this, contamination is prevented from being attached to a front step bearing surface, a side step bearing surface, a center step bearing surface and a negative pressure groove where contamination is particularly liable to be attached in the flying surface of the magnetic head slider, so as to suppress destabilization in flying of the slider. The ion implantation in the whole surface of the flying surface of the magnetic head slider increases the surface roughness of the front rail surface and the center rail surface, but in the case where ions are implanted by excepting the front rail surface and the center rail surface as in accordance with embodiments of the invention, contamination may be effectively prevented from being attached to the flying surface without increase in surface roughness, whereby destabilization in flying of the slider may be suppressed.

摘要翻译： 本发明的实施例提供一种滑块，其可以抑制污染物附着到滑块的飞行表面，而不影响滑块的飞行高度的降低，及其制造方法。 根据一个实施例，除了前导轨表面和中心导轨表面之外，在磁头滑块的飞行表面的整个表面中注入施加降低表面能的效果的离子。 因此，防止了污染物附着在前台阶承载面，侧台承载面，中心台阶承载面和负压槽上，污染物尤其容易附着在磁头滑块的飞行面上 ，以抑制滑块的飞行中的不稳定。 在磁头滑块的飞行表面的整个表面中的离子注入增加了前轨表面和中心轨道表面的表面粗糙度，但是在除了前轨表面和中心轨道表面之外注入离子的情况下 如根据本发明的实施例，可以有效地防止污染物附着到飞行表面而不增加表面粗糙度，从而可以抑制滑块的飞行不稳定。

公开(公告)号：US06795275B2

公开(公告)日：2004-09-21

申请号：US10330368

申请日：2002-12-30

申请人： Hidetoshi Anan ,  Tetsuya Matsusaki ,  Hidekazu Kohira ,  Yoshihiro Shiroishi ,  Masaaki Matsumoto ,  Hideaki Tanaka ,  Teruyoshi Higashiya ,  Kiyoshi Hashimoto ,  Akira Matsuda ,  Takanori Yamazaki

发明人： Hidetoshi Anan ,  Tetsuya Matsusaki ,  Hidekazu Kohira ,  Yoshihiro Shiroishi ,  Masaaki Matsumoto ,  Hideaki Tanaka ,  Teruyoshi Higashiya ,  Kiyoshi Hashimoto ,  Akira Matsuda ,  Takanori Yamazaki

IPC分类号： G11B560

CPC分类号： G11B5/6005 ,  G11B5/6082

摘要： A magnetic disk device, which is provided with a magnetic head slider mounted with a magnetic head and a magnetic disk, and of which the magnetic head slider has the possibility of contacting the magnetic disk at the vicinity of the magnetic head. The magnetic head slider has the size of 1.25 mm or less in length, 1 mm or less in width and 0.3 mm or less in thickness, and the friction force exerted between the magnetic head slider and the magnetic disk is 10 mN or less. The magnetic head comprises four substantially parallel surfaces and the depth from a first surface which is the most adjacent surface to the magnetic disk to a second surface is 10 nm to 50 nm, the depth from the second surface to a third surface is 50 nm to 200 nm, and the depth from the third surface to a fourth surface is 400 nm to 1 &mgr;m.

摘要翻译： 一种磁盘装置，其设置有安装有磁头和磁盘的磁头滑块，并且其磁头滑块具有与磁头附近的磁盘接触的可能性。 磁头滑块的长度为1.25mm以下，宽度为1mm以下，厚度为0.3mm以下，磁头滑块与磁盘之间的摩擦力为10mN以下。 磁头包括四个基本上平行的表面，并且从第一表面到与磁盘最相邻的表面到第二表面的深度为10nm至50nm，从第二表面到第三表面的深度为50nm至 200nm，从第三面至第四面的深度为400nm〜1μm。