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公开(公告)号：US08509040B2
公开(公告)日：2013-08-13
申请号：US12760591
申请日：2010-04-15
申请人： Kazuyoshi Yamazaki
发明人： Kazuyoshi Yamazaki
CPC分类号： G11B7/1381 , G11B7/1353 , G11B2007/0013
摘要： An optical pickup device includes a polarization diffraction grating to diverge an optical beam reflected from an optical disc and an optical detector to receive the optical beam diverged by the polarization diffraction grating, a polarization of 0 order diffracted light diffracted through the polarization diffraction grating is substantially perpendicular to that of a +1 order diffracted light diffracted therethrough, and a polarization filter having a plurality of domains is mounted between the polarization diffraction grating and the optical detector.
摘要翻译： 一种光学拾取装置包括偏振光衍射光栅，以使从光盘反射的光束和光学检测器发散，以接收由偏振衍射光栅发散的光束，通过偏振衍射光栅衍射的0级衍射光的极化基本上 垂直于通过其衍射的+1级衍射光，并且具有多个畴的偏振滤光器安装在偏振衍射光栅和光学检测器之间。
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公开(公告)号：US08295145B2
公开(公告)日：2012-10-23
申请号：US12341203
申请日：2008-12-22
申请人： Kazuyoshi Yamazaki
发明人： Kazuyoshi Yamazaki
IPC分类号： G11B7/12
CPC分类号： G11B7/0903 , G11B7/08582 , G11B7/094 , G11B7/0948 , G11B7/0956 , G11B7/131 , G11B7/1353 , G11B7/1378 , G11B7/13927 , G11B2007/0013
摘要： An optical pickup device divides signal light so as to detect the divided signal light. For example, a photodetector can include a region “A” and another region “B.” Among diffracted light diffracted from a track on an optical disc, only zeroth-order diffraction light enters region “A”, whereas the zeroth-order diffraction light, + first-order diffraction light, and − first-order diffraction light enter region “B”. A focusing error signal from the photodetector is produced based upon a signal detected by the photodetector, whereas a tracking error signal is produced based upon signals detected from the regions “A” and “B.” A stable focusing error signal and a stable tracking error signal can be detected with respect to a dual layer optical disc, or a multi layer optical disc.
摘要翻译： 光拾取装置将信号光分开，以便检测划分的信号光。 例如，光检测器可以包括区域A和另一区域B.在光盘上的轨道衍射的衍射光中，只有零级衍射光进入区域A，而零级衍射光+一阶衍射 光和一级衍射光进入区域B.基于由光电检测器检测的信号产生来自光电检测器的聚焦误差信号，而基于从区域A和B检测的信号产生跟踪误差信号。 可以相对于双层光盘或多层光盘来检测稳定的聚焦误差信号和稳定的跟踪误差信号。
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公开(公告)号：US08081550B2
公开(公告)日：2011-12-20
申请号：US12608121
申请日：2009-10-29
CPC分类号： G11B7/0917 , G11B7/0916 , G11B2007/0013
摘要： In a multilayer disc has an increased number of recording layers) spaced by spacing from each other, a generation interval between focus error (FE) signals detected from the respective recording layers becomes small. This causes mutual interference between the FE signals and a resulting undesired offset and the like in the signals, leading to a significantly deteriorated quality of the FE signals. To avoid this, in an optical pickup device according to the present invention, detection surfaces are newly added at positions adjacent to the FE signal detection surfaces, a predetermined detection signal obtained from the newly-added detection surfaces is multiplied by a predetermined coefficient value depending on the spacing between the recording layers, and the multiplied signal is subtracted from the original FE signal. As a result, mutual interference between the FE signals can be remarkably reduced.
摘要翻译： 在多层盘中具有增加数量的记录层），间隔彼此间隔，从各个记录层检测到的聚焦误差（FE）信号之间的产生间隔变小。 这导致FE信号之间的相互干扰和信号中产生的不期望的偏移等，导致FE信号的质量显着劣化。 为了避免这种情况，在根据本发明的光学拾取装置中，在与FE信号检测表面相邻的位置处新添加检测表面，将从新添加的检测表面获得的预定检测信号乘以预定系数值取决于 在记录层之间的间隔上，并且从原始FE信号中减去相乘的信号。 结果，可以显着地减少FE信号之间的相互干扰。
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14.发明授权公开(公告)号：US07867920B2
公开(公告)日：2011-01-11
申请号：US12097888
申请日：2006-11-22
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： H01L21/67207 , H01L21/268 , H01L21/28211 , H01L21/31645 , H01L21/318
摘要： There is provided a method for modifying a high-k dielectric thin film provided on the surface of an object using a metal organic compound material. The method includes a preparation process for providing the object with the high-k dielectric thin film formed on the surface thereof, and a modification process for applying UV rays to the highly dielectric thin film in an inert gas atmosphere while maintaining the object at a predetermined temperature to modify the high-k dielectric thin film. According to the above constitution, the carbon component can be eliminated from the high-k dielectric thin film, and the whole material can be thermally shrunk to improve the density, whereby the occurrence of defects can be prevented and the film density can be improved to enhance the specific permittivity and thus to provide a high level of electric properties.
摘要翻译： 提供了一种使用金属有机化合物材料修饰在物体表面上设置的高k电介质薄膜的方法。 该方法包括用于向物体提供形成在其表面上的高k电介质薄膜的制备方法，以及在惰性气体气氛中向高电介质薄膜施加紫外线的改进方法，同时将物体保持在预定的 温度修改高k电介质薄膜。 根据上述结构，可以从高k电介质薄膜中除去碳成分，并且整个材料可以热收缩以提高密度，从而可以防止缺陷的发生，并且可以提高膜密度 提高比电容率，从而提供高水平的电性能。
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公开(公告)号：US07754293B2
公开(公告)日：2010-07-13
申请号：US11454095
申请日：2006-06-16
IPC分类号： B05D3/00 , C08J7/18 , G21H5/00 , G21H1/00 , B01J19/08 , B29C71/02 , B29C71/04 , C04B41/00 , H01F41/00
CPC分类号： H01L21/67109 , H01L21/0214 , H01L21/02238 , H01L21/02255 , H01L21/02332 , H01L21/0234 , H01L21/31662 , H01L21/67155
摘要： A film forming method for forming an oxide film on a surface of a substrate to be processed in a processing vessel at a predetermined processing temperature, wherein the method includes a temperature elevating step of elevating a temperature of said substrate to a predetermined processing temperature, the step of elevating the temperature including a step of holding the substrate in an atmosphere containing oxygen before the substrate reaches a temperature of 450° C. The film forming method further comprises, after the step of elevating the temperature, a film forming step of forming a radical oxide film by irradiating the substrate surface with energy capable of exciting an oxygen gas.
摘要翻译： 一种用于在预定处理温度下在处理容器中在待处理基板的表面上形成氧化膜的成膜方法，其中所述方法包括将所述基板的温度升高到预定处理温度的升温步骤， 提高温度的步骤，包括在基板达到450℃的温度之前将基板保持在含氧气氛中的步骤。成膜方法还包括在提升温度的步骤之后，形成 通过用能够激发氧气的能量照射衬底表面的自由基氧化物膜。
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公开(公告)号：US07397648B2
公开(公告)日：2008-07-08
申请号：US10985718
申请日：2004-11-10
申请人： Akinobu Otaka , Kazuyoshi Yamazaki
发明人： Akinobu Otaka , Kazuyoshi Yamazaki
IPC分类号： H02N13/00
CPC分类号： H01L21/6833 , H01L21/67103 , H01L21/6831
摘要： An electrostatic chuck comprises a main body with a mounting surface and an opposed surface facing away from the mounting surface. At least one chucking electrode extends along the mounting surface of the main body and a first heater layer extends along the opposed surface of the main body. The electrostatic chuck can be used to heat and electrostatic ally attract a work piece, such as a wafer, to a work piece support surface during various processing techniques.
摘要翻译： 静电卡盘包括具有安装表面的主体和背离安装表面的相对表面。 至少一个夹持电极沿着主体的安装表面延伸，并且第一加热器层沿着主体的相对表面延伸。 在各种处理技术中，静电卡盘可以用于加热和静电联合地将工件（例如晶片）吸引到工件支撑表面。
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公开(公告)号：US20080094976A1
公开(公告)日：2008-04-24
申请号：US11979131
申请日：2007-10-31
IPC分类号： G11B5/58
CPC分类号： G11B7/133 , G11B7/0901 , G11B7/0906 , G11B7/094 , G11B7/0943 , G11B7/131 , G11B7/1353 , G11B7/1381 , G11B2007/0013
摘要： A method of detecting a servo signal of an optical disc having a plurality of recording layers includes focusing and irradiating a laser light onto the optical disc, dividing a laser light reflected from the optical disc into a plurality of reflected laser lights by a division element, wherein each of said reflected laser lights having a different outgoing direction, and irradiating the reflected laser lights onto a plurality of light receiving parts of a light detector. A focus error signal is detected under a knife edge method and a tracking error signal is detected.
摘要翻译： 检测具有多个记录层的光盘的伺服信号的方法包括将激光聚焦并照射到光盘上，通过分割元件将从光盘反射的激光分成多个反射激光， 其中每个所述反射激光具有不同的输出方向，并将反射的激光照射到光检测器的多个光接收部分上。 在刀刃法下检测到聚焦误差信号，并检测到跟踪误差信号。
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公开(公告)号：US20080094948A1
公开(公告)日：2008-04-24
申请号：US11680705
申请日：2007-03-01
IPC分类号： G11B7/00
CPC分类号： G11B7/133 , G11B7/0901 , G11B7/0906 , G11B7/094 , G11B7/0943 , G11B7/131 , G11B7/1353 , G11B7/1381 , G11B2007/0013
摘要： An optical pickup apparatus is provided with a dividing element having a plurality of regions. The dividing element is capable of dividing a light flux reflected by the optical disc into a plurality of light fluxes having different outgoing directions. Each region of the dividing element and light receiving parts of a light detector are structured such that when a target information recording layer of the optical disc is brought into focus, a light flux reflected from the target information recording layer is focused on the light receiving parts of the light detector, and a light flux reflected from other information recording layer than the target information recording layer is not irradiated onto the light receiving parts of the light detector.
摘要翻译： 光拾取装置具有多个区域的分割元件。 分割元件能够将由光盘反射的光束分成具有不同输出方向的多个光束。 分光元件的各个区域和光检测器的受光部分被构造为使得当光盘的目标信息记录层被聚焦时，从目标信息记录层反射的光束聚焦在光接收部分 并且从目标信息记录层的其它信息记录层反射的光束不被照射到光检测器的光接收部分上。
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公开(公告)号：US20080093569A1
公开(公告)日：2008-04-24
申请号：US11979132
申请日：2007-10-31
IPC分类号： H01L31/14
CPC分类号： G11B7/133 , G11B7/0901 , G11B7/0906 , G11B7/094 , G11B7/0943 , G11B7/131 , G11B7/1353 , G11B7/1381 , G11B2007/0013
摘要： An optical pickup apparatus includes a semiconductor laser for emitting a laser light, an objective lens for irradiating the light flux emitted from the semiconductor laser onto an optical disc, and a light detector for receiving the light flux reflected from the optical disc. The light detector has a light receiving part that comprises five regions of a region 1, a region 2, a region 3 and a region 4.
摘要翻译： 光拾取装置包括用于发射激光的半导体激光器，用于将从半导体激光器发射的光束照射到光盘上的物镜，以及用于接收从光盘反射的光束的光检测器。 光检测器具有包含区域1，区域2，区域3和区域4的五个区域的光接收部分。
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公开(公告)号：US08542560B2
公开(公告)日：2013-09-24
申请号：US11506307
申请日：2006-08-17
申请人： Kazuyoshi Yamazaki
发明人： Kazuyoshi Yamazaki
IPC分类号： G11B7/00
CPC分类号： G11B7/1353 , G11B7/0903 , G11B7/095
摘要： Disclosed are a module to detect a tracking error signal that is easy to be assembled and robust against variation in a track angle, a diffraction grating, an optical pickup, and an optical disc apparatus that enable the module to be realized, wherein a diffraction grating divided into at least three areas, first, second, and third areas, is used; the second area is an area that do not diffract light; and focusing positions of light diffracted by the first and third areas sandwiching the second area therebetween on an optical disc are arranged with a spacing of (2n−1)×t/2 in an optical disc radial direction, respectively, where n is a nonnegative integer and t is a spacing of guide grooves of the optical disc.
摘要翻译： 公开了一种用于检测跟踪误差信号的模块，该跟踪误差信号容易组装并且抵抗能够实现模块的轨道角度的衍射光栅，光学拾取器和光盘装置的变化，其中衍射光栅 分为至少三个区域，第一，第二和第三区域; 第二个区域是不衍射光的区域; 并且将由第一和第三区域夹在其间的第一和第三区域衍射的光的聚焦位置分别以光盘径向的间隔（2n-1）×t / 2布置，其中n是非负的 整数和t是光盘的引导槽的间隔。
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