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公开(公告)号：US07397648B2
公开(公告)日：2008-07-08
申请号：US10985718
申请日：2004-11-10
申请人： Akinobu Otaka , Kazuyoshi Yamazaki
发明人： Akinobu Otaka , Kazuyoshi Yamazaki
IPC分类号： H02N13/00
CPC分类号： H01L21/6833 , H01L21/67103 , H01L21/6831
摘要： An electrostatic chuck comprises a main body with a mounting surface and an opposed surface facing away from the mounting surface. At least one chucking electrode extends along the mounting surface of the main body and a first heater layer extends along the opposed surface of the main body. The electrostatic chuck can be used to heat and electrostatic ally attract a work piece, such as a wafer, to a work piece support surface during various processing techniques.
摘要翻译： 静电卡盘包括具有安装表面的主体和背离安装表面的相对表面。 至少一个夹持电极沿着主体的安装表面延伸，并且第一加热器层沿着主体的相对表面延伸。 在各种处理技术中，静电卡盘可以用于加热和静电联合地将工件（例如晶片）吸引到工件支撑表面。
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公开(公告)号：US20060098379A1
公开(公告)日：2006-05-11
申请号：US10985718
申请日：2004-11-10
申请人： Akinobu Otaka , Kazuyoshi Yamazaki
发明人： Akinobu Otaka , Kazuyoshi Yamazaki
IPC分类号： H01T23/00
CPC分类号： H01L21/6833 , H01L21/67103 , H01L21/6831
摘要： An electrostatic chuck comprises a main body with a mounting surface and an opposed surface facing away from the mounting surface. At least one chucking electrode extends along the mounting surface of the main body and a first heater layer extends along the opposed surface of the main body. The electrostatic chuck can be used to heat and electrostatic ally attract a work piece, such as a wafer, to a work piece support surface during various processing techniques.
摘要翻译： 静电吸盘包括具有安装表面的主体和背离安装表面的相对表面。 至少一个夹持电极沿着主体的安装表面延伸，并且第一加热器层沿着主体的相对表面延伸。 在各种处理技术中，静电卡盘可以用于加热和静电联合地将工件（例如晶片）吸引到工件支撑表面。
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公开(公告)号：US08565059B2
公开(公告)日：2013-10-22
申请号：US13489549
申请日：2012-06-06
申请人： Kazuyoshi Yamazaki
发明人： Kazuyoshi Yamazaki
IPC分类号： G11B7/00
CPC分类号： G11B7/1353 , G11B7/0901 , G11B2007/0013
摘要： An optical pickup device includes a laser diode for emitting a laser beam, an objective lens for collecting the light beam emitted from the laser diode and irradiating an optical disc with the collected light beam, a diffraction element for making the light beam reflected from the optical disc diverge, and a detector having a plurality of detection parts for receiving the diverging light beams caused by the diffraction element. The diffraction element has first, second, and third divided areas, wherein a 0th-order diffracted light from the first divided area, the second divided area, and the third divided area is detected by at least four divided detection parts; and at least two detection parts for detecting the light beam diffracted at the first divided area into first or higher diffraction order are aligned in a direction generally perpendicular to the track of the optical disc.
摘要翻译： 光拾取装置包括用于发射激光束的激光二极管，用于收集从激光二极管发射的光束并用收集的光束照射光盘的物镜，用于使光束从光学反射的衍射元件 以及具有多个用于接收由衍射元件引起的发散光束的检测部件的检测器。 衍射元件具有第一，第二和第三分割区域，其中来自第一分割区域，第二分割区域和第三分割区域的0级衍射光由至少四个分开的检测部分检测; 并且用于将在第一分割区域处衍射的光束检测为第一或更高衍射级的至少两个检测部件在大致垂直于光盘轨道的方向上排列。
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公开(公告)号：US08488425B2
公开(公告)日：2013-07-16
申请号：US12955269
申请日：2010-11-29
IPC分类号： G11B7/00
CPC分类号： G11B7/1381 , G11B7/131 , G11B7/1353 , G11B2007/0013
摘要： An optical pickup device including: a laser diode for emitting laser light; an objective lens which irradiates an optical beam emitted from the laser diode; an actuator which displaces the objective lens in a radius direction of the optical disc; a grating for branches an optical beam reflected by an information recording layer into plural regions; and one photodetector having plural light receiving parts for receiving the branched optical beams, wherein the photodetector has a first light receiving part which detects zero-th order grating diffracted light and plural second light receiving parts which detecting grating diffracted light having an order not less than that of ±first order grating diffracted light; a detected signal of the zero-th order grating diffracted light is defined as a reproduction signal; and a detected signal of the grating diffracted light is defined as a signal for servo controlling.
摘要翻译： 一种光学拾取装置，包括：用于发射激光的激光二极管; 用于照射从激光二极管发射的光束的物镜; 在所述光盘的半径方向上移动所述物镜的致动器; 光栅，用于将由信息记录层反射的光束分支成多个区域; 以及一个光电检测器，具有用于接收分支光束的多个光接收部分，其中光电检测器具有检测零级光栅衍射光的第一光接收部分和多个第二受光部分，其检测具有不小于 ±一阶光栅衍射光; 将零级光栅衍射光的检测信号定义为再现信号; 光栅衍射光的检测信号被定义为用于伺服控制的信号。
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5.发明授权Optical pickup apparatus and optical disc apparatus with a single beam system 有权具有单光束系统的光学拾取装置和光盘装置公开(公告)号：US07978587B2
公开(公告)日：2011-07-12
申请号：US12497966
申请日：2009-07-06
IPC分类号： G11B7/135
CPC分类号： G11B7/133 , G11B7/0901 , G11B7/0906 , G11B7/094 , G11B7/0943 , G11B7/131 , G11B7/1353 , G11B7/1381 , G11B2007/0013
摘要： An optical pickup apparatus is provided with a dividing element having a plurality of regions. The dividing element is capable of dividing a light flux reflected by the optical disc into a plurality of light fluxes having different outgoing directions. Each region of the dividing element and light receiving parts of a light detector are structured such that when a target information recording layer of the optical disc is brought into focus, a light flux reflected from the target information recording layer is focused on the light receiving parts of the light detector, and a light flux reflected from other information recording layer than the target information recording layer is not irradiated onto the light receiving parts of the light detector.
摘要翻译： 光拾取装置具有多个区域的分割元件。 分割元件能够将由光盘反射的光束分成具有不同输出方向的多个光束。 分光元件的各个区域和光检测器的受光部分被构造为使得当光盘的目标信息记录层被聚焦时，从目标信息记录层反射的光束聚焦在光接收部分 并且从目标信息记录层的其它信息记录层反射的光束不被照射到光检测器的光接收部分上。
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公开(公告)号：US20110130953A1
公开(公告)日：2011-06-02
申请号：US12995330
申请日：2008-06-02
申请人： Hironori Ohishi , Yohei Nakajima , Mizuki Tomono , Kazushi Tahara , Hirofumi Tanigawa , Takashi Aoki , Kazuyoshi Yamazaki
发明人： Hironori Ohishi , Yohei Nakajima , Mizuki Tomono , Kazushi Tahara , Hirofumi Tanigawa , Takashi Aoki , Kazuyoshi Yamazaki
CPC分类号： G08G1/096866 , G01C21/3617 , G01C21/3641 , G01C21/3682 , G08G1/096816 , G08G1/096838
摘要： The server apparatus has a life log database storing life log data indicating user behavior history. The server apparatus receives the related information request from the navigation apparatus, and searches the life log database based on the related information request to obtain the related information including the place information. Then, the server apparatus transmits the related information to the navigation apparatus. On the other hand, the navigation apparatus sets the guiding route based on the user's input, and generates the route information. The navigation apparatus obtains the ID information from the user's mobile terminal, and transmits the related information request including the ID information and the route information to the server apparatus. Further, when receiving the related information from the server apparatus, the navigation apparatus determines the candidate of the stop-by place based on the place information included in the related information, and displays the candidate on the display device.
摘要翻译： 服务器装置具有存储指示用户行为历史的生命日志数据的生命日志数据库。 服务器装置从导航装置接收相关信息请求，并根据相关信息请求搜索生命日志数据库，以获得包括地点信息的相关信息。 然后，服务器装置将相关信息发送到导航装置。 另一方面，导航装置根据用户的输入设定引导路线，并生成路线信息。 导航装置从用户的移动终端获取ID信息，并将包含ID信息和路由信息的相关信息请求发送到服务器装置。 此外，当从服务器装置接收到相关信息时，导航装置根据包含在相关信息中的地点信息确定候选人的候补，并将该候选者显示在显示装置上。
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公开(公告)号：US07858509B2
公开(公告)日：2010-12-28
申请号：US12088940
申请日：2007-04-25
IPC分类号： H01L21/3205
CPC分类号： H01L21/3144 , H01L21/28194 , H01L21/28202 , H01L21/28211 , H01L21/31604 , H01L21/31612 , H01L21/31641 , H01L29/518
摘要： A disclosed substrate processing method in a single wafer substrate processing device including a first process position for introducing nitrogen atoms to a high-dielectric film and a second process position for performing heat treatment on the high-dielectric film includes: successively conveying plural substrates to be processed to the first process position and the second process position one by one; and successively performing the introduction of nitrogen atoms and the heat treatment on the high-dielectric film on the substrates to be processed, wherein the treatment on the substrate to be processed is started within 30 seconds at the second process position after the process at the first position.
摘要翻译： 在包括将氮原子引入高电介质膜的第一处理位置和用于对高电介质膜进行热处理的第二处理位置的单晶片基板处理装置中公开的基板处理方法包括：将多个基板依次传送为 一个一个地处理到第一处理位置和第二处理位置; 依次对待处理的基板上的高电介质膜进行氮原子的引入和热处理，其中在第一处理后的第二处理位置的待处理基板上的处理在30秒内开始 位置。
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公开(公告)号：US20080219119A1
公开(公告)日：2008-09-11
申请号：US12074968
申请日：2008-03-07
IPC分类号： G11B5/58
CPC分类号： G11B7/1353 , G11B7/0903 , G11B7/0912 , G11B7/131 , G11B7/133 , G11B2007/0013
摘要： Provided is an optical pickup which can eliminate a problem of causing a focus error signal and a tracking error signal to fluctuate due to interference of a signal light beam with a return light beam from another recording surface of a multi-layer optical disc during reproduction,comprising: a laser source for emitting an optical beam, an objective lens for focusing the light beam onto the multi-layer optical disc, a polarizing grating located at a position through which a reflected light beam from the multi-layer optical disc passes, for branching the reflected beam into at least two light beams, that is, a 0-order light beam and a +1-order light beam having a direction of polarization which is orthogonal to that of the 0-order light beam, an optical detector for receiving the two light beams, a first light receiving zone which is provided in the optical detector, and onto which the 0-order light is irradiated, and a second light receiving zone which is provided in the optical detector and onto which the +1-order light beam is irradiated, wherein the optical detector is capable of delivering a push-pull signal obtained from the first light receiving zone, and a signal obtained by a computation formula similar to the push-pull signal, from the second light receiving zone, and for delivering signals capable of creating a tracking error signal and a focus error signal from a difference signal between the two delivered signals.
摘要翻译： 提供了一种光学拾取器，其可以消除由于在再现期间由于信号光束与来自多层光盘的另一记录表面的返回光束的干涉而导致聚焦误差信号和跟踪误差信号的波动的问题， 包括：用于发射光束的激光源，用于将光束聚焦到多层光盘上的物镜，位于多层光盘反射光束经过的位置的偏振光栅，用于 将反射光束分成至少两个光束，即具有正交于0阶光束的偏振方向的0级光束和+ 1级光束，光检测器 接收两个光束，设置在光学检测器中的第一光接收区，其上照射0次光的第一光接收区和设置在光学检测器中的第二光接收区 并且其上照射了+ 1级光束，其中光学检测器能够传递从第一光接收区获得的推挽信号，以及通过类似于推挽信号的计算公式获得的信号 ，并且用于从两个传送的信号之间的差分信号传送能够产生跟踪误差信号和聚焦误差信号的信号。
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公开(公告)号：US20060205188A1
公开(公告)日：2006-09-14
申请号：US11432332
申请日：2006-05-12
CPC分类号： H01J37/32009 , H01L21/0214 , H01L21/02238 , H01L21/02249 , H01L21/02332 , H01L21/0234 , H01L21/31662
摘要： A method to solve such a problem that plasma will not ignite in restarting operation of a processing container that has not been operated with the inside kept drawn to vacuum. Gas containing oxygen is passed in a processing container 21, and ultraviolet light is irradiated to the gas while gas inside the processing container 21 is being discharged. After that, a remote plasma source 26 is driven to ignite plasma.
摘要翻译： 一种解决在没有被内部保持抽吸到真空中的处理容器的重新启动操作中等离子体不会点燃的问题的方法。 含有氧的气体通过处理容器21，在排出处理容器21内的气体的同时对该气体照射紫外线。 之后，驱动远程等离子体源26以点燃等离子体。
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公开(公告)号：US20060174833A1
公开(公告)日：2006-08-10
申请号：US10549285
申请日：2003-12-08
CPC分类号： H01L21/3144 , H01L21/0214 , H01L21/02326
摘要： It is intended to efficiently nitride an extremely thin oxide film or oxynitride film of 0.4 nm or less thickness while minimizing a film increase. In particular, oxygen radicals are generated through oxygen radical generating unit so as to oxidize a silicon substrate with the generated oxygen radicals, thereby forming an oxide film on the silicon substrate, and further nitrogen radicals are generated through nitrogen radical generating unit so as to nitride the surface of the oxide film, thereby forming an oxynitride film.
摘要翻译： 旨在有效地氮化极薄的氧化膜或氮氧化物膜，其厚度为0.4nm或更小，同时使膜增加最小化。 特别地，通过氧自由基产生单元产生氧自由基，以便利用所产生的氧自由基氧化硅衬底，从而在硅衬底上形成氧化膜，并且通过氮自由基产生单元产生另外的氮自由基，从而氮化物 氧化膜的表面，从而形成氮氧化物膜。
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