公开(公告)号：US20190392860A1

公开(公告)日：2019-12-26

申请号：US16433377

申请日：2019-06-06

Applicant: SHOWA DENKO K.K.

Inventor： Lei ZHANG ,  Chen XU ,  Takayuki FUKUSHIMA ,  Kazuya NIWA ,  Tetsuya KANBE ,  Hisato SHIBATA ,  Takehiro YAMAGUCHI ,  Tomoo SHIGE

IPC: G11B5/31 ,  G11B5/48 ,  G11B5/65

Abstract: A heat-assisted magnetic recording medium includes: a substrate; an underlayer; and a magnetic layer including an alloy having an L10 structure, wherein the underlayer includes, from the substrate side, a bcc underlayer including a substance having a bcc structure, a first oxide layer that is in contact with the bcc underlayer, and a second oxide layer that is in contact with the magnetic layer. The bcc underlayer, the first oxide layer, and the second oxide layer are stacked in the recited order. The first oxide layer and the second oxide layer include magnesium oxide, and the second oxide layer further includes one or more compounds selected from the group consisting of vanadium oxide, vanadium nitride, and vanadium carbide.

公开(公告)号：US20130188278A1

公开(公告)日：2013-07-25

申请号：US13742657

申请日：2013-01-16

Applicant: SHOWA DENKO K.K.

Inventor： Makoto HIWATARI ,  Akira YAMANE ,  Tomoo SHIGE ,  Akira SAKAWAKI

IPC: G11B5/84

CPC classification number: G11B5/84 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/855 ,  H01L21/31116 ,  Y10T29/49046 ,  Y10T29/49048

Abstract: A method of manufacturing a magnetic recording medium is provided. The method includes: forming a magnetic layer 2 on a non-magnetic substrate 1; forming a mask layer 3 on the magnetic layer 2; forming a resist layer 4 which is patterned into a predetermined shape on the mask layer 3; patterning the mask layer 3 into a shape corresponding to the resist layer 4 using the resist layer 4; patterning the magnetic layer 2 into a shape corresponding to the mask layer 3 using the patterned mask layer 3; and removing the mask layer 3 that remains on the magnetic layer 2 by reactive plasma etching. The reactive plasma etching is performed under an atmosphere containing an organic compound having at least one kind or plural kinds of functional groups selected from a hydroxyl group, a carbonyl group, a hydroxy carbonyl group, an alkoxy group, and an ether group.

Abstract translation: 提供一种制造磁记录介质的方法。 该方法包括：在非磁性基板1上形成磁性层2; 在磁性层2上形成掩模层3; 在掩模层3上形成图案化为规定形状的抗蚀剂层4; 使用抗蚀剂层4将掩模层3图案化成与抗蚀剂层4相对应的形状; 使用图案化掩模层3将磁性层2图案化成与掩模层3相对应的形状; 以及通过反应性等离子体蚀刻去除残留在磁性层2上的掩模层3。 活性等离子体蚀刻在含有选自羟基，羰基，羟基羰基，烷氧基和醚基中的至少一种或多种官能团的有机化合物的气氛下进行。